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Crystal Growth And Evaluation Of Silicon For Vlsi And Ulsi


Author : Golla Eranna
language : en
Publisher: CRC Press
Release Date : 2014-12-08

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Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges. Crystal Growth and Evaluation of Silicon for VLSI and ULSI is one of the first books to cover the systematic growth of silicon single crystals and the complete evaluation of silicon, from sand to useful wafers for device fabrication. Written for engineers and researchers working in semiconductor fabrication industries, this practical text: Describes different techniques used to grow silicon single crystals Explains how grown single-crystal ingots become a complete silicon wafer for integrated-circuit fabrication Reviews different methods to evaluate silicon wafers to determine suitability for device applications Analyzes silicon wafers in terms of resistivity and impurity concentration mapping Examines the effect of intentional and unintentional impurities Explores the defects found in regular silicon-crystal lattice Discusses silicon wafer preparation for VLSI and ULSI processing Crystal Growth and Evaluation of Silicon for VLSI and ULSI is an essential reference for different approaches to the selection of the basic silicon-containing compound, separation of silicon as metallurgical-grade pure silicon, subsequent purification, single-crystal growth, and defects and evaluation of the deviations within the grown crystals.

The Formation Of Structural Imperfections In Semiconductor Silicon


Author : V. I. Talanin
language : en
Publisher: Cambridge Scholars Publishing
Release Date : 2018-12-14

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Today, it is difficult to imagine all spheres of human activity without personal computers, solid-state electronic devices, micro- and nanoelectronics, photoconverters, and mobile communication devices. The basic material of modern electronics and for all of these industries is semiconductor silicon. Its properties and applications are determined by defects in its crystal structure. However, until now, there has been no complete and reliable description of the creation and transformation of such a defective structure. This book solves this mystery through two different approaches to semiconductor silicon: the classical and the probabilistic. This book brings together, for the first time, all existing experimental and theoretical information on the internal structure of semiconductor silicon. It will appeal to a wide range of readers, from materials scientists and practical engineers to students.

Kristalle Ver Ndern Unsere Welt


Author : Wolfgang Neumann
language : de
Publisher: Walter de Gruyter GmbH & Co KG
Release Date : 2018-03-19

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Anliegen dieses Buches ist es, dem Leser in einer allgemein verständlichen Form die faszinierende Vielfalt der Kristallwelt aufzuzeigen. Im einleitenden Teil werden einerseits die Zusammenhänge zwischen natürlichen Kristallen, Mineralen und Gesteinen und andererseits das Auftreten von natürlichen und künstlichen Kristallen in Natur und Technik beschrieben. Ein kurzer historischer Abriss führt von den Anfängen der Entdeckung der Kristalle bis hin zur Entwicklung der Kristallographie als eigenständige Wissenschaft. Es wird anschaulich erläutert, wie Kristalle aufgebaut sind und wie die Kristalleigenschaften durch die strukturelle Symmetrie und durch die vorhandenen Kristallbaufehler beeinflusst werden. Die Bedeutung der modernen Kristallographie und ihre wissenschaftlichen Meilensteine bis zur Ausrichtung des Internationalen Jahres der Kristallographie 2014 durch die UNESCO und die International Union of Crystallography (IUCr) werden illustriert. Die Rolle bedeutender Frauen in der kristallographischen Forschung wird besonders hervorgehoben. Contents Was sind Kristalle? Das Elektronikzeitalter: Vom Silizium zu den Verbindungshalbleitern Nanokristalline Materialien: Neue Werkstoffe mit extremen Eigenschaften Die Bedeutung der Kristallographie und ihre wissenschaftliche Entwicklung Anhang: Tabellen und Darstellungen zur Symmetrie von Kristallen

Semiconductor Silicon Crystal Technology


Author : Fumio Shimura
language : en
Publisher: Academic Pr
Release Date : 1989

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Crystal Growth And Characterization Of Advanced Materials


Author : A. N. Christensen
language : en
Publisher: World Scientific Pub Co Inc
Release Date : 1988-12

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Characterization And Metrology For Ulsi Technology


Author : David G. Seiler
language : en
Publisher: Amer Inst of Physics
Release Date : 2005-01-01

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Download Characterization And Metrology For Ulsi Technology written by David G. Seiler and has been published by Amer Inst of Physics this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-01-01 with Computers categories.


The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise.

Microchip Fabrication Sixth Edition


Author : Peter Van Zant
language : en
Publisher: McGraw Hill Professional
Release Date : 2013-10-22

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Download Microchip Fabrication Sixth Edition written by Peter Van Zant and has been published by McGraw Hill Professional this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-10-22 with Technology & Engineering categories.


The most complete, current guide to semiconductor processing Fully revised to cover the latest advances in the field, Microchip Fabrication, Sixth Edition explains every stage of semiconductor processing, from raw material preparation to testing to packaging and shipping the finished device. This practical resource provides easy-to-understand information on the physics, chemistry, and electronic fundamentals underlying the sophisticated manufacturing materials and processes of modern semiconductors. State-of-the-art processes and cutting-edge technologies used in the patterning, doping, and layering steps are discussed in this new edition. Filled with detailed illustrations and real-world examples, this is a comprehensive, up-to-date introduction to the technological backbone of the high-tech industry. COVERAGE INCLUDES: The semiconductor industry Properties of semiconductor materials and chemicals Crystal growth and silicon wafer preparation Wafer fabrication and packaging Contamination control Productivity and process yields Oxidation The ten-step patterning process--surface preparation to exposure; developing to final inspection Next generation lithography Doping Layer deposition Metallization Process and device evaluation The business of wafer fabrication Devices and integrated circuit formation Integrated circuits Packaging