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Materials Research Society Symposia Proceedings. Volume 38. Plasma Synthesis and Etching of Electronic Materials Held on November 27-30, 1984 at Boston, Massachusetts
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Publisher: Defense Technical Information Center Year: 1985 Pages: 539 Language: EN
About this book
The symposium covered topics ranging from plasma diagnostics to mechanisms of plasma etching and growth of materials. The spirit of the symposium was to provide understanding of the chemistry and physics of plasma-materials interaction. Contents: Plasma Processes and Diagnostics; Plasma Etching; Plasma Deposition of Thin Films; and Plasma Oxidation, Nitridation and Passivation of Surfaces....
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