Fabrication Design Of Resonant Microdevices
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Fabrication And Design Of Resonant Microdevices
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Author : Behraad Bahreyni
language : en
Publisher: William Andrew
Release Date : 2008
Fabrication And Design Of Resonant Microdevices written by Behraad Bahreyni and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008 with Technology & Engineering categories.
This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for micromachined devices will be given. This section is a necessary part of the book as the options during the design of a resonant device strongly depend on how the device is going to be fabricated. Resonant devices are generally two port systems: an input port to excite the structure and cause the resonance and an output port to monitor the behavior of the device. The next two chapters of the book are dedicated to excitation and signal detection methods. An analytic model of the device behavior is one of the most valuable design tools. A chapter is dedicated to this important issue followed by numerical simulation techniques. The book also covers the issues of damping and noise for resonant MEMS. These two topics are of particular importance for high-Q devices. Electronic interfacing and packaging issues are also discussed in separate chapters. The book concludes by giving numerous examples of resonant MEMS from the academia and industry with a brief analysis of them using the material that was presented in the earlier chapters. * Offers numerous academic and industrial examples of resonant MEMS * Provides an analytic model of device behavior * Explains two-port systems in detail * Devotes ample space to excitation and signal detection methods * Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Fabrication Design Of Resonant Microdevices
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Author : Behraad Bahreyni
language : en
Publisher: William Andrew
Release Date : 2008-10-20
Fabrication Design Of Resonant Microdevices written by Behraad Bahreyni and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-10-20 with Technology & Engineering categories.
This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Introduction To Graphene Based Nanomaterials
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Author : Luis E. F. Foa Torres
language : en
Publisher: Cambridge University Press
Release Date : 2014-01-23
Introduction To Graphene Based Nanomaterials written by Luis E. F. Foa Torres and has been published by Cambridge University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-01-23 with Science categories.
A detailed primer describing the most effective theoretical and computational methods and tools for simulating graphene-based systems.
Capacitive Silicon Resonators
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Author : Nguyen Van Toan
language : en
Publisher: CRC Press
Release Date : 2019-07-10
Capacitive Silicon Resonators written by Nguyen Van Toan and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-07-10 with Technology & Engineering categories.
Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology. Features Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator. Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor. Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.
Handbook Of Silicon Based Mems Materials And Technologies
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Author : Markku Tilli
language : en
Publisher: Elsevier
Release Date : 2009-12-08
Handbook Of Silicon Based Mems Materials And Technologies written by Markku Tilli and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-12-08 with Technology & Engineering categories.
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Micro And Nano Machined Electrometers
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Author : Yong Zhu
language : en
Publisher: Springer Nature
Release Date : 2020-02-13
Micro And Nano Machined Electrometers written by Yong Zhu and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-02-13 with Technology & Engineering categories.
This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.
Nanotechnology Environmental Health And Safety
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Author : Matthew Hull
language : en
Publisher: Elsevier
Release Date : 2009-11-17
Nanotechnology Environmental Health And Safety written by Matthew Hull and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-11-17 with Technology & Engineering categories.
This book tackles the debate over nanotechnology's environmental health and safety (EHS) by thoroughly explaining EHS issues, financial implications, foreseeable risks (i.e. exposure, dose, hazards of nanomaterials), and the implications of occupational hygiene precautions and consumer protections. Real-world case studies are included, e.g. the discussion of a leading chemical company's unusual pairing with the USA's largest environmental NGO, and an innovative program designed for small- to mid-sized businesses, which became a model approach for proactive nanotechnology EHS risk management. Considers the potential of nanotechnology from multiple perspectives (NGO, insurance industry, small business, etc) Provides guidance and advice for appropriate, proactive risk management strategies Reviews toxicological studies and industrial initiatives, documented with actual case studies Of significant interest to CEOs/CTOs of technology companies (SMEs), Health and Safety officers of technology companies (SMEs), Government officials (HSE), Toxicology experts, and venture capitalists
Micromanufacturing Engineering And Technology
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Author : Yi Qin
language : en
Publisher: William Andrew
Release Date : 2010-07-02
Micromanufacturing Engineering And Technology written by Yi Qin and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-07-02 with Technology & Engineering categories.
Micromanufacturing Engineering and Technology presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication Outlines system engineering issues pertaining to handling, metrology, testing, integration and software Explains widely used micro parts in bio / medical industry, information technology and automotive engineering Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging
Applied Nanotechnology
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Author : Jeremy Ramsden
language : en
Publisher: William Andrew
Release Date : 2009-10-12
Applied Nanotechnology written by Jeremy Ramsden and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-10-12 with Science categories.
Applied Nanotechnology: The Conversion of Research Results to Products examines the commercial and social aspects of nanotechnology. The book is organized into four parts. Part 1 presents an overview of nanotechnology. It discusses the definition of nanotechnology; the relationship between wealth, technology, and science; the relationship between nanotechnology and innovation; and the question of why one might wish to introduce nanotechnology. Part 2 explains the nanotechnology business and the applications of nanotechnology in a wide range of industries, including engineering, aerospace, automotive, food, textiles, information technologies, and health. Part 3 deals with specific commercial and financial aspects. These include business models for nanotechnology enterprises, demand assessment for nanotechnology products, and the design of nanotechnology products. Part 4 looks at the future of nanotechnology. It examines how nanotechnology can contribute to the big challenges faced by humanity, such as climate change and terrorism. Ethical issues are also considered, including risk, uncertainty, and regulation.
Nano And Microfabrication For Industrial And Biomedical Applications
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Author : Regina Luttge
language : en
Publisher: William Andrew
Release Date : 2016-06-12
Nano And Microfabrication For Industrial And Biomedical Applications written by Regina Luttge and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-06-12 with Technology & Engineering categories.
Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems