Investigation On Solid Phase Crystallization Techniques For Low Temperature Polysilicon Thin Film Transistors
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Investigation On Solid Phase Crystallization Techniques For Low Temperature Polysilicon Thin Film Transistors
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Author : Qinglong Li
language : en
Publisher:
Release Date : 2013
Investigation On Solid Phase Crystallization Techniques For Low Temperature Polysilicon Thin Film Transistors written by Qinglong Li and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013 with Annealing of crystals categories.
"Low-temperature polysilicon (LTPS) has emerged as a dominant technology for high performance thin-film transistors (TFTs) used in mobile liquid crystal display (LCD) and organic light emitting diode (OLED) display products. As users demand higher quality in flat panel displays with a larger viewing area and finer resolution, the improvement in carrier mobility of LTPS compared to that of hydrogenated amorphous silicon (a-Si:H) makes it an excellent candidate as a channel material for TFT. Advantages include improvements in switching speed and the ability to incorporate peripheral scan and data driver circuitry onto a low cost display substrate. Solid-phase crystallization (SPC) is a useful technique to realize polysilicon films due to its simplicity and low cost compared to excimer-laser annealing (ELA),which has many challenges in back-plane manufacturing on large glass panels.Metal induced crystallization (MIC) results in polycrystalline silicon films with grain size as large as tens of microns. Flash-lamp annealing (FLA) is a new and novel method to crystallize a-Si films at high temperature without distortion of the glass substrate by performing an annealing within millisecond range.This work investigates SPC, MIC and FLA techniques to realize LTPS films. In addition, TFTs were designed and fabricated to characterize the device quality of the semiconductor layer, and to compare the performance of different structural arrangements."--Abstract.
Crystallization Of Amorphous Silicon Thin Films Induced By Nanoparticle Seeds
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Author : Taekon Kim
language : en
Publisher:
Release Date : 2009
Crystallization Of Amorphous Silicon Thin Films Induced By Nanoparticle Seeds written by Taekon Kim and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009 with categories.
ABSTRACT: Crystallization of amorphous Si (a-Si) thin film has received extensive interest for their attractive applications into Si thin film transistors and Si based solar cells. Among various crystallization techniques, Solid phase crystallization (SPC) and Excimer laser crystallization (ELC) were investigated. Firstly, Solid phase crystallization (SPC) of amorphous silicon thin films deposited by the DC magnetron sputtering system with a modification in nucleation step was investigated at low temperature. The thin film consists of polycrystalline nanoparticles embedded in an amorphous matrix which can act as nuclei during crystallization, resulting in a lower thermal energy for the nucleation. The lowering energy barrier for nucleation would shorten the transition time from amorphous into polycrystalline silicon resulting from the reduction of incubation time and also lower the processing temperature spontaneously. In addition, a comprehensive study of the growth mechanism of the sputtered amorphous silicon thin films is presented during annealing. Samples were prepared with various substrate temperatures and RF power in order to optimize the crystallization of a-Si after the deposition. Also, the effects of annealing condition were examined. Low pressure N2 ambient during SPC promoted crystallization of a-Si thin films and the crystallinity. The low pressure annealing had a large impact on the crystallinity and growth behavior of subsequent films.
Thin Film Transistor Technology 8
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Author : Yue Kuo
language : en
Publisher: The Electrochemical Society
Release Date : 2006
Thin Film Transistor Technology 8 written by Yue Kuo and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with Thin film transistors categories.
This issue includes funadmental and applied topics on materials, processes, devices, circuits, and new and novel applicaitons related to TFTs.
Thin Film Transistor Technologies V
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Author : Yue Kuo
language : en
Publisher: The Electrochemical Society
Release Date : 2001
Thin Film Transistor Technologies V written by Yue Kuo and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Technology & Engineering categories.
Thin Film Transistors Polycrystalline Silicon Thin Film Transistors
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Author : Yue Kuo
language : en
Publisher: Springer Science & Business Media
Release Date : 2004
Thin Film Transistors Polycrystalline Silicon Thin Film Transistors written by Yue Kuo and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Thin film transistors categories.
This is the first reference on amorphous silicon and polycrystalline silicon thin film transistors that gives a systematic global review of all major topics in the field. These volumes include sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes (structures, a-Si: H, dielectric, metallization, catalytic CVD), and existing and new applications. The chapters are written by leading researchers who have extensive experience with reputed track records. Thin Film Transistors provides practical information on preparing individual functional a-Si: H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si: H TFT operations and unique material characteristics. Readers are also exposed to a wide range of existing and new applications in industries.
Thin Film Transistors
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Author : Cherie R. Kagan
language : en
Publisher: CRC Press
Release Date : 2003-02-25
Thin Film Transistors written by Cherie R. Kagan and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003-02-25 with Technology & Engineering categories.
A single-source treatment of developments in TFT production from international specialists. It interweaves overlapping areas in multiple disciplines pertinent to transistor fabrication and explores the killer application of amorphous silicon transistors in active matrix liquid crystal displays.
Microelectronics Microsystems And Nanotechnology Papers Presented Of At Mmn 2000
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Author : Androula G Nassiopoulou
language : en
Publisher: World Scientific
Release Date : 2001-10-19
Microelectronics Microsystems And Nanotechnology Papers Presented Of At Mmn 2000 written by Androula G Nassiopoulou and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001-10-19 with Technology & Engineering categories.
This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.
Thin Film Transistors 9 Tft 9
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Author : Y. Kuo
language : en
Publisher: The Electrochemical Society
Release Date : 2008-10
Thin Film Transistors 9 Tft 9 written by Y. Kuo and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-10 with Thin film transistors categories.
This issue of ECS Transactions includes all aspects of fabrication processes, materials, devices, and applications related to TFTs.
Thin Film Transistor Technologies Vi
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Author : Yue Kuo
language : en
Publisher: The Electrochemical Society
Release Date : 2003
Thin Film Transistor Technologies Vi written by Yue Kuo and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with Thin film transistors categories.
2011 International Conference On Semiconductor Technology For Ultra Large Scale Integrated Circuits And Thin Film Transistors Ulsic Vs Tft
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Author :
language : en
Publisher: The Electrochemical Society
Release Date : 2011
2011 International Conference On Semiconductor Technology For Ultra Large Scale Integrated Circuits And Thin Film Transistors Ulsic Vs Tft written by and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011 with Integrated circuits categories.
