Multiscale Computational Fluid Dynamics Modeling Parallelization And Application To Design And Control Of Plasma Enhanced Chemical Vapor Deposition Of Thin Film Solar Cells
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Multiscale Computational Fluid Dynamics Modeling Parallelization And Application To Design And Control Of Plasma Enhanced Chemical Vapor Deposition Of Thin Film Solar Cells
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Author : Marquis Grant Crose
language : en
Publisher:
Release Date : 2018
Multiscale Computational Fluid Dynamics Modeling Parallelization And Application To Design And Control Of Plasma Enhanced Chemical Vapor Deposition Of Thin Film Solar Cells written by Marquis Grant Crose and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018 with categories.
Today, plasma-enhanced chemical vapor deposition (PECVD) remains the dominant processing method for the manufacture of silicon thin films due to inexpensive production and low operating temperatures. Nonetheless, thickness non-uniformity continues to prevent the deposition of high quality thin film layers across large wafer substrates; thickness deviations up to 20% are typical for 200 mm and above wafers. Regardless of industry, be it solar cell production or microelectronic devices, the demand for densely packed die with high quality creates a need for improved modeling and operational strategies. Over the past two decades, a number of research groups have built microscopic models for thin film growth, as well as macroscopic reactor models to approximate the gas phase reaction and transport phenomena present within PECVD systems. Unfortunately, many of the proposed modeling and simulation techniques have been overly simplified in order to reduce computational demands, or fail to capture both the macro- and microscopic domains simultaneously. In order to address persistent issues related to thickness non-uniformity in silicon processing, advanced multiscale models are needed. Motivated by these considerations, novel reactor modeling and operational control strategies are developed in this dissertation. Specifically, a macroscopic reactor scale model is presented which captures the creation of a radio frequency (RF) plasma, transport throughout the reactor domain, and thirty-four dominant plasma-phase reactions. In Chapters 2 and 3, the gas-phase dynamics are approximated using a first principles-based model, whereas the latter half of this dissertation relies on a computational fluid dynamics approach. At the microscopic scale, the complex particle interactions that define the growth of a-Si:H thin film layers are tracked using a hybrid kinetic Monte Carlo algorithm. These scales are linked via a dynamic boundary condition which is updated at the completion of each time step. A computationally efficient parallel programming scheme allows for significantly shortened computational times and solutions to previously infeasible system sizes. Transient batch deposition cycles using the aforementioned multiscale model provide new insight into the operation of PECVD systems; spatial non-uniformity in the concentration of SiH3 and H above the substrate surface is recognized as the primary mechanism responsible for non-uniform thin film product thicknesses. Two key modes are identified to address the aforementioned non-uniformity: (1) run-to-run control of the wafer substrate temperature through the adaptation of an exponentially-weighted moving average algorithm, and (2) the design of new CVD geometries which minimize spatial variations in the concentration of deposition species. These efforts have resulted in optimized PECVD showerhead designs and spatial temperature profiles which limit the thin film thickness non-uniformity to within 1% of the product specification.
Multiscale Computational Fluid Dynamics Modeling Of Thermal And Plasma Atomic Layer Deposition
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Author : Yichi Zhang
language : en
Publisher:
Release Date : 2021
Multiscale Computational Fluid Dynamics Modeling Of Thermal And Plasma Atomic Layer Deposition written by Yichi Zhang and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021 with categories.
Facilitated by the increasing importance and demand of semiconductors for the smartphoneand even the automobile industry, thermal atomic layer deposition (ALD) has gained tremendous industrial interest as it offers a way to efficiently deposit thin-films with ultra-high conformity. It is chosen largely due to its superior ability to deliver ultra-conformal dielectric thin-films with high aspect-ratio surface structures, which are encountered more and more often in the novel design of metal-oxide-semiconductor field-effect transistors (MOSFETs) in the NAND (Not-And)-type flash memory devices. Based on the traditional thermal ALD method, the plasma enhanced atomic layer deposition (PEALD) allows for lower operating temperature and speeds up the deposition process with the involvement of plasma species. Despite the popularity of these two methods, the development of their operation policies remains a complicated and expensive task, which motivates the construction of an accurate and comprehensive simulation model. A series of studies have been carried out to elucidate the mechanisms and the conceptof the PEALD process. In particular, process characterization focuses on the development of a first-principles-based three-dimensional, multiscale computational fluid dynamics (CFD) model, together with reactor geometry optimizations, of SiO2 thinfilm thermal atomic layer deposition (ALD) using bis(tertiary-butylamino)silane (BTBAS) and ozone as precursors. Also, a comprehensive multiscale computational fluid dynamics (CFD) model incorporating the plasma generation chamber is used in the deposition of HfO2 thin-films utilizing tetrakis(dimethylamido) hafnium (TDMAHf) and O2 plasma as precursors. Despite the great deal of research effort, ALD and PEALD processes have not been fullycharacterized from the view point of process control. This study aims to use previously developed multiscale CFD simulation model to design and evaluate an optimized control scheme to deal with industrially-relevant disturbances. Specifically, an integrated control scheme using a proportional-integral (PI) controller and a run-to-run (R2R) controller is proposed and evaluated to ensure the deposition of high-quality conformal thin-films. The ALD and PEALD processes under typical disturbances are simulated using the multiscale CFD model, and the integrated controllers are applied in the process domain. Using the controller parameters determined from the open-loop results, the developed integrated PI-R2R controller successfully mitigates the disturbances in the reactor with the combined effort of both controllers.
Proceedings Of The 2nd International Conference On Electronic Engineering And Renewable Energy Systems
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Author : Bekkay Hajji
language : en
Publisher: Springer Nature
Release Date : 2020-08-14
Proceedings Of The 2nd International Conference On Electronic Engineering And Renewable Energy Systems written by Bekkay Hajji and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-08-14 with Technology & Engineering categories.
This book includes papers presented at the Second International Conference on Electronic Engineering and Renewable Energy (ICEERE 2020), which focus on the application of artificial intelligence techniques, emerging technology and the Internet of things in electrical and renewable energy systems, including hybrid systems, micro-grids, networking, smart health applications, smart grid, mechatronics and electric vehicles. It particularly focuses on new renewable energy technologies for agricultural and rural areas to promote the development of the Euro-Mediterranean region. Given its scope, the book is of interest to graduate students, researchers and practicing engineers working in the fields of electronic engineering and renewable energy.
Classical And Quantum Dynamics In Condensed Phase Simulations Proceedings Of The International School Of Physics
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Author : Bruce J Berne
language : en
Publisher: World Scientific
Release Date : 1998-06-17
Classical And Quantum Dynamics In Condensed Phase Simulations Proceedings Of The International School Of Physics written by Bruce J Berne and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998-06-17 with Science categories.
The school held at Villa Marigola, Lerici, Italy, in July 1997 was very much an educational experiment aimed not just at teaching a new generation of students the latest developments in computer simulation methods and theory, but also at bringing together researchers from the condensed matter computer simulation community, the biophysical chemistry community and the quantum dynamics community to confront the shared problem: the development of methods to treat the dynamics of quantum condensed phase systems.This volume collects the lectures delivered there. Due to the focus of the school, the contributions divide along natural lines into two broad groups: (1) the most sophisticated forms of the art of computer simulation, including biased phase space sampling schemes, methods which address the multiplicity of time scales in condensed phase problems, and static equilibrium methods for treating quantum systems; (2) the contributions on quantum dynamics, including methods for mixing quantum and classical dynamics in condensed phase simulations and methods capable of treating all degrees of freedom quantum-mechanically.
Multiscale Problems Theory Numerical Approximation And Applications
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Author : Alain Damlamian
language : en
Publisher: World Scientific
Release Date : 2011-10-13
Multiscale Problems Theory Numerical Approximation And Applications written by Alain Damlamian and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-10-13 with Mathematics categories.
The focus of this is on the latest developments related to the analysis of problems in which several scales are presented. After a theoretical presentation of the theory of homogenization in the periodic case, the other contributions address a wide range of applications in the fields of elasticity (asymptotic behavior of nonlinear elastic thin structures, modeling of junction of a periodic family of rods with a plate) and fluid mechanics (stationary Navier-Stokes equations in porous media). Other applications concern the modeling of new composites (electromagnetic and piezoelectric materials) and imperfect transmission problems. A detailed approach of numerical finite element methods is also investigated.
Atomic Layer Deposition
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Author : Tommi Kääriäinen
language : en
Publisher: John Wiley & Sons
Release Date : 2013-05-28
Atomic Layer Deposition written by Tommi Kääriäinen and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-05-28 with Technology & Engineering categories.
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
Computational Fluid And Solid Mechanics 2003
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Author : K.J Bathe
language : en
Publisher: Elsevier
Release Date : 2003-06-02
Computational Fluid And Solid Mechanics 2003 written by K.J Bathe and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003-06-02 with Science categories.
Bringing together the world's leading researchers and practitioners of computational mechanics, these new volumes meet and build on the eight key challenges for research and development in computational mechanics. Researchers have recently identified eight critical research tasks facing the field of computational mechanics. These tasks have come about because it appears possible to reach a new level of mathematical modelling and numerical solution that will lead to a much deeper understanding of nature and to great improvements in engineering design. The eight tasks are: The automatic solution of mathematical models Effective numerical schemes for fluid flows The development of an effective mesh-free numerical solution method The development of numerical procedures for multiphysics problems The development of numerical procedures for multiscale problems The modelling of uncertainties The analysis of complete life cycles of systems Education - teaching sound engineering and scientific judgement Readers of Computational Fluid and Solid Mechanics 2003 will be able to apply the combined experience of many of the world's leading researchers to their own research needs. Those in academic environments will gain a better insight into the needs and constraints of the industries they are involved with; those in industry will gain a competitive advantage by gaining insight into the cutting edge research being carried out by colleagues in academia. Features Bridges the gap between academic researchers and practitioners in industry Outlines the eight main challenges facing Research and Design in Computational mechanics and offers new insights into the shifting the research agenda Provides a vision of how strong, basic and exciting education at university can be harmonized with life-long learning to obtain maximum value from the new powerful tools of analysis
Design And Engineering Of Microreactor And Smart Scaled Flow Processes
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Author : Volker Hessel
language : en
Publisher: MDPI
Release Date : 2018-10-08
Design And Engineering Of Microreactor And Smart Scaled Flow Processes written by Volker Hessel and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-10-08 with Technology & Engineering categories.
This book is a printed edition of the Special Issue "Design and Engineering of Microreactor and Smart-Scaled Flow Processes" that was published in Processes
Recent Advances In Technology Research And Education
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Author : Dumitru Luca
language : en
Publisher: Springer
Release Date : 2017-09-08
Recent Advances In Technology Research And Education written by Dumitru Luca and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-09-08 with Technology & Engineering categories.
This book presents selected contributions to the 16th International Conference on Global Research and Education Inter-Academia 2017 hosted by Alexandru Ioan Cuza University of Iași, Romania from 25 to 28 September 2017. It is the third volume in the series, following the editions from 2015 and 2016. Fundamental and applied research in natural sciences have led to crucial developments in the ongoing 4th global industrial revolution, in the course of which information technology has become deeply embedded in industrial management, research and innovation – and just as deeply in education and everyday life. Materials science and nanotechnology, plasma and solid state physics, photonics, electrical and electronic engineering, robotics and metrology, signal processing, e-learning, intelligent and soft computing have long since been central research priorities for the Inter-Academia Community (I-AC) – a body comprising 14 universities and research institutes from Japan and Central/East-European countries that agreed, in 2002, to coordinate their research and education programs so as to better address today’s challenges. The book is intended for use in academic, government, and industrial R&D departments as a reference tool in research and technology education. The 42 peer-reviewed papers were written by more than 119 leading scientists from 14 countries, most of them affiliated to the I-AC.
X Ray Microscopy
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Author : Chris Jacobsen
language : en
Publisher: Cambridge University Press
Release Date : 2019-12-19
X Ray Microscopy written by Chris Jacobsen and has been published by Cambridge University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-12-19 with Medical categories.
A complete introduction to x-ray microscopy, covering optics, 3D and chemical imaging, lensless imaging, radiation damage, and applications.