Plasma Deposition Of Polymeric Thin Films

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Plasma Deposition Of Polymeric Thin Films

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Author : Michael J. Danilich
language : en
Publisher:
Release Date : 1994

Plasma Deposition Of Polymeric Thin Films written by Michael J. Danilich and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Plasma polymerization categories.

Plasma Polymer Films

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Author : Hynek Biederman
language : en
Publisher: World Scientific
Release Date : 2004

Plasma Polymer Films written by Hynek Biederman and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Technology & Engineering categories.

Plasma Polymer Films examines the current status of the deposition and characterization of fluorocarbon-, hydrocarbon- and silicon-containing plasma polymer films and nanocomposites, with plasma polymer matrix. It introduces plasma polymerization process diagnostics such as optical emission spectroscopy (OES, AOES), and describes special deposition techniques such as atmospheric pressure glow discharge. Important issues for applications such as degradation and stability are treated in detail, and structural characterization, basic electrical and optical properties and biomedical applications are discussed.

Plasma Deposition Treatment And Etching Of Polymers

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Author : Riccardo d'Agostino
language : en
Publisher: Elsevier
Release Date : 2012-12-02

Plasma Deposition Treatment And Etching Of Polymers written by Riccardo d'Agostino and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-02 with Technology & Engineering categories.

Plasma Deposition, Treatment, and Etching of Polymers takes a broad look at the basic principles, the chemical processes, and the diagnostic procedures in the interaction of plasmas with polymer surfaces. This recent technology has yielded a large class of new materials offering many applications, including their use as coatings for chemical fibers and films. Additional applications include uses for the passivation of metals, the surface hardening of tools, increased biocompatibility of biomedical materials, chemical and physical sensors, and a variety of micro- and optoelectronic devices. Appeals to a broad range of industries from microelectronics to space technology Discusses a wide array of new uses for plasma polymers Provides a tutorial introduction to the field Surveys various classes of plasma polymers, their chemical and morphological properties, effects of plasma process parameters on the growth and structure of these synthetic materials, and techniques for characterization Interests scientists, engineers, and students alike

Plasma Deposition Of Polymeric Thin Films

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Author : Roger E. Marchant
language : en
Publisher:
Release Date : 1994

Plasma Deposition Of Polymeric Thin Films written by Roger E. Marchant and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with categories.

Plasma Deposition Of Polymeric Thin Films

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Author :
language : en
Publisher:
Release Date : 1994

Plasma Deposition Of Polymeric Thin Films written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with categories.

Chemical Vapor Deposition Polymerization

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Author : Jeffrey B. Fortin
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-03-09

Chemical Vapor Deposition Polymerization written by Jeffrey B. Fortin and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-09 with Science categories.

Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed. This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

Plasma Processing Of Polymers

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Author : Ricardo d'Agostino
language : en
Publisher: Springer Science & Business Media
Release Date : 1997-11-30

Plasma Processing Of Polymers written by Ricardo d'Agostino and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997-11-30 with Technology & Engineering categories.

Proceedings of the NATO Advanced Study Institute on Plasma Treatments and Deposition of Polymers, Acquafredda di Maratea, Italy, May 19-June 2, 1996

Thin Films By Chemical Vapour Deposition

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Author : C.E. Morosanu
language : en
Publisher: Elsevier
Release Date : 2016-06-22

Thin Films By Chemical Vapour Deposition written by C.E. Morosanu and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-06-22 with Technology & Engineering categories.

The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several unique advantages, developed into the most widely used technique for thin film preparation in electronics technology. In the last 25 years, tremendous advances have been made in the science and technology of thin films prepared by means of CVD. This book presents in a single volume, an up-to-date overview of the important field of CVD processes which has never been completely reviewed previously. Contents: Part I. 1. Evolution of CVD Films. Introductory remarks. Short history of CVD thin films. II. Fundamentals. 2. Techniques of Preparing Thin Films. Electrolytic deposition techniques. Vacuum deposition techniques. Plasma deposition techniques. Liquid-phase deposition techniques. Solid-phase deposition techniques. Chemical vapour conversion of substrate. Chemical vapour deposition. Comparison between CVD and other thin film deposition techniques. 3. Chemical Processes Used in CVD. Introduction. Description of chemical reactions used in CVD. 4. Thermodynamics of CVD. Feasibility of a CVD process. Techniques for equilibrium calculations in CVD systems. Examples of thermodynamic studies of CVD systems. 5. Kinetics of CVD. Steps and control type of a CVD heterogeneous reaction. Influence of experimental parameters on thin film deposition rate. Continuous measurement of the deposition rate. Experimental methods for studying CVD kinetics. Role of homogeneous reactions in CVD. Mechanism of CVD processes. Kinetics and mechanism of dopant incorporation. Transport phenomena in CVD. Status of kinetic and mechanism investigations in CVD systems. 6. Measurement of Thin Film Thickness. Mechanical methods. Mechanical-optical methods. Optical methods. Electrical methods. Miscellaneous methods. 7. Nucleation and Growth of CVD Films. Stages in the nucleation and growth mechanism. Regimes of nucleation and growth. Nucleation theory. Dependence of nucleation on deposition parameters. Heterogeneous nucleation and CVD film structural forms. Homogeneous nucleation. Experimental techniques. Experimental results of CVD film nucleation. 8. Thin Film Structure. Techniques for studying thin film structure. Structural defects in CVD thin films. 9. Analysis of CVD Films. Analysis techniques of thin film bulk. Analysis techniques of thin film surfaces. Film composition measurement. Depth concentration profiling. 10. Properties of CVD Films. Mechanical properties. Thermal properties. Optical properties. Photoelectric properties. Electrical properties. Magnetic properties. Chemical properties. Part III. 11. Equipment and Substrates. Equipment for CVD. Safety in CVD. Substrates. 12. Preparation and Properties of Semiconducting Thin Films. Homoepitaxial semiconducting films. Heteroepitaxial semiconducting films. 13. Preparation and Properties of Amorphous Insulating Thin Films. Oxides. Nitrides and Oxynitrides. Polymeric thin films. 14. Preparation and Properties of Conductive Thin Films. Metals and metal alloys. Resistor materials. Transparent conducting films. Miscellaneous materials. 15. Preparation and Properties of Superconducting and Magnetic Thin Films. Superconducting materials. Magnetic materials. 16. Uses of CVD Thin Films. Applications in electronics and microelectronics. Applications in the field of microwaves and optoelectronics. Miscellaneous applications. Artificial heterostructures (Quantum wells, superlattices, monolayers, two-dimensional electron gases). Part V. 17. Present and Future Importance of CVD Films.

The Deposition Of Inorganic Thin Films On Polymer Substrates By Plasma Enhanced Chemical Vapor Deposition

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Author : Daniel Christian Guerin
language : en
Publisher:
Release Date : 2001

The Deposition Of Inorganic Thin Films On Polymer Substrates By Plasma Enhanced Chemical Vapor Deposition written by Daniel Christian Guerin and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Plasma-enhanced chemical vapor deposition categories.

Plasma Deposition And Treatment Of Polymers Volume 544

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Author : Wei William Lee
language : en
Publisher:
Release Date : 1999-09

Plasma Deposition And Treatment Of Polymers Volume 544 written by Wei William Lee and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999-09 with Technology & Engineering categories.

There is immense interest, both industrial and academic, in developing processes for plasma deposition and modification of polymers. These polymers and treatments have wide-ranging applications in electronics, protective coatings, optical coatings, biomaterials, ophthalmics, corrosion protection, tribology, surface mechanics, membranes, food and pharmaceutical packaging, and sensors. In addition, fundamentals of plasma processes and technology are also of critical importance in many semiconductor processing operations such as etching and treatment of polymers, deposition of low-dielectric constant materials, and dry photoresist. The understanding of plasma polymer deposition in various technical fields, as well as in the treatment methods of polymers, have become critical. This book focuses on the deposition, modification and characterization of polymeric materials which are important for advanced technologies. Particular emphasis is placed on materials and synthesis concepts. Topics include: plasma processes for biomaterials; fundamentals of plasma processing; plasma processing for electronics and optics; and plasma treatments and functional coatings.