Refractory Metals And Silicides For Very Large Scale Integration Applications
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Refractory Metals And Silicides For Very Large Scale Integration Applications
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Author : Krishna C. Saraswat
language : en
Publisher:
Release Date : 1985
Refractory Metals And Silicides For Very Large Scale Integration Applications written by Krishna C. Saraswat and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1985 with categories.
Continuous advancements in technology have resulted in integrated circuits with smaller device dimensions, and larger area and complexity. The overall circuit performance has depended primarily on the device properties. However, the parasitic resistance and capacitance associated with interconnections and contacts, as for an MOS transistor, are now beginning to influence the circuit performance and will be the primary factors in the evolution of submicron VLSI technology. Examples of contact resistance shallow junction series resistance and rc time delay of interconnections, respectively are shown. Results of theoretical modeling indicate that below 1 micron minimum feature size the impact of these parsitics will seriously hurt the circuit and system performance. The RC time delay, the IR voltage drop, the power consumption and the crosstalk noise due to these parastics will become appreciable. Thus even with very fast devices, the overall performance of a large circuit could be seriously affected by the limitations of interconnections and contacts. It is evident that refractory metals and silicides are playing increasingly important roles. It must be also be pointed out that these materials will not replace aluminum but compliment it. The materials which have been used or proposed for forming interconnections can be broadly classified into four categories: heavily doped polysilicon, low temperature metals, high temperature refractory metals and metal silicides. Table compares properties of some of these materials showing their compatibility with present silicon fabrication technology.
Silicides For Vlsi Applications
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Author : Shyam P. Murarka
language : en
Publisher: Academic Press
Release Date : 2012-12-02
Silicides For Vlsi Applications written by Shyam P. Murarka and has been published by Academic Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-02 with Technology & Engineering categories.
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
Very Large Scale Integration
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Author : Kim Ho Yeap
language : en
Publisher: BoD – Books on Demand
Release Date : 2018-02-28
Very Large Scale Integration written by Kim Ho Yeap and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-02-28 with Technology & Engineering categories.
In this book, a variety of topics related to Very-Large-Scale Integration (VLSI) is extensively discussed. The topics encompass the physics of VLSI transistors, the process of integrated chip design and fabrication and the applications of VLSI devices. It is intended to provide information on the latest advancement of VLSI technology to researchers, physicists as well as engineers working in the field of semiconductor manufacturing and VLSI design.
Incorporation Of Metal Silicides And Refractory Metals In Vlsi Technology
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Author : C. M. Osburn
language : en
Publisher:
Release Date : 1991
Incorporation Of Metal Silicides And Refractory Metals In Vlsi Technology written by C. M. Osburn and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1991 with Heat resistant alloys categories.
Workshop On Refractory Metals And Silicides For Vlsi 3
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Author :
language : en
Publisher:
Release Date : 1985
Workshop On Refractory Metals And Silicides For Vlsi 3 written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1985 with categories.
Vlsi Science And Technology 1984
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Author : Kenneth E. Bean
language : en
Publisher:
Release Date : 1984
Vlsi Science And Technology 1984 written by Kenneth E. Bean and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1984 with Integrated circuits categories.
Tungsten And Other Refractory Metals For Vlsi Applications
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Author :
language : en
Publisher:
Release Date : 1984
Tungsten And Other Refractory Metals For Vlsi Applications written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1984 with Heat resistant alloys categories.
Workshop On Refractory Metals And Silicides For Vlsi
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Author :
language : un
Publisher:
Release Date : 1984
Workshop On Refractory Metals And Silicides For Vlsi written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1984 with categories.
Workshop On Refractory Metals And Silicides For Vlsi 4
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Author :
language : en
Publisher:
Release Date : 1986
Workshop On Refractory Metals And Silicides For Vlsi 4 written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1986 with categories.
Refractory Metals And Silicides For Vlsi 3
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Author : University of California, Berkeley. Continuing Education in Engineering, University Extension
language : en
Publisher:
Release Date :
Refractory Metals And Silicides For Vlsi 3 written by University of California, Berkeley. Continuing Education in Engineering, University Extension and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on with categories.