Silicon Nitride

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Silicon Nitride For Microelectronic Applications

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Author : John T. Milek
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-03-14

Silicon Nitride For Microelectronic Applications written by John T. Milek and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-14 with Technology & Engineering categories.

The large amount of literature on the technology of thin film silicon nitride indi cates the interest of the Department of Defense, NASA and the semiconductor industry in the development and full utilization of the material. This survey is concerned only with the thin film characteristics and properties of silicon nitride as currently utilized by the semiconductor or microelectronics industry. It also includes the various methods of preparation. Applications in microelectronic devices and circuits are to be provided in Part 2 of the survey. Some bulk silicon nitride property data is included for basic reference and comparison purposes. The survey specifically excludes references and information not within the public domain. ACKNOWLEDGEMENT This survey was generated under U.S. Air Force Contract F33615-70-C-1348, with Mr. B.R. Emrich (MAAM) Air Force Materials Laboratory, Wright-Patterson Air Force Base, Ohio acting as Project Engineer. The author would like to acknowledge the assis tance of Dr. Judd Q. Bartling, Litton Systems, Inc., Guidance and Control Systems Division, Woodland Hills, California and Dr. Thomas C. Hall, Hughes Aircraft Company, Culver City, California in reviewing the survey. v CONTENTS Preface. i Introduction 1 Literature Review. 1 Bulk Characteristics 1 Technology Overview. 2 References 4 Methods of Preparation • 5 Introduction • 5 Direct Nitridation Method 8 Evaporation Method • 9 Glow Discharge Method. 10 Ion Beam Method. 13 Sputtering Methods 13 Pyrolytic Methods. 15 Silane and Ammonia Reaction 15 Silicon Tetrachloride and Tetrafluoride Reaction. 24 Silane and Hydrazine Reaction 27 Production Operations. 28 Equipment.

Silicon Nitride And Silicon Dioxide Thin Insulating Films

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Author : M. Jamal Deen
language : en
Publisher: The Electrochemical Society
Release Date : 1997

Silicon Nitride And Silicon Dioxide Thin Insulating Films written by M. Jamal Deen and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Science categories.

Silicon Nitride And Silicon Dioxide Thin Insulating Films

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Author :
language : en
Publisher:
Release Date : 1999

Silicon Nitride And Silicon Dioxide Thin Insulating Films written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Silicon dioxide categories.

Silicon Nitride Silicon Dioxide Thin Insulating Films And Other Emerging Diele C Trics Viii

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Author : Ram Ekwal Sah
language : en
Publisher: The Electrochemical Society
Release Date : 2005

Silicon Nitride Silicon Dioxide Thin Insulating Films And Other Emerging Diele C Trics Viii written by Ram Ekwal Sah and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Nature categories.

Silicon Nitride And Silicon Dioxide Thin Insulating Films

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Author : Electrochemical Society. Dielectric Science and Technology Division
language : en
Publisher: The Electrochemical Society
Release Date : 2001

Silicon Nitride And Silicon Dioxide Thin Insulating Films written by Electrochemical Society. Dielectric Science and Technology Division and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Science categories.

Preparation And Properties Of Silicon Nitride Based Materials

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Author : D.A. Bonnel
language : en
Publisher: Trans Tech Publications Ltd
Release Date : 1991-01-01

Preparation And Properties Of Silicon Nitride Based Materials written by D.A. Bonnel and has been published by Trans Tech Publications Ltd this book supported file pdf, txt, epub, kindle and other format this book has been release on 1991-01-01 with Technology & Engineering categories.

i

Proceedings Of The Symposium On Silicon Nitride And Silicon Dioxide Thin Insulating Films

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Author : Vikram J. Kapoor
language : en
Publisher:
Release Date : 1987

Proceedings Of The Symposium On Silicon Nitride And Silicon Dioxide Thin Insulating Films written by Vikram J. Kapoor and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1987 with Electric and insulation categories.

Silicon Nitride And Silicon Dioxide Thin Insulating Films Vii

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Author : Electrochemical Society. Meeting
language : en
Publisher: The Electrochemical Society
Release Date : 2003

Silicon Nitride And Silicon Dioxide Thin Insulating Films Vii written by Electrochemical Society. Meeting and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with Science categories.

Silicon Nitride For Microelectronic Applications

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Author : J. T. Milek
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-03-14

Silicon Nitride For Microelectronic Applications written by J. T. Milek and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-14 with Technology & Engineering categories.

This survey is concerned with the use of silicon nitride in the semi conductor and microelectronics industries. The Handbook of Electronic Materials, volume 3, comprises part 1 of this survey and includes preparation and properties information. This report was prepared by Hughes Aircraft Company, Culver City, California under Contract Number F336lS-70-C-1348. The work was admini stered under the direction of the Air Force Materials Laboratory, Air Force Systems Command, Wright-Patterson Air Force Base, Ohio, with Hr. B. Emrich, Project Engineer. The Electronic Properties Information Center (EPIC) is a designated Information Analysis Center of the Department of Defense, authorized to pro vide information to the entire DoD community. The purpose of the Center is to provide a highly competent source of information and data on the electronic, optical and magnetic properties of materials of value to the Department of Defense. Its major function is to evaluate, compile and publish the experi mental data from the world's unclassified literature concerned with the properties of materials. All materials relevant to the field of electronics are within the scope of EPIC: insulators, semiconductors, metals, super conductors, ferrites, ferroelectrics, ferromagnetics, electroluminescents, thermionic emitters and optical materials. The Center's scope includes information on over 100 basic properties of materials; information generally regarded as being in the area of devices and/or circuitry is excluded. v CONTENTS Foreword. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 Diffusion Mask Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . '" 11 Glass-to-Metal Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 Passivation Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 Isolation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 Memory Devices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 Capacitors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76 Radiation Hardening Applications . . . . . . . . . . . . . . . •. . . . . . . . .

Proceedings Of The Third Symposium On Silicon Nitride And Silicon Dioxide Thin Insulating Films

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Author : Vikram J. Kapoor
language : en
Publisher: The Electrochemical Society
Release Date : 1994

Proceedings Of The Third Symposium On Silicon Nitride And Silicon Dioxide Thin Insulating Films written by Vikram J. Kapoor and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Science categories.