Silicon Nitride For Microelectronic Applications

DOWNLOAD

Download Silicon Nitride For Microelectronic Applications PDF/ePub or read online books in Mobi eBooks. Click Download or Read Online button to get Silicon Nitride For Microelectronic Applications book now. This website allows unlimited access to, at the time of writing, more than 1.5 million titles, including hundreds of thousands of titles in various foreign languages. If the content not found or just blank you must refresh this page

Silicon Nitride For Microelectronic Applications

DOWNLOAD
Author : John T. Milek
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-03-14

Silicon Nitride For Microelectronic Applications written by John T. Milek and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-14 with Technology & Engineering categories.

The large amount of literature on the technology of thin film silicon nitride indi cates the interest of the Department of Defense, NASA and the semiconductor industry in the development and full utilization of the material. This survey is concerned only with the thin film characteristics and properties of silicon nitride as currently utilized by the semiconductor or microelectronics industry. It also includes the various methods of preparation. Applications in microelectronic devices and circuits are to be provided in Part 2 of the survey. Some bulk silicon nitride property data is included for basic reference and comparison purposes. The survey specifically excludes references and information not within the public domain. ACKNOWLEDGEMENT This survey was generated under U.S. Air Force Contract F33615-70-C-1348, with Mr. B.R. Emrich (MAAM) Air Force Materials Laboratory, Wright-Patterson Air Force Base, Ohio acting as Project Engineer. The author would like to acknowledge the assis tance of Dr. Judd Q. Bartling, Litton Systems, Inc., Guidance and Control Systems Division, Woodland Hills, California and Dr. Thomas C. Hall, Hughes Aircraft Company, Culver City, California in reviewing the survey. v CONTENTS Preface. i Introduction 1 Literature Review. 1 Bulk Characteristics 1 Technology Overview. 2 References 4 Methods of Preparation • 5 Introduction • 5 Direct Nitridation Method 8 Evaporation Method • 9 Glow Discharge Method. 10 Ion Beam Method. 13 Sputtering Methods 13 Pyrolytic Methods. 15 Silane and Ammonia Reaction 15 Silicon Tetrachloride and Tetrafluoride Reaction. 24 Silane and Hydrazine Reaction 27 Production Operations. 28 Equipment.

Silicon Nitride For Microelectronic Applications

DOWNLOAD
Author : J. T. Milek
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-03-14

Silicon Nitride For Microelectronic Applications written by J. T. Milek and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-14 with Technology & Engineering categories.

This survey is concerned with the use of silicon nitride in the semi conductor and microelectronics industries. The Handbook of Electronic Materials, volume 3, comprises part 1 of this survey and includes preparation and properties information. This report was prepared by Hughes Aircraft Company, Culver City, California under Contract Number F336lS-70-C-1348. The work was admini stered under the direction of the Air Force Materials Laboratory, Air Force Systems Command, Wright-Patterson Air Force Base, Ohio, with Hr. B. Emrich, Project Engineer. The Electronic Properties Information Center (EPIC) is a designated Information Analysis Center of the Department of Defense, authorized to pro vide information to the entire DoD community. The purpose of the Center is to provide a highly competent source of information and data on the electronic, optical and magnetic properties of materials of value to the Department of Defense. Its major function is to evaluate, compile and publish the experi mental data from the world's unclassified literature concerned with the properties of materials. All materials relevant to the field of electronics are within the scope of EPIC: insulators, semiconductors, metals, super conductors, ferrites, ferroelectrics, ferromagnetics, electroluminescents, thermionic emitters and optical materials. The Center's scope includes information on over 100 basic properties of materials; information generally regarded as being in the area of devices and/or circuitry is excluded. v CONTENTS Foreword. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 Diffusion Mask Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . '" 11 Glass-to-Metal Seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23 Passivation Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 Isolation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39 Memory Devices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 Capacitors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76 Radiation Hardening Applications . . . . . . . . . . . . . . . •. . . . . . . . .

Silicon Nitride For Microelectronic Applications

DOWNLOAD
Author : John T. Milek
language : en
Publisher:
Release Date : 1971

Silicon Nitride For Microelectronic Applications written by John T. Milek and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1971 with categories.

Silicon Nitride For Microelectronic Applications

DOWNLOAD
Author : John Theophil Milek
language : en
Publisher:
Release Date : 1971

Silicon Nitride For Microelectronic Applications written by John Theophil Milek and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1971 with Dielectrics categories.

Silicon Nitride For Microelectronic Applications

DOWNLOAD
Author : John T. Milek
language : en
Publisher:
Release Date : 1971

Silicon Nitride For Microelectronic Applications written by John T. Milek and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1971 with Dielectrics categories.

Silicon Nitride For Microelectronic Applications

DOWNLOAD
Author : John T. Milek
language : en
Publisher:
Release Date : 1971

Silicon Nitride For Microelectronic Applications written by John T. Milek and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1971 with categories.

Si Silicon

DOWNLOAD
Author : Eberhard F. Krimmel
language : en
Publisher:
Release Date :

Si Silicon written by Eberhard F. Krimmel and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on with Chemistry, Physical and theoretical categories.

This is the first of three Gmelin Handbook volumes in the silicon se ries that will cover silicon nitride, a normaUy solid material with the idealized formula Si N . This volume, 3 4 "Silicon" Supplement Volume B Sc, is devoted to applications of silicon nitride in microelec tronics and solar ceUs. The compendium is the product of a critical selection among more than 17600 publications on silicon nitride issued up to January 1990. Out of a total of 5900 publications dealing with the fabrication and use of microelectronic devices (including 2400 Japanese patent applications), about 4000 papers have been selected for this volume. The current volume is grouped into three parts. Chapters 2 to 8 deal with general, non specific microelectronic applications of silicon nitride, Chapters 9 to 31 cover applications of silicon nitride in specific devices and device components, and Chapter 32 is devoted exclusively to applications in solar ceUs, including information on our general understanding of the role of silicon nitride in photovoltaic devices. Experimental results on the preparation of silicon nitride layers for application in unspeci fied devices are in Chapter 2. Whenever the preparation is in connection with specific devices, the information is presented in the respective chapters. The general preparation of silicon nitride layers is not covered in this volume, but will appear in "Silicon" Supplement Volume B 5a. See also the Introductory Remarks, Chapter 1, p. 1.

Silicon Nitride For Microelectronic Applications Pt 1 Preparation And Properties

DOWNLOAD
Author : J.T. Milek
language : en
Publisher:
Release Date : 1971

Silicon Nitride For Microelectronic Applications Pt 1 Preparation And Properties written by J.T. Milek and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1971 with categories.

Handbook Of Electronic Materials Silicon Nitride For Microelectronic Applications Part 2 Applications And Devices

DOWNLOAD
Author :
language : en
Publisher:
Release Date : 1971

Handbook Of Electronic Materials Silicon Nitride For Microelectronic Applications Part 2 Applications And Devices written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1971 with Electronics categories.

Silicon Nitride For Microelectronic Applications

DOWNLOAD
Author : J. T. Milek
language : en
Publisher:
Release Date : 2014-01-15

Silicon Nitride For Microelectronic Applications written by J. T. Milek and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-01-15 with categories.