Technologien F R Mikrosysteme
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Introduction To Microsystem Technology
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Author : Gerald Gerlach
language : en
Publisher: John Wiley & Sons
Release Date : 2008-04-30
Introduction To Microsystem Technology written by Gerald Gerlach and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-04-30 with Technology & Engineering categories.
Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads. This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following: microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro; fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques; sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described); the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe? The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.
Enabling Technology For Mems And Nanodevices
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Author : Henry Baltes
language : en
Publisher: John Wiley & Sons
Release Date : 2013-03-27
Enabling Technology For Mems And Nanodevices written by Henry Baltes and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-27 with Technology & Engineering categories.
Mikro- und Nanotechnik haben Wissenschaft und Forschung revolutioniert. In Zukunft werden sie auch den Alltag verändern. Nun liegt der erste Band einer neuen Buchreihe vor: Advanced Micro and Nano Systems 1. Henry Baltes und seine Co-Autoren knüpfen mit AMN an die Sensors Update-Reihe an. Das Autorenteam wurde um weitere Experten erweitert. AMN wird zwei Mal pro Jahr mit einem neuen Band die aktuellen Entwicklungen in der Mikro- und Nano-Welt begleiten. Die Erforschung und der Einsatz von Mikro- und Nanosystemen sind eines der brandaktuellen Themen im Wissenschaftsbereich. Die Forschungsergebnisse werden mehr und mehr auch konkret umgesetzt. Damit werden Mikro- und Nanotechnologie zu Wirtschaftsfaktoren. Aktuelle Entwicklungen, neue Technologien, Nano-Bauelemente und Systeme im Mikromaßstab - Advanced Micro and Nano Systems, die neue Buchreihe, wird Spiegel der spannenden und faszinierenden Mikro- und Nano-Welt sein. Zweimal pro Jahr wird es einen neuen AMN-Band geben. Die Autoren sind ausgewiesene Spezialisten. Zu den Herausgebern zählt Henry Baltes, Professor an der ETH Zürich. Er zeichnete bereits für die Bände der Sensors Update-Reihe verantwortlich. Die Artikel ermöglichen Neueinsteigern einen ersten Zugriff auf die Materie. Fachleute erhalten einen umfassenden Überblick. Anspruch der Herausgeber ist es, nicht nur die theoretischen Grundlagen von Mikro- und Nanosystemen zu reflektieren, sondern immer auch praktische Möglichkeiten und die Grenzen der Anwendung im Blick zu haben. Die AMN-Bände sind Handbücher und Nachschlagewerke in einem. Die Reihe richtet sich an Vertreter unterschiedlicher Fachrichtungen: Biologie, Chemie, Mathematik, Sensorindustrie und Materialwissenschaften.
Microsystems For Pharmatechnology
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Author : Andreas Dietzel
language : en
Publisher: Springer
Release Date : 2016-01-22
Microsystems For Pharmatechnology written by Andreas Dietzel and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-01-22 with Technology & Engineering categories.
This book provides a comprehensive, state-of-the-art review of microfluidic approaches and applications in pharmatechnology. It is appropriate for students with an interdisciplinary interest in both the pharmaceutical and engineering fields, as well as process developers and scientists in the pharmaceutical industry. The authors cover new and advanced technologies for screening, production by micro reaction technology and micro bioreactors, small-scale processing of drug formulations, and drug delivery that will meet the need for fast and effective screening methods for drugs in different formulations, as well as the production of drugs in very small volumes. Readers will find detailed chapters on the materials and techniques for fabrication of microfluidic devices, microbioreactors, microsystems for emulsification, on-chip fabrication of drug delivery systems, respiratory drug delivery and delivery through microneedles, organs-on-chip, and more.
Novel Advances In Microsystems Technologies And Their Applications
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Author : Laurent A. Francis
language : en
Publisher: CRC Press
Release Date : 2017-07-28
Novel Advances In Microsystems Technologies And Their Applications written by Laurent A. Francis and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-07-28 with Technology & Engineering categories.
Microsystems technologies have found their way into an impressive variety of applications, from mobile phones, computers, and displays to smart grids, electric cars, and space shuttles. This multidisciplinary field of research extends the current capabilities of standard integrated circuits in terms of materials and designs and complements them by creating innovative components and smaller systems that require lower power consumption and display better performance. Novel Advances in Microsystems Technologies and their Applications delves into the state of the art and the applications of microsystems and microelectronics-related technologies. Featuring contributions by academic and industrial researchers from around the world, this book: Examines organic and flexible electronics, from polymer solar cell to flexible interconnects for the co-integration of micro-electromechanical systems (MEMS) with complementary metal oxide semiconductors (CMOS) Discusses imaging and display technologies, including MEMS technology in reflective displays, the fabrication of thin-film transistors on glass substrates, and new techniques to display and quickly transmit high-quality images Explores sensor technologies for sensing electrical currents and temperature, monitoring structural health and critical industrial processes, and more Covers biomedical microsystems, including biosensors, point-of-care devices, neural stimulation and recording, and ultra-low-power biomedical systems Written for researchers, engineers, and graduate students in electrical and biomedical engineering, this book reviews groundbreaking technology, trends, and applications in microelectronics. Its coverage of the latest research serves as a source of inspiration for anyone interested in further developing microsystems technologies and creating new applications.
Introduction To Microfabrication
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Author : Sami Franssila
language : en
Publisher: John Wiley & Sons
Release Date : 2005-01-28
Introduction To Microfabrication written by Sami Franssila and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-01-28 with Technology & Engineering categories.
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.
Silicon Carbide Microsystems For Harsh Environments
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Author : Muthu Wijesundara
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-05-17
Silicon Carbide Microsystems For Harsh Environments written by Muthu Wijesundara and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-05-17 with Technology & Engineering categories.
Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.
Handbook Of Mems For Wireless And Mobile Applications
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Author : Deepak Uttamchandani
language : en
Publisher: Elsevier
Release Date : 2013-08-31
Handbook Of Mems For Wireless And Mobile Applications written by Deepak Uttamchandani and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-08-31 with Technology & Engineering categories.
The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications Discusses wireless techniques and applications of wireless MEMS, including biomedical applications Describes monitoring structures and the environment with wireless MEMS
Microsystems
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Author : Dirk Zielke
language : en
Publisher: Createspace Independent Publishing Platform
Release Date : 2016-02-20
Microsystems written by Dirk Zielke and has been published by Createspace Independent Publishing Platform this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-02-20 with categories.
The field of Microsystems is a rapidly evolving topic. This is due to the increasing quantities of micro-sensors through their integration into smartphones and their manifold use in cars, as well as through the use of these sensors in new areas, such as medical technology. With the present textbook as a tool, the reader will be able to get to know the state of the art in this field, and to successfully use Microsystems in various applications. The following textbook is based on the lecture module "Microsystems," which is held at University of Applied Sciences Bielefeld in the 6th semester of the bachelor course electrical engineering. The lecture module includes a practical course, which deals with the structure and the characterization of an acceleration sensor module. The instructions for this course are attached at the end of the book. This book is translated from the original German "Mikrosysteme" .
3d And Circuit Integration Of Mems
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Author : Masayoshi Esashi
language : en
Publisher: John Wiley & Sons
Release Date : 2021-07-19
3d And Circuit Integration Of Mems written by Masayoshi Esashi and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-07-19 with Technology & Engineering categories.
3D and Circuit Integration of MEMS Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Microsystems For Bioelectronics
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Author : Victor V. Zhirnov
language : en
Publisher: William Andrew
Release Date : 2010-11-23
Microsystems For Bioelectronics written by Victor V. Zhirnov and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-11-23 with Technology & Engineering categories.
Microsystems for Bioelectronics is the ultimate guide in the biomedical application industry. It provides a physics-based assessment of the limitless potential of miniaturization technologies. This book goes far beyond the complete design of the final systems. It also discusses the developments of computation and communication subsystems. The future of this technology lies in understanding the scaling limits for the individual systems. This includes all of its components and the fundamental energy source that powers all autonomous microsystems. Rapid advances in microfabrication technologies are offering new opportunities and capabilities to develop systems for biomedical applications. These applications include the diagnostics community and those that are active in therapy services. Microsystems for Bioelectronics is one of the only books on the market today that goes into the comprehensive treatment of integrated microsystems.