Introduction To Microfabrication
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Introduction To Microfabrication
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Author : Sami Franssila
language : en
Publisher: John Wiley & Sons
Release Date : 2005-01-28
Introduction To Microfabrication written by Sami Franssila and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-01-28 with Technology & Engineering categories.
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.
Introduction To Microfabrication
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Author : Sami Franssila
language : en
Publisher: John Wiley & Sons
Release Date : 2010-10-29
Introduction To Microfabrication written by Sami Franssila and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-10-29 with Technology & Engineering categories.
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e
Introduction To Microelectronic Fabrication
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Author : Richard C. Jaeger
language : en
Publisher: Pearson
Release Date : 2002
Introduction To Microelectronic Fabrication written by Richard C. Jaeger and has been published by Pearson this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002 with Integrated circuit categories.
For courses in Theory and Fabrication of Integrated Circuits. The author's goal in writing this text was to present a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing, and is highlighted by careful explanations, clear, simple language, and numerous fully-solved example problems. This work assumes a minimal knowledge of integrated circuits and of terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors.
Handbook Of Microlithography Micromachining And Microfabrication Micromachining And Microfabrication
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Author : P. Rai-Choudhury
language : en
Publisher: SPIE Press
Release Date : 1997
Handbook Of Microlithography Micromachining And Microfabrication Micromachining And Microfabrication written by P. Rai-Choudhury and has been published by SPIE Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Technology & Engineering categories.
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Fundamental Principles Of Optical Lithography
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Author : Chris Mack
language : en
Publisher: John Wiley & Sons
Release Date : 2008-03-11
Fundamental Principles Of Optical Lithography written by Chris Mack and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-03-11 with Technology & Engineering categories.
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Microfabrication For Industrial Applications
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Author : Regina Luttge
language : en
Publisher: William Andrew
Release Date : 2011-09-14
Microfabrication For Industrial Applications written by Regina Luttge and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-09-14 with Science categories.
Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling
Fundamentals Of Microfabrication And Nanotechnology Three Volume Set
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Author : Marc J. Madou
language : en
Publisher: CRC Press
Release Date : 2018-12-14
Fundamentals Of Microfabrication And Nanotechnology Three Volume Set written by Marc J. Madou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-12-14 with Technology & Engineering categories.
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Microfabrication For Microfluidics
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Author : Sang-Joon John Lee
language : en
Publisher: Artech House
Release Date : 2010
Microfabrication For Microfluidics written by Sang-Joon John Lee and has been published by Artech House this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010 with Electronic books categories.
Providing a definitive source of knowledge about the principles, materials, and process techniques used in the fabrication of microfluidics, this practical volume is a must for your reference shelf. The book focuses on fabrication, but also covers the basic purpose, benefits, and limitations of the fabricated structures as they are applied to microfluidic sensor and actuator functions. You find guidance on rapidly assessing options and tradeoffs for the selection of a fabrication method with clear tabulated process comparisons.
3d Laser Microfabrication
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Author : Hiroaki Misawa
language : en
Publisher: Wiley-VCH
Release Date : 2006-09-14
3d Laser Microfabrication written by Hiroaki Misawa and has been published by Wiley-VCH this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-09-14 with Science categories.
A thorough introduction to 3D laser microfabrication technology, leading readers from the fundamentals and theory to its various potent applications, such as the generation of tiny objects or three-dimensional structures within the bulk of transparent materials. The book also presents new theoretical material on dielectric breakdown, allowing a better understanding of the differences between optical damage on surfaces and inside the bulk, as well as a look into the future. Chemists, physicists, materials scientists and engineers will find this a valuable source of interdisciplinary knowledge in the field of laser optics and nanotechnology.
Micromanufacturing And Nanotechnology
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Author : Nitaigour P. Mahalik
language : en
Publisher: Springer Science & Business Media
Release Date : 2006
Micromanufacturing And Nanotechnology written by Nitaigour P. Mahalik and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with Science categories.
Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.