Use Of Surface Enhanced Raman Spectroscopy Sers In The Study Of Corrosion Inhibition And Passivation Processes On Copper And Copper Base Alloys
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Use Of Surface Enhanced Raman Spectroscopy Sers In The Study Of Corrosion Inhibition And Passivation Processes On Copper And Copper Base Alloys
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Author : B. H. Loo
language : en
Publisher:
Release Date : 1892
Use Of Surface Enhanced Raman Spectroscopy Sers In The Study Of Corrosion Inhibition And Passivation Processes On Copper And Copper Base Alloys written by B. H. Loo and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1892 with categories.
A Surface Enhanced Raman Spectroscopy Sers Study Of Adsorption Of Corrosion Inhibitors
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Author : Ashish Agarwal
language : en
Publisher:
Release Date : 2004
A Surface Enhanced Raman Spectroscopy Sers Study Of Adsorption Of Corrosion Inhibitors written by Ashish Agarwal and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with categories.
Applications Of Raman Spectroscopy In Cu Cmp And In Beol Cleaning Chemistries
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Author : Siddartha Kondoju
language : en
Publisher:
Release Date : 2007
Applications Of Raman Spectroscopy In Cu Cmp And In Beol Cleaning Chemistries written by Siddartha Kondoju and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007 with categories.
In copper chemical mechanical planarization (CMP), in situ detection of barrier to dielectric layer transition is typically done using an optical reflectance technique. The introduction of carbon doped oxides (CDOs) as low-dielectric constant (k) materials for dielectric layers has opened up the possibility of using spectroscopic techniques for detecting such transitions more efficiently. The vibrational frequencies of the bonds between C, H, O, and Si in these low-k materials may be readily detected by spectroscopic techniques such as Raman and infrared (IR) spectroscopies. Since CMP is carried out in aqueous media, IR spectroscopy is not very desirable due to strong absorption of water in the same region as C-H vibrations (2800 cm-1 to 3300 cm-1). In contrast, Raman spectroscopy shows minimal water interference and can be used to efficiently monitor the signal from CDO films even in aqueous environments that prevail under CMP conditions. The research reported in this dissertation concerns the use of Raman spectroscopy in detecting the transition from tantalum (Ta) barrier layer to CDO dielectric layer, in-situ. Intensities of Raman peaks characteristic of Si-Si vibrations from silicon substrates and C-H vibrations from low-k materials were used for monitoring CDO thickness and detecting removal of Ta layer. An abrasion cell was integrated with a Raman spectrometer to demonstrate the feasibility of Raman monitoring in-situ. Additionally, an alternative method was investigated for monitoring transitions in highly fluorescent low-k materials where Raman can not be used. The fluorescence intensity was used to effectively monitor Ta to low-k transitions. As a secondary objective, the Raman technique was used to monitor the composition of polishing slurries, which in the case of copper CMP, have a rich chemistry, which may change during the course of polishing due to consumption and decomposition of certain constituents. Various aspects, such as small layer thickness (50μm), continuous flow of the slurry, and dynamics of the film removal process pose a great challenge to the monitoring of slurry components between the pad and the wafer. The slurry constituents such as oxidants and corrosion inhibitors have unique signatures that can be detected using spectroscopic techniques. In this study Raman spectroscopy was used to detect and quantify chemical species such as hydroxylamine, benzotriazole and hydrogen peroxide in-situ. A more detailed study pertaining to the protonation of hydroxylamine with respect to the pH was also performed. Finally, surface enhanced Raman spectroscopy (SERS) was also investigated to improve the detection of pyridine and benzotriazole at low concentrations (100ppm).
Application Of Surface Enhanced Raman Spectroscopy Sers To In Situ Study Of Passive Films On Iron And Steel In Aqueous Solutions
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Author : Jing Gui
language : en
Publisher:
Release Date : 1991
Application Of Surface Enhanced Raman Spectroscopy Sers To In Situ Study Of Passive Films On Iron And Steel In Aqueous Solutions written by Jing Gui and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1991 with categories.
Electrochemical And Optical Techniques For The Study And Monitoring Of Metallic Corrosion
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Author : M.G.S Ferreira
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Electrochemical And Optical Techniques For The Study And Monitoring Of Metallic Corrosion written by M.G.S Ferreira and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Technology & Engineering categories.
In spite of considerable efforts over the years to understand and combat materials degradation via corrosion processes, many challenges still remain both in the theoretical understanding of the phenomena and in seeking pratical solutions to the perennial problem. Progress has been slow due to the complexity of the processes and the systems involved. Fortunately, in recent years there has been a renaissance in the development of new electrochemical and optical techniques, as well as advances in instrumentation, which have greatly aided our quest to gain insight into the complex mechanisms involved in metallic corrosion and passivation. Numerous scientific meetings, symposia, and workshops have been held allover the world which attest to the frenzy of activities in corrosion science and technology. However, most of these conferences have dealt mainly with recent research results. There appeared to be a need to assess and disseminate our present state of knowledge in the field as regards measurement techniques, theory, and instrumentation. The present NATO Advanced Study Institute was therefore held in Viana do Castelo, Portugal from July 9 to 21, 1989. The Institute consisted of a series of tutorial lectures, poster sessions, and round-table discussions interspersed evenly over the two-week period. It was attended by 75 participants from several countries representing industry, government and university laboratories.
Metals Abstracts
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Author :
language : en
Publisher:
Release Date : 1998
Metals Abstracts written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Metallurgy categories.
Use Of Surface Enhanced Raman Spectroscopy In The Study Of The Adsorption Behaviors Of Corrosion Inhibitors On Metal Surfaces
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Author : Albert Thomas Fakhri El-Hage
language : en
Publisher:
Release Date : 1985
Use Of Surface Enhanced Raman Spectroscopy In The Study Of The Adsorption Behaviors Of Corrosion Inhibitors On Metal Surfaces written by Albert Thomas Fakhri El-Hage and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1985 with Raman spectroscopy categories.
The Application Of Surface Enhanced Raman Spectroscopy To The In Situ Study Of Passivity And Inhibition
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Author : Lucy Jane Oblonsky
language : en
Publisher:
Release Date : 1993
The Application Of Surface Enhanced Raman Spectroscopy To The In Situ Study Of Passivity And Inhibition written by Lucy Jane Oblonsky and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1993 with categories.
Directory Of Graduate Research
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Author : American Chemical Society. Committee on Professional Training
language : en
Publisher:
Release Date : 1983
Directory Of Graduate Research written by American Chemical Society. Committee on Professional Training and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1983 with Chemical engineering categories.
Metals Abstracts Index
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Author :
language : en
Publisher:
Release Date : 1995
Metals Abstracts Index written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Metallurgy categories.