Vacuum Deposition Of Thin Films
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Vacuum Deposition Of Thin Films
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Author : L. Holland
language : en
Publisher:
Release Date : 1966
Vacuum Deposition Of Thin Films written by L. Holland and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1966 with Vapor-plating categories.
Vacuum Deposition Of Thin Films
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Author : L. Holland
language : en
Publisher:
Release Date : 1969
Vacuum Deposition Of Thin Films written by L. Holland and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1969 with Vapor-plating categories.
Vacuum Deposition Of Thin Films
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Author : L. Holland
language : en
Publisher:
Release Date : 1980-04-01
Vacuum Deposition Of Thin Films written by L. Holland and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1980-04-01 with categories.
Vacuum Deposition Of Thin Films
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Author : Leslie Holland
language : en
Publisher:
Release Date : 1970
Vacuum Deposition Of Thin Films written by Leslie Holland and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1970 with categories.
Vacuum Deposition Of Thin Films
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Author : Leslie Holland
language : en
Publisher:
Release Date : 1958
Vacuum Deposition Of Thin Films written by Leslie Holland and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1958 with Vapor-plating categories.
Vacuum Deposition Of Thin Films Etc
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Author : Leslie Arthur HOLLAND
language : en
Publisher:
Release Date : 1956
Vacuum Deposition Of Thin Films Etc written by Leslie Arthur HOLLAND and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1956 with categories.
Thin Films By Chemical Vapour Deposition
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Author : C.E. Morosanu
language : en
Publisher: Elsevier
Release Date : 2016-06-22
Thin Films By Chemical Vapour Deposition written by C.E. Morosanu and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-06-22 with Technology & Engineering categories.
The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several unique advantages, developed into the most widely used technique for thin film preparation in electronics technology. In the last 25 years, tremendous advances have been made in the science and technology of thin films prepared by means of CVD. This book presents in a single volume, an up-to-date overview of the important field of CVD processes which has never been completely reviewed previously. Contents: Part I. 1. Evolution of CVD Films. Introductory remarks. Short history of CVD thin films. II. Fundamentals. 2. Techniques of Preparing Thin Films. Electrolytic deposition techniques. Vacuum deposition techniques. Plasma deposition techniques. Liquid-phase deposition techniques. Solid-phase deposition techniques. Chemical vapour conversion of substrate. Chemical vapour deposition. Comparison between CVD and other thin film deposition techniques. 3. Chemical Processes Used in CVD. Introduction. Description of chemical reactions used in CVD. 4. Thermodynamics of CVD. Feasibility of a CVD process. Techniques for equilibrium calculations in CVD systems. Examples of thermodynamic studies of CVD systems. 5. Kinetics of CVD. Steps and control type of a CVD heterogeneous reaction. Influence of experimental parameters on thin film deposition rate. Continuous measurement of the deposition rate. Experimental methods for studying CVD kinetics. Role of homogeneous reactions in CVD. Mechanism of CVD processes. Kinetics and mechanism of dopant incorporation. Transport phenomena in CVD. Status of kinetic and mechanism investigations in CVD systems. 6. Measurement of Thin Film Thickness. Mechanical methods. Mechanical-optical methods. Optical methods. Electrical methods. Miscellaneous methods. 7. Nucleation and Growth of CVD Films. Stages in the nucleation and growth mechanism. Regimes of nucleation and growth. Nucleation theory. Dependence of nucleation on deposition parameters. Heterogeneous nucleation and CVD film structural forms. Homogeneous nucleation. Experimental techniques. Experimental results of CVD film nucleation. 8. Thin Film Structure. Techniques for studying thin film structure. Structural defects in CVD thin films. 9. Analysis of CVD Films. Analysis techniques of thin film bulk. Analysis techniques of thin film surfaces. Film composition measurement. Depth concentration profiling. 10. Properties of CVD Films. Mechanical properties. Thermal properties. Optical properties. Photoelectric properties. Electrical properties. Magnetic properties. Chemical properties. Part III. 11. Equipment and Substrates. Equipment for CVD. Safety in CVD. Substrates. 12. Preparation and Properties of Semiconducting Thin Films. Homoepitaxial semiconducting films. Heteroepitaxial semiconducting films. 13. Preparation and Properties of Amorphous Insulating Thin Films. Oxides. Nitrides and Oxynitrides. Polymeric thin films. 14. Preparation and Properties of Conductive Thin Films. Metals and metal alloys. Resistor materials. Transparent conducting films. Miscellaneous materials. 15. Preparation and Properties of Superconducting and Magnetic Thin Films. Superconducting materials. Magnetic materials. 16. Uses of CVD Thin Films. Applications in electronics and microelectronics. Applications in the field of microwaves and optoelectronics. Miscellaneous applications. Artificial heterostructures (Quantum wells, superlattices, monolayers, two-dimensional electron gases). Part V. 17. Present and Future Importance of CVD Films.
Vacuum Deposition Of Thin Films
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Author : Boris Stepanovich Danilin
language : en
Publisher:
Release Date : 1969
Vacuum Deposition Of Thin Films written by Boris Stepanovich Danilin and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1969 with Thin films categories.
The book deals with methods of obtaining and processing thin films, methods of measuring the deposition rate and thickness of thin-film layers, and the main fields of application of thin films. Vacuum requirements and the requirements for the composition of the residual medium in thermal evaporation and cathode sputtering are given, and modern methods of producing and measuring vacuums and the equipment used in obtaining thin films are described. (Author).
Preparation Of Thin Films
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Author : Joy George
language : en
Publisher: CRC Press
Release Date : 1992-02-26
Preparation Of Thin Films written by Joy George and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1992-02-26 with Technology & Engineering categories.
"Preparation of Thin Films provides a comprehensive account of various deposition techniques for the preparation of thin films of elements, compounds, alloys, ceramics, and semiconductors - emphasizing inorganic compound thin films and discussing high vacuum and chemical deposition methods used for preparing high temperature superconducting oxide thin films. "
Vacuum Deposition Onto Webs Films And Foils
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Author : Charles Bishop
language : en
Publisher: William Andrew
Release Date : 2015-08-15
Vacuum Deposition Onto Webs Films And Foils written by Charles Bishop and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-08-15 with Technology & Engineering categories.
Vacuum Deposition onto Webs: Films and Foils, Third Edition, provides the latest information on vacuum deposition, the technology that applies an even coating to a flexible material that can be held on a roll, thereby offering a much faster and cheaper method of bulk coating than deposition onto single pieces or non-flexible surfaces such as glass. This technology has been used in industrial-scale applications for some time, including a wide range of metalized packaging. Its potential as a high-speed, scalable process has seen an increasing range of new products emerging that employ this cost-effective technology, including solar energy products that are moving from rigid panels onto cheaper and more versatile flexible substrates, flexible electronic circuit ‘boards’, and flexible displays. In this third edition, all chapters are thoroughly revised with a significant amount of new information added, including newly developed barrier measurement techniques, improved in-vacuum monitoring technologies, and the latest developments in Atomic Layer Deposition (ALD). Provides the know-how to maximize productivity of vacuum coating systems Thoroughly revised with a significant amount of new information added, including newly developed barrier measurement techniques, improved in-vacuum monitoring technologies, and the latest on Atomic Layer Deposition (ALD) Presents the latest information on vacuum deposition, the technology that applies an even coating to a flexible material that can be held on a roll, thereby offering a much faster and cheaper method of bulk coating Enables engineers to specify systems more effectively and enhances dialogue between non-specialists and suppliers/engineers Empowers those in rapidly expanding fields such as solar energy, display panels, and flexible electronics to unlock the potential of vacuum coating to transform their processes and products