A User S Guide To Ellipsometry
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A User S Guide To Ellipsometry
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Author : Harland G. Tompkins
language : en
Publisher: Courier Corporation
Release Date : 2013-03-21
A User S Guide To Ellipsometry written by Harland G. Tompkins and has been published by Courier Corporation this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-21 with Technology & Engineering categories.
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
Spectroscopic Ellipsometry And Reflectometry
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Author : Harland G. Tompkins
language : en
Publisher: Wiley-Interscience
Release Date : 1999-03-18
Spectroscopic Ellipsometry And Reflectometry written by Harland G. Tompkins and has been published by Wiley-Interscience this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999-03-18 with Science categories.
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
Spectroscopic Ellipsometry
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Author : Hiroyuki Fujiwara
language : en
Publisher: John Wiley & Sons
Release Date : 2007-09-27
Spectroscopic Ellipsometry written by Hiroyuki Fujiwara and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-09-27 with Technology & Engineering categories.
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Spectroscopic Ellipsometry
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Author : Harland G. Tompkins
language : en
Publisher: Momentum Press
Release Date : 2015-12-16
Spectroscopic Ellipsometry written by Harland G. Tompkins and has been published by Momentum Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-12-16 with Technology & Engineering categories.
Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.
Handbook Of Ellipsometry
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Author : Harland Tompkins
language : en
Publisher: William Andrew
Release Date : 2005-01-06
Handbook Of Ellipsometry written by Harland Tompkins and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-01-06 with Science categories.
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Nondestructive Materials Characterization
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Author : Norbert G. H. Meyendorf
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-11-21
Nondestructive Materials Characterization written by Norbert G. H. Meyendorf and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-11-21 with Science categories.
With an emphasis on aircraft materials, this book describes techniques for the material characterization to detect and quantify degradation processes such as corrosion and fatigue. It introduces readers to these techniques based on x-ray, ultrasonic, optical and thermal principles and demonstrates the potential of the techniques for a wide variety of applications concerning aircraft materials, especially aluminum and titanium alloys. The advantages and disadvantages of various techniques are evaluated.
Handbook Of Modern Coating Technologies
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Author : Mahmood Aliofkhazraei
language : en
Publisher: Elsevier
Release Date : 2021-03-06
Handbook Of Modern Coating Technologies written by Mahmood Aliofkhazraei and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-03-06 with Science categories.
Handbook of Modern Coating Technologies: Advanced Characterization Methods reviews advanced characterization methods of modern coating technologies. The topics in this volume consist of scanning vibrating electrode technique, spectroscopic ellipsometry, advances in X-ray diffraction, neutron reflectivity, micro- and nanoprobes, fluorescence technique, stress measurement methods in thin films, micropotentiometry, and localized corrosion studies.
Ellipsometry Of Functional Organic Surfaces And Films
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Author : Karsten Hinrichs
language : en
Publisher: Springer
Release Date : 2018-05-06
Ellipsometry Of Functional Organic Surfaces And Films written by Karsten Hinrichs and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-05-06 with Science categories.
This new edition provides a state-of-the-art survey of ellipsometric methods used to study organic films and surfaces, from laboratory to synchrotron applications, with a special focus on in-situ use in processing environments and at solid-liquid interfaces. Thanks to the development of functional organic, meta- and hybrid materials for new optical, electronic, sensing and biotechnological devices, the ellipsometric analysis of optical and material properties has made tremendous strides over the past few years. The second edition has been updated to reflect the latest advances in ellipsometric methods. The new content focuses on the study of anisotropic materials, conjugated polymers, polarons, self-assembled monolayers, industrial membranes, adsorption of proteins, enzymes and RGD-peptides, as well as the correlation of ellipsometric spectra to structure and molecular interactions.
Ion Implantation
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Author : Mark Goorsky
language : en
Publisher: BoD – Books on Demand
Release Date : 2012-05-30
Ion Implantation written by Mark Goorsky and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-05-30 with Science categories.
Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book.
Handbook Of Deposition Technologies For Films And Coatings
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Author : Rointan Framroze Bunshah
language : en
Publisher: William Andrew
Release Date : 1994
Handbook Of Deposition Technologies For Films And Coatings written by Rointan Framroze Bunshah and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Science categories.
This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.