Actinic Imaging Of Native And Programmed Defects On A Full Field Mask
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Actinic Imaging Of Native And Programmed Defects On A Full Field Mask
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Author :
language : en
Publisher:
Release Date : 2010
Actinic Imaging Of Native And Programmed Defects On A Full Field Mask written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010 with categories.
We describe the imaging and characterization of native defects on a full field extreme ultraviolet (EUV) mask, using several reticle and wafer inspection modes. Mask defect images recorded with the SEMA TECH Berkeley Actinic Inspection Tool (AIT), an EUV-wavelength (13.4 nm) actinic microscope, are compared with mask and printed-wafer images collected with scanning electron microscopy (SEM) and deep ultraviolet (DUV) inspection tools. We observed that defects that appear to be opaque in the SEM can be highly transparent to EUV light, and inversely, defects that are mostly transparent to the SEM can be highly opaque to EUV. The nature and composition of these defects, whether they appear on the top surface, within the multilayer coating, or on the substrate as buried bumps or pits, influences both their significance when printed, and their detectability with the available techniques. Actinic inspection quantitatively predicts the characteristics of printed defect images in ways that may not be possible with non-EUV techniques. As a quantitative example, we investigate the main structural characteristics of a buried pit defect based on EUV through-focus imaging.
Emlc 2005
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Author : Uwe Behringer
language : en
Publisher: Margret Schneider
Release Date : 2005
Emlc 2005 written by Uwe Behringer and has been published by Margret Schneider this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with categories.
Photomask And Next Generation Lithography Mask Technology Xi
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Author :
language : en
Publisher:
Release Date : 2004
Photomask And Next Generation Lithography Mask Technology Xi written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Integrated circuits categories.
Short Wavelength Laboratory Sources
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Author : Davide Bleiner
language : en
Publisher: Royal Society of Chemistry
Release Date : 2014-12-04
Short Wavelength Laboratory Sources written by Davide Bleiner and has been published by Royal Society of Chemistry this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-12-04 with Science categories.
Our ability to manipulate short wavelength radiation (0.01-100nm, equivalent to 120keV-12eV) has increased significantly over the last three decades. This has lead to major advances in applications in a wide range of disciplines such as: the life and medical sciences, including cancer-related studies; environmental science, including studies of pollution and its effects; archaeology and other cultural heritage disciplines; and materials science. Although expansion in application areas is due largely to modern synchrotron sources, many applications will not become widespread, and therefore routinely available as analytical tools, if they are confined to synchrotrons. There is a need to develop bright but small and low cost X-ray sources, not to replace synchrotrons but to complement them and this book will look at how to facilitate these developments. Written by a distinguished team of international authors, this book is based on the COST Action MP0601: Short Wavelength Laboratory Sources. The contents are divided into five main sections. the introductory section provides a comprehensive introduction to the fundamentals of radiation, generation mechanisms and short wavelength laboratory sources. The middle sections focus on modelling and simulation, source development: improvement and characterisation and integrated systems: sources, optics and detectors. The final section looks at recent applications. Aimed at academic and industrial researchers in physical chemistry and chemical physics, the contents provides practical information about the implementation of short wavelength laboratory sources and their applications.