Advanced Mems Nems Fabrication And Sensors
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Advanced Mems Nems Fabrication And Sensors
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Author : Zhuoqing Yang
language : en
Publisher: Springer Nature
Release Date : 2021-10-12
Advanced Mems Nems Fabrication And Sensors written by Zhuoqing Yang and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-10-12 with Technology & Engineering categories.
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
Piezoelectric Sensors
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Author : Peter Lieberzeit
language : en
Publisher: Springer Nature
Release Date : 2024-04-13
Piezoelectric Sensors written by Peter Lieberzeit and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2024-04-13 with Technology & Engineering categories.
This book provides a comprehensive overview of piezoelectric sensor devices and instrumentation and their use for chemical and biochemical analysis. Sensors relying on established transducers, such as the quartz crystal microbalance (QCM) and the surface acoustic wave resonator (SAW) are covered, and novel devices like surface transverse wave (STW) resonators, film bulk acoustic resonators (FBAR) as well as non-piezoelectric devices with mass-sensitive properties are presented. As their name implies, such devices respond directly to mass changes on their surfaces and thus address the most fundamental quality of any analytes. First, the book presents the fundamentals of new measuring strategies with these devices. Then, it introduces a variety of chemo- and biosensing application scenarios of these devices. In addition, the book covers both the state-of-the-art of academic research and prospects concerning the commercialization of these sensors. Given its scope, the book is of interest to academics, specialists in industry, and advanced students in the areas of analytical chemistry, rapid analysis, and sensor technology, giving them the unique possibility to familiarize themselves with this chemical sensing strategy. Readers will benefit from the coverage of both cutting-edge research results and applications that help bridge the gap between academia and industry.
Proceedings Of The 9th International Conference On Mechanical Manufacturing Technology And Material Engineering
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Author : Jiang Guo
language : en
Publisher: Springer Nature
Release Date : 2025-05-21
Proceedings Of The 9th International Conference On Mechanical Manufacturing Technology And Material Engineering written by Jiang Guo and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2025-05-21 with Technology & Engineering categories.
This book offers a comprehensive examination of the latest advancements in mechanical manufacturing technology and material engineering, as presented at the 9th International Conference on Mechanical Manufacturing Technology and Material Engineering (MMTME 2024). It delves into the forefront of research in areas like additive manufacturing, smart manufacturing systems, and innovative material solutions, addressing the current gaps and technological challenges within the industry. The book is structured to highlight significant innovations that are poised to redefine manufacturing processes, enhance material performance, and drive sustainability in production. Each chapter provides in-depth analysis of emerging technologies and their practical applications, backed by recent case studies and expert insights. Key topics such as the integration of AI and IoT in manufacturing, advancements in 3D and 4D printing technologies, and the development of new sustainable materials are explored. These are critical for pushing the boundaries of what is possible in manufacturing and materials science today. This book is significant as it not only encapsulates state-of-the-art research but also provides a vision for future directions in the field. It sets out to solve problems related to efficiency, cost-effectiveness, and environmental impact in manufacturing, offering new perspectives and solutions to researchers and professionals. The target audience includes academic researchers, industry professionals, and engineers in the fields of mechanical manufacturing and material engineering.
Advanced Materials And Technologies For Micro Nano Devices Sensors And Actuators
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Author : Evgeni Gusev
language : en
Publisher: Springer
Release Date : 2010-03-03
Advanced Materials And Technologies For Micro Nano Devices Sensors And Actuators written by Evgeni Gusev and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-03-03 with Technology & Engineering categories.
A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
Advanced Micro And Nano Manufacturing Technologies
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Author : Shrikrishna Nandkishor Joshi
language : en
Publisher: Springer Nature
Release Date : 2021-10-01
Advanced Micro And Nano Manufacturing Technologies written by Shrikrishna Nandkishor Joshi and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-10-01 with Technology & Engineering categories.
This volume focuses on the fundamentals and advancements in micro and nanomanufacturing technologies applied in the biomedical and biochemical domain. The contents of this volume provide comprehensive coverage of the physical principles of advanced manufacturing technologies and the know-how of their applications in the fabrication of biomedical devices and systems. The book begins by documenting the journey of miniaturization and micro-and nano-fabrication. It then delves into the fundamentals of various advanced technologies such as micro-wire moulding, 3D printing, lithography, imprinting, direct laser machining, and laser-induced plasma-assisted machining. It also covers laser-based technologies which are a promising option due to their flexibility, ease in control and application, high precision, and availability. These technologies can be employed to process several materials such as glass, polymers: polycarbonate, polydimethylsiloxane, polymethylmethacrylate, and metals such as stainless steel, which are commonly used in the fabrication of biomedical devices, such as microfluidic technology, optical and fiber-optic sensors, and electro-chemical bio-sensors. It also discusses advancements in various MEMS/NEMS based technologies and their applications in energy conversion and storage devices. The chapters are written by experts from the fields of micro- and nano-manufacturing, materials engineering, nano-biotechnology, and end-users such as clinicians, engineers, academicians of interdisciplinary background. This book will be a useful guide for academia and industry alike.
Mems And Microfluidics In Healthcare
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Author : Koushik Guha
language : en
Publisher: Springer Nature
Release Date : 2023-03-13
Mems And Microfluidics In Healthcare written by Koushik Guha and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2023-03-13 with Technology & Engineering categories.
The book introduces the research significance of biomedical instrumentation and discusses micro-fabrication techniques utilized for biomedical devices. This book primarily focuses on the reader enlightenment on MEMS medical devices by introducing all the diagnostic devices and treatment tools at one place. The book covers in-depth technical works and general introductions to the devices such that the book can reach technical as well as non-technical readers.
3d And Circuit Integration Of Mems
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Author : Masayoshi Esashi
language : en
Publisher: John Wiley & Sons
Release Date : 2021-03-16
3d And Circuit Integration Of Mems written by Masayoshi Esashi and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-03-16 with Technology & Engineering categories.
3D and Circuit Integration of MEMS Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Outlook And Challenges Of Nano Devices Sensors And Mems
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Author : Ting Li
language : en
Publisher: Springer
Release Date : 2017-02-22
Outlook And Challenges Of Nano Devices Sensors And Mems written by Ting Li and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-02-22 with Technology & Engineering categories.
This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.
Mems Nems
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Author : Cornelius T. Leondes
language : en
Publisher: Springer
Release Date : 2006-05-17
Mems Nems written by Cornelius T. Leondes and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-05-17 with Technology & Engineering categories.
As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating enormous opportunities for commerce and functionality. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. The MEMS/NEMS HANDBOOK (Microelectromechanical Systems/Nanoelectromechanical Systems) covers all of the major topics within the subject including design methods, fabrication techniques, manufacturing methods, sensors and actuators, and Micro Optical Electro Mechanical Systems. The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists. The remarkable breadth and depth of the topics spanning this diverse field require the 5-volume extent of this notable reference resource that is based on the work of an internationally recognized board of coauthors.
Mems For Biomedical Applications
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Author : Shekhar Bhansali
language : en
Publisher: Woodhead Publishing
Release Date : 2012-07-18
Mems For Biomedical Applications written by Shekhar Bhansali and has been published by Woodhead Publishing this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-07-18 with Technology & Engineering categories.
The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology. The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS. With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology.