An Introduction To Microelectromechanical Systems Engineering
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An Introduction To Microelectromechanical Systems Engineering
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Author : Nadim Maluf
language : en
Publisher: Artech House
Release Date : 2004
An Introduction To Microelectromechanical Systems Engineering written by Nadim Maluf and has been published by Artech House this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Technology & Engineering categories.
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
Introduction To Microelectromechanical Microwave Systems
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Author : Héctor J. de los Santos
language : en
Publisher: Artech House
Release Date : 2004
Introduction To Microelectromechanical Microwave Systems written by Héctor J. de los Santos and has been published by Artech House this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Science categories.
Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment
Microelectromechanical Systems
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Author : National Research Council
language : en
Publisher: National Academies Press
Release Date : 1998-01-01
Microelectromechanical Systems written by National Research Council and has been published by National Academies Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998-01-01 with Technology & Engineering categories.
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
Mechanics Of Microelectromechanical Systems
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Author : Nicolae Lobontiu
language : en
Publisher: Springer Science & Business Media
Release Date : 2006-01-16
Mechanics Of Microelectromechanical Systems written by Nicolae Lobontiu and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-01-16 with Technology & Engineering categories.
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.
Mems And Microsystems
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Author : Tai-Ran Hsu
language : en
Publisher: John Wiley & Sons
Release Date : 2020-07-16
Mems And Microsystems written by Tai-Ran Hsu and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-07-16 with Technology & Engineering categories.
Technology/Engineering/Mechanical A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances. Other highlights of the Second Edition include: * Expanded coverage of microfabrication plus assembly and packaging technologies * The introduction of microgyroscopes, miniature microphones, and heat pipes * Design methodologies for thermally actuated multilayered device components * The use of popular SU-8 polymer material Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.
Microelectromechanical Systems
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Author : Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems
language : en
Publisher: National Academies Press
Release Date : 1997-12-15
Microelectromechanical Systems written by Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems and has been published by National Academies Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997-12-15 with Technology & Engineering categories.
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rival--perhaps surpass--the societal impact of integrated circuits.
Principles Of Microelectromechanical Systems
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Author : Ki Bang Lee
language : en
Publisher: John Wiley & Sons
Release Date : 2011-03-21
Principles Of Microelectromechanical Systems written by Ki Bang Lee and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-03-21 with Technology & Engineering categories.
The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications. Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes: Statics/force and moment acting on mechanical structures in static equilibrium Static behaviors of structures consisting of mechanical elements Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations Fluid flow in MEMS and the evaluation of damping force acting on the moving structures Basic equations of electromagnetics that govern the electrical behavior of MEMS Combining the MEMS building blocks to form actuators and sensors for a specific purpose All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms. This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry. It is ideal for radio frequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis.
Fundamentals Of Microelectromechanical Systems Mems
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Author : Eun Sok Kim
language : en
Publisher: McGraw Hill Professional
Release Date : 2021-05-14
Fundamentals Of Microelectromechanical Systems Mems written by Eun Sok Kim and has been published by McGraw Hill Professional this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-05-14 with Technology & Engineering categories.
A complete guide to MEMS engineering, fabrication, and applications This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development. Coverage includes: Basic microfabrication Micromachining Transduction principles RF and optical MEMS Mechanics and inertial sensors Thin film properties and SAW/BAW sensors Pressure sensors and microphones Piezoelectric films Material properties expressed as tensor Microfluidic systems and BioMEMS Power MEMS Electronic noises, interface circuits, and oscillators
Analysis And Design Principles Of Mems Devices
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Author : Minhang Bao
language : en
Publisher: Elsevier
Release Date : 2005-04-12
Analysis And Design Principles Of Mems Devices written by Minhang Bao and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-04-12 with Technology & Engineering categories.
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.
Micro Electro Mechanical System Design
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Author : James J. Allen
language : en
Publisher: CRC Press
Release Date : 2005-07-08
Micro Electro Mechanical System Design written by James J. Allen and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-07-08 with Technology & Engineering categories.
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,