Correlation Between Microstructure And Surface Structure Evolution In Polycrystalline Films
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Correlation Between Microstructure And Surface Structure Evolution In Polycrystalline Films
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Author : Adriana Eleni Lita
language : en
Publisher:
Release Date : 2000
Correlation Between Microstructure And Surface Structure Evolution In Polycrystalline Films written by Adriana Eleni Lita and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with categories.
Mechanisms Of Surface And Microstructure Evolution In Deposited Films And Film Structures
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Author : John Sanchez, Jr
language : en
Publisher: Cambridge University Press
Release Date : 2014-06-05
Mechanisms Of Surface And Microstructure Evolution In Deposited Films And Film Structures written by John Sanchez, Jr and has been published by Cambridge University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-06-05 with Technology & Engineering categories.
A wide variety of materials systems and deposition strategies have been developed to produce epitaxial and polycrystalline thin films. In particular, controlling the morphology and microstructure of metal films at the nanometer and/or micron scale has become crucial for applications such as giant magnetoresistive devices, contacts and diffusion barriers in integrated circuits and photovoltaics, and multilayer X-ray mirrors. This book, first published in 2001, focuses on the interactions between different mechanisms of microstructure evolution and film-growth conditions. Two sections of the volume, including a joint effort with Symposium R, Morphology and Dynamics of Crystal Surfaces in Molecular and Colloid Systems, highlight the fundamental mechanisms of epitaxial growth. Additional topics include: multilayers - stress in thin films; early stages of film growth - mechanical properties; texture in polycrystalline films; grain growth - barrier layers; and silicides and organic thin films - pulsed laser deposition.
Mechanisms For Intrinsic Stress Evolution During And After Polycrystalline Film Growth
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Author : Hang Yu (Ph. D.)
language : en
Publisher:
Release Date : 2013
Mechanisms For Intrinsic Stress Evolution During And After Polycrystalline Film Growth written by Hang Yu (Ph. D.) and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013 with categories.
Growth of polycrystalline films involves poorly understood kinetic processes that occur far from equilibrium and lead to complex co-evolution of the surface, microstructure and intrinsic stress of the films. Here we present a comprehensive study consisting of in situ stress measurements, microstructure characterization, and analytical modeling for various polycrystalline systems. We find that in systems of high atomic mobility, the stress change after polycrystalline film growth can be attributed to a fast reversible surface process and a slow irreversible bulk process. The fast process is weakly dependent on temperature and is associated with changes in the shape of grain surfaces. The slow process is strongly dependent on temperature and is mostly associated with grain growth in the bulk of the film. We also discovered a turnaround phenomenon in which, under conditions of intermediate atomic mobility, the stress evolves from a tensile toward a compressive state, and then turns around to evolve toward a tensile state. This stress turnaround phenomenon is strongly dependent on the substrate temperature and deposition rate, and can be attributed to an increase of the grain size during film deposition. Grain growth during deposition not only leads to a tensile component of the intrinsic stress, but also changes the grain size dependence of the compressive component. The compressive component results from incorporation of excess adatoms in grain boundaries, and the magnitude of the compressive stress is controlled by a competition between adatom incorporation in 2D islands and incorporation at grain boundaries. We also investigated the effect of the angle of incidence of the flux of depositing atoms on stress and structure evolution during polycrystalline film growth. We find that as the angle of incidence increases, the coalescence thickness increases and the stress becomes less compressive or more tensile. We attribute these phenomena to the enhanced surface roughness, the shadowing effect, the steering effect and the presence of Ehrlich-Schwoebel barriers during oblique angle deposition. All these effects lead to suppression of the adatom-grain boundary incorporation process. Based on this thesis work, intrinsic stresses in polycrystalline films can be categorized into three types: Type I, the intermediate type and Type II. These behaviors are observed in systems of low, intermediate and high atomic mobility, respectively. Compressive stresses develop in Type II behavior and tensile stresses develop in Type I behavior. The transition of the stress behavior from Type I, to the intermediate type and to Type II is continuous and can be achieved by adjusting deposition conditions. Whether the post-coalescence stress is tensile, or compressive, or evolving from compressive to tensile depends on the homologous temperature, the deposition rate and the angle of the incidence of the flux of depositing atoms.
Mechanisms Of Surface And Microstructure Evolution In Deposited Films And Film Structures Volume 672
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Author : Jacques G. Amar
language : en
Publisher:
Release Date : 2001-11-12
Mechanisms Of Surface And Microstructure Evolution In Deposited Films And Film Structures Volume 672 written by Jacques G. Amar and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001-11-12 with Science categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2001, focuses on the interactions between different mechanisms of microstructure evolution and film-growth conditions.
Dissertation Abstracts International
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Author :
language : en
Publisher:
Release Date : 2006
Dissertation Abstracts International written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with Dissertations, Academic categories.
Substrate Surface Structure Effects On Microstructure Of Epitaxial Films
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Author :
language : en
Publisher:
Release Date : 1992
Substrate Surface Structure Effects On Microstructure Of Epitaxial Films written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1992 with categories.
Evolution Of Thin Film And Surface Microstructure Volume 202
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Author : C. V. Thompson
language : en
Publisher:
Release Date : 1991-05-31
Evolution Of Thin Film And Surface Microstructure Volume 202 written by C. V. Thompson and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1991-05-31 with Technology & Engineering categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Evolution Of Thin Film And Surface Structure And Morphology Volume 355
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Author : B. G. Demczyk
language : en
Publisher:
Release Date : 1995-07-18
Evolution Of Thin Film And Surface Structure And Morphology Volume 355 written by B. G. Demczyk and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995-07-18 with Technology & Engineering categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Microstructure And Morphology Evolution During The Growth Of Facetted Thin Films
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Author : Fnu Paritosh
language : en
Publisher:
Release Date : 2001
Microstructure And Morphology Evolution During The Growth Of Facetted Thin Films written by Fnu Paritosh and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with categories.
Evolution Of Thin Film Morphology
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Author : Matthew Pelliccione
language : en
Publisher: Springer Science & Business Media
Release Date : 2008-01-29
Evolution Of Thin Film Morphology written by Matthew Pelliccione and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-01-29 with Technology & Engineering categories.
The focus of this book is on modeling and simulations used in research on the morphological evolution during film growth. The authors emphasize the detailed mathematical formulation of the problem. The book will enable readers themselves to set up a computational program to investigate specific topics of interest in thin film deposition. It will benefit those working in any discipline that requires an understanding of thin film growth processes.