Design And Fabrication Of Tunable Mems Based Fabry Perot Filter In Near Infrared Wavelength Range
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Design And Fabrication Of Tunable Mems Based Fabry Perot Filter In Near Infrared Wavelength Range
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Author :
language : en
Publisher:
Release Date : 2015
Design And Fabrication Of Tunable Mems Based Fabry Perot Filter In Near Infrared Wavelength Range written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015 with categories.
Design And Fabrication Of Tunable Mems Based Fabry Perot Filter On Nir Wavelength
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Author : 王羽榛
language : en
Publisher:
Release Date : 2014
Design And Fabrication Of Tunable Mems Based Fabry Perot Filter On Nir Wavelength written by 王羽榛 and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014 with categories.
Silicon Based Optical Mems For Visible To Mid Wave Infrared Wavelengths
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Author : Dhirendra Kumar Tripathi
language : en
Publisher:
Release Date : 2016
Silicon Based Optical Mems For Visible To Mid Wave Infrared Wavelengths written by Dhirendra Kumar Tripathi and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016 with categories.
Optical microelectromechanical systems (Optical MEMS) offer a myriad of advantages, such as system miniaturization, robustness, cost effectiveness and high portability. Microspectrometers are optical MEMS based low cost, portable and robust spectroscopic systems which can be employed for soil characterization, food quality inspection, chemical mapping, and spectral imaging. The Microelectronics Research Group at The University of Western Australia has been involved in the design and development of various microspectrometers technologies for well over a decade. The heart of a microspectrometer is a tunable Fabry-Perot filter, which usually consists of two distributed Bragg reflectors(DBRs), one of which is fixed and the other is actuated to modulate the wavelength transmitted through the filter.The objective of this work is to fabricate and characterize silicon based DBRs and filters as building blocks for microspectrometers operating invisible to mid-infrared wavelengths (450-5000 nm). In order to achieve this objective, first, thin films of inductively coupled chemical vapour deposited (ICPCVD) silicon were optimized for their residual stress and optical properties. Second, the optimal structural design and fabrication process for DBRs and filters was identified and, third, the performance of fabricated structures was assessed through optical and mechanical characterizations. It was found that higher deposition temperature leads to better quality of ICPCVD silicon films. Furthermore, at higher deposition temperatures, the decrease in the inductively coupled power results in films with low tensile stress, higher refractive index and low extinction coefficients. The experimental work shows that formation of stable monohydride (Si-H) bonds between the hydrogen and silicon leads to improved optical and mechanical quality of ICPCVD silicon thin films. Thus, it is concluded that the hydrogen concentration and the specific hydrogen-silicon bonding nature together play a vital role in improving optical and mechanical quality of the silicon thin films. This thesis presents a simple process to fabricate quarter wavelength silicon-air-silicon based surface micromachined DBRs. A precise control of stress in the silicon thin films by in-situ and pre-release annealing was highly effective in fabricating DBRs ranging in area from 200 ?m 200 ?m to 5000 ?m 5000 ?m size with only a 5-15 nm variation in at-ness across the surface of the suspended membrane. DBRs from visible to MWIR wavelengths show near theoretical reflectance properties. In the visible and near infrared (NIR) wavelengths, silicon-air-silicon based DBRs demonstrate higher than 90% reflectance, despite the relatively high absorbance of silicon in these wavelength ranges. A new notch based actuation structure is presented. It is demonstrated that this structure allows a suspended membrane to actuate beyond50% of the initial tunable air-gap. This planer actuation structure is robust against the effects of out of plane stress on the suspended mirrors, and can be applied across a wide array of mirror materials and sizes. A tunable multi-spectral MWIR filter was fabricated and optically characterized. The filter shows near ideal performance with close to 70% peak transmittance and 380 nm full width at half maximum (FWHM), and a 800 nm tuning range. This thesis also present the fabrication process and optical characterization of an air-gap mirror based short-wave infrared (SWIR) filter. The optical transmittance measurement indicates a first order peak with a peak transmission of 70% and 90 nm FWHM at a wavelength of 2240 nm. The second order peak of the measured spectrum shows 53% peak transmission and 35 nm FWHM at 1550 nm,which compares very well with the predicted 44% peak transmission and 30 nm FWHM. In the NIR wavelength range a silicon-silicon oxide-silicon DBR based filter was fabricated. The peak transmission of the filter at 1140 nm center wavelength is around 54% with 40 nm FWHM, which is in close agreement with simulation. The fabricated filter shows an excellent out of band extinction. In order to assess optical uniformity, transmission measurements of the optical MEMS devices were undertaken as a two dimensional optical transmission map of fabricated devices.
Evaluation Of Pixel Scale Tunable Fabry Perot Filters For Optical Imaging
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Author : Daniel L. Edwards
language : en
Publisher:
Release Date : 2019
Evaluation Of Pixel Scale Tunable Fabry Perot Filters For Optical Imaging written by Daniel L. Edwards and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019 with Fabry-Perot interferometers categories.
"The Fabry-Perot interferometer (FPI) is a well-developed and widely used tool to control and measure wavelengths of light. In optical imaging applications, there is often a need for systems with compact, integrated, and widely tunable spectral filtering capabilities. We evaluate the performance of a novel tunable MEMS (Micro-Electro-Mechanical System) Fabry-Perot (FP) filter device intended to be monolithically integrated over each pixel of a focal plane array. This array of individually tunable FPIs have been designed to operate across the visible light spectrum from 400-750 nm. This design can give rise to a new line of compact spectrometers with fewer moving parts and the ability to perform customizable filtering schemes at the hardware level. The original design was modeled, simulated, and fabricated but not tested and evaluated. We perform optical testing on the fabricated devices to measure the spectral resolution and wavelength tunability of these FP etalons. We collect the transmission spectrum through the FP etalons to evaluate their quality, finesse, and free spectral range. We then attempt to thermally actuate the expansion mechanisms in the FP cavity to validate tunability across the visible spectrum. The simulated design materials set was modified to create a more practical device for fabrication in a standard CMOS/MEMS foundry. Unfortunately, metal thin film stress and step coverage issues resulted in device heater failures, preventing actuation. This FP filter array design proves to be a viable manufacturing design for an imaging focal plane with individually tunable pixels. However, it will require more optimization and extensive electrical, optical, thermal, and mechanical testing when integrated with a detector array."--Abstract.
Optical Mems Nanophotonics And Their Applications
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Author : Guangya Zhou
language : en
Publisher: CRC Press
Release Date : 2017-12-14
Optical Mems Nanophotonics And Their Applications written by Guangya Zhou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-14 with Science categories.
This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.
An Electronically Tunable First Order Fabry Perot Infrared Filter
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Author :
language : en
Publisher:
Release Date : 1995
An Electronically Tunable First Order Fabry Perot Infrared Filter written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with categories.
A tunable infrared filter capable of scanning from 8.2 to 12.8 micrometers has been designed, constructed and tested. It is a first order Fabry Perot interferometer with piezoelectrically driven cavity spacing. Multilayer dielectric coatings for the partially transmitting mirrors were designed to minimize the wavelength dependent phase change produced by reflection. The transmission bandwidth ranged from 2.8 to 4.0% across the tuning range. Continuous scanning at 20 Hz rates was demonstrated.
Nanotechnological Basis For Advanced Sensors
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Author : Johann Peter Reithmaier
language : en
Publisher: Springer
Release Date : 2011-04-21
Nanotechnological Basis For Advanced Sensors written by Johann Peter Reithmaier and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-04-21 with Science categories.
Bringing together experts from 15 countries, this book is based on the lectures and contributions of the NATO Advanced Study Institute on “Nanotechnological Basis for Advanced Sensors” held in Sozopol, Bulgaria, 30 May - 11 June, 2010. It gives a broad overview on this topic, and includes articles on: techniques for preparation and characterization of sensor materials; different types of nanoscaled materials for sensor applications, addressing both their structure (nanoparticles, nanocomposites, nanostructured films, etc.) and chemical nature (carbon-based, oxides, glasses, etc.); and on advanced sensors that exploit nanoscience and nanotechnology. In addition, the volume represents an interdisciplinary approach with authors coming from diverse fields such as physics, chemistry, engineering, materials science and biology. A particular strength of the book is its combination of longer papers, introducing the basic knowledge on a certain topic, and brief contributions highlighting special types of sensors and sensor materials.
A Broadly Tunable Surface Plasmon Coupled Wavelength Filter For Visible And Near Infrared Hyperspectral Imaging
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Author : Ajaykumar Zalavadia
language : en
Publisher:
Release Date : 2018
A Broadly Tunable Surface Plasmon Coupled Wavelength Filter For Visible And Near Infrared Hyperspectral Imaging written by Ajaykumar Zalavadia and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018 with categories.
Hyperspectral imaging is a set of techniques that has contributed to the study of advanced materials, pharmaceuticals, semiconductors, ceramics, polymers, biological specimens, and geological samples. Its use for remote sensing has advanced our understanding of agriculture, forestry, the Earth, environmental science, and the universe. The development of ultra-compact handheld hyperspectral imagers has been impeded by the scarcity of small widefield tunable wavelength filters. The widefield modality is preferred for handheld imaging applications in which image registration can be performed to counter scene shift caused by irregular user motions that would thwart scanning approaches. In the work presented here an electronically tunable widefield wavelength filter has been developed for hyperspectral imaging applications in the visible and near-infrared region. Conventional electronically tunable widefield imaging filter technologies include liquid crystal-based filters, acousto-optic tunable filters, and electronically tuned etalons; each having its own set of advantages and disadvantages. The construction of tunable filters is often complex and requires elaborate optical assemblies and electronic control circuits. I introduce in the work presented here is a novel widefield tunable filter, the surface plasmon coupled tunable filter (SPCTF), for visible and near infrared imaging. The SPCTF is based on surface plasmon coupling and has simple optical design that can be miniaturized without sacrificing performance. The SPCTF provides diffraction limited spatial resolution with a moderately narrow nominal passband (
Molecular And Laser Spectroscopy
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Author : V.P. Gupta
language : en
Publisher: Elsevier
Release Date : 2017-09-18
Molecular And Laser Spectroscopy written by V.P. Gupta and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-09-18 with Science categories.
Molecular and Laser Spectroscopy: Advances and Applications provides students and researchers with an up-to-date understanding of the fast-developing area of molecular and laser spectroscopy. Editor V.P. Gupta has brought together the eminent scientists on a selection of topics to develop a systematic approach, first covering basic principles needed to understand each cutting-edge technique and application. This book acts as a standard reference for advanced students of molecular and laser spectroscopy and as a graduate text for new entrants in the field. The book covers a wide range of applications of molecular and laser spectroscopy in diverse areas ranging from materials to medicine and defence, biomedical research, environmental monitoring, forensic investigations, food and agriculture, and chemical, pharmaceutical and petrochemical processes. Researchers and scientific personnel in these fields will learn the latest techniques in order to put them to practical use in their work. Covers several areas of spectroscopy research in a single volume, saving researchers time Includes exhaustive lists of research articles, reviews and books at the end of each chapter to point readers in the right direction for further learning Features illustrative examples of the varied applications Serves as a practical guide to those interested in using molecular and laser spectroscopy tools in their research and field applications
Optical Mems
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Author : Huikai Xie
language : en
Publisher: MDPI
Release Date : 2019-08-06
Optical Mems written by Huikai Xie and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-08-06 with Technology & Engineering categories.
This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines