Design And Fabrication Of Tunable Mems Based Fabry Perot Filter On Nir Wavelength
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Design And Fabrication Of Tunable Mems Based Fabry Perot Filter On Nir Wavelength
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Author : 王羽榛
language : en
Publisher:
Release Date : 2014
Design And Fabrication Of Tunable Mems Based Fabry Perot Filter On Nir Wavelength written by 王羽榛 and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014 with categories.
Design And Fabrication Of Tunable Mems Based Fabry Perot Filter In Near Infrared Wavelength Range
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Author :
language : en
Publisher:
Release Date : 2015
Design And Fabrication Of Tunable Mems Based Fabry Perot Filter In Near Infrared Wavelength Range written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015 with categories.
Silicon Based Optical Mems For Visible To Mid Wave Infrared Wavelengths
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Author : Dhirendra Kumar Tripathi
language : en
Publisher:
Release Date : 2016
Silicon Based Optical Mems For Visible To Mid Wave Infrared Wavelengths written by Dhirendra Kumar Tripathi and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016 with categories.
Optical microelectromechanical systems (Optical MEMS) offer a myriad of advantages, such as system miniaturization, robustness, cost effectiveness and high portability. Microspectrometers are optical MEMS based low cost, portable and robust spectroscopic systems which can be employed for soil characterization, food quality inspection, chemical mapping, and spectral imaging. The Microelectronics Research Group at The University of Western Australia has been involved in the design and development of various microspectrometers technologies for well over a decade. The heart of a microspectrometer is a tunable Fabry-Perot filter, which usually consists of two distributed Bragg reflectors(DBRs), one of which is fixed and the other is actuated to modulate the wavelength transmitted through the filter.The objective of this work is to fabricate and characterize silicon based DBRs and filters as building blocks for microspectrometers operating invisible to mid-infrared wavelengths (450-5000 nm). In order to achieve this objective, first, thin films of inductively coupled chemical vapour deposited (ICPCVD) silicon were optimized for their residual stress and optical properties. Second, the optimal structural design and fabrication process for DBRs and filters was identified and, third, the performance of fabricated structures was assessed through optical and mechanical characterizations. It was found that higher deposition temperature leads to better quality of ICPCVD silicon films. Furthermore, at higher deposition temperatures, the decrease in the inductively coupled power results in films with low tensile stress, higher refractive index and low extinction coefficients. The experimental work shows that formation of stable monohydride (Si-H) bonds between the hydrogen and silicon leads to improved optical and mechanical quality of ICPCVD silicon thin films. Thus, it is concluded that the hydrogen concentration and the specific hydrogen-silicon bonding nature together play a vital role in improving optical and mechanical quality of the silicon thin films. This thesis presents a simple process to fabricate quarter wavelength silicon-air-silicon based surface micromachined DBRs. A precise control of stress in the silicon thin films by in-situ and pre-release annealing was highly effective in fabricating DBRs ranging in area from 200 ?m 200 ?m to 5000 ?m 5000 ?m size with only a 5-15 nm variation in at-ness across the surface of the suspended membrane. DBRs from visible to MWIR wavelengths show near theoretical reflectance properties. In the visible and near infrared (NIR) wavelengths, silicon-air-silicon based DBRs demonstrate higher than 90% reflectance, despite the relatively high absorbance of silicon in these wavelength ranges. A new notch based actuation structure is presented. It is demonstrated that this structure allows a suspended membrane to actuate beyond50% of the initial tunable air-gap. This planer actuation structure is robust against the effects of out of plane stress on the suspended mirrors, and can be applied across a wide array of mirror materials and sizes. A tunable multi-spectral MWIR filter was fabricated and optically characterized. The filter shows near ideal performance with close to 70% peak transmittance and 380 nm full width at half maximum (FWHM), and a 800 nm tuning range. This thesis also present the fabrication process and optical characterization of an air-gap mirror based short-wave infrared (SWIR) filter. The optical transmittance measurement indicates a first order peak with a peak transmission of 70% and 90 nm FWHM at a wavelength of 2240 nm. The second order peak of the measured spectrum shows 53% peak transmission and 35 nm FWHM at 1550 nm,which compares very well with the predicted 44% peak transmission and 30 nm FWHM. In the NIR wavelength range a silicon-silicon oxide-silicon DBR based filter was fabricated. The peak transmission of the filter at 1140 nm center wavelength is around 54% with 40 nm FWHM, which is in close agreement with simulation. The fabricated filter shows an excellent out of band extinction. In order to assess optical uniformity, transmission measurements of the optical MEMS devices were undertaken as a two dimensional optical transmission map of fabricated devices.
Outlook And Challenges Of Nano Devices Sensors And Mems
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Author : Ting Li
language : en
Publisher: Springer
Release Date : 2017-02-22
Outlook And Challenges Of Nano Devices Sensors And Mems written by Ting Li and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-02-22 with Technology & Engineering categories.
This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.
Optical Mems Nanophotonics And Their Applications
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Author : Guangya Zhou
language : en
Publisher: CRC Press
Release Date : 2017-12-14
Optical Mems Nanophotonics And Their Applications written by Guangya Zhou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-14 with Science categories.
This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.
Design Test And Microfabrication Of Mems And Moems
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Author : Bernard Courtois
language : en
Publisher:
Release Date : 1999
Design Test And Microfabrication Of Mems And Moems written by Bernard Courtois and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Computer-aided design categories.
Mems Nems Sensors
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Author : Goutam Koley
language : en
Publisher: MDPI
Release Date : 2019-11-20
Mems Nems Sensors written by Goutam Koley and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-11-20 with Technology & Engineering categories.
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.
Eurosensors Xii Proceedings Of The Twelth European Conference On Soild State Transducers And The Ninth Uk Conference On Sensors And Their Applications Southampton Uk 13 16 September 1998
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Author : Neil White
language : en
Publisher: CRC Press
Release Date : 1998
Eurosensors Xii Proceedings Of The Twelth European Conference On Soild State Transducers And The Ninth Uk Conference On Sensors And Their Applications Southampton Uk 13 16 September 1998 written by Neil White and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Art categories.
Eurosensors XII incorporates the "Sensors and their Applications" as previously published in the Sensors Series. It provides a comprehensive overview of current research across Europe. It includes papers on sensor devices (chemical, gas, biological, optical, mechanical, resonant, flow and ultrasonic), increased reporting of developments from the European micro-machining community (micro-technology and integrated microsystems), and discusses design and simulation approaches.
Nanotechnological Basis For Advanced Sensors
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Author : Johann Peter Reithmaier
language : en
Publisher: Springer
Release Date : 2011-04-21
Nanotechnological Basis For Advanced Sensors written by Johann Peter Reithmaier and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-04-21 with Science categories.
Bringing together experts from 15 countries, this book is based on the lectures and contributions of the NATO Advanced Study Institute on “Nanotechnological Basis for Advanced Sensors” held in Sozopol, Bulgaria, 30 May - 11 June, 2010. It gives a broad overview on this topic, and includes articles on: techniques for preparation and characterization of sensor materials; different types of nanoscaled materials for sensor applications, addressing both their structure (nanoparticles, nanocomposites, nanostructured films, etc.) and chemical nature (carbon-based, oxides, glasses, etc.); and on advanced sensors that exploit nanoscience and nanotechnology. In addition, the volume represents an interdisciplinary approach with authors coming from diverse fields such as physics, chemistry, engineering, materials science and biology. A particular strength of the book is its combination of longer papers, introducing the basic knowledge on a certain topic, and brief contributions highlighting special types of sensors and sensor materials.
Comprehensive Foodomics
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Author :
language : en
Publisher: Elsevier
Release Date : 2020-11-12
Comprehensive Foodomics written by and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-11-12 with Science categories.
Comprehensive Foodomics, Three Volume Set offers a definitive collection of over 150 articles that provide researchers with innovative answers to crucial questions relating to food quality, safety and its vital and complex links to our health. Topics covered include transcriptomics, proteomics, metabolomics, genomics, green foodomics, epigenetics and noncoding RNA, food safety, food bioactivity and health, food quality and traceability, data treatment and systems biology. Logically structured into 10 focused sections, each article is authored by world leading scientists who cover the whole breadth of Omics and related technologies, including the latest advances and applications. By bringing all this information together in an easily navigable reference, food scientists and nutritionists in both academia and industry will find it the perfect, modern day compendium for frequent reference. List of sections and Section Editors: Genomics - Olivia McAuliffe, Dept of Food Biosciences, Moorepark, Fermoy, Co. Cork, Ireland Epigenetics & Noncoding RNA - Juan Cui, Department of Computer Science & Engineering, University of Nebraska-Lincoln, Lincoln, NE Transcriptomics - Robert Henry, Queensland Alliance for Agriculture and Food Innovation, The University of Queensland, St Lucia, Australia Proteomics - Jens Brockmeyer, Institute of Biochemistry and Technical Biochemistry, University Stuttgart, Germany Metabolomics - Philippe Schmitt-Kopplin, Research Unit Analytical BioGeoChemistry, Neuherberg, Germany Omics data treatment, System Biology and Foodomics - Carlos Leon Canseco, Visiting Professor, Biomedical Engineering, Universidad Carlos III de Madrid Green Foodomics - Elena Ibanez, Foodomics Lab, CIAL, CSIC, Madrid, Spain Food safety and Foodomics - Djuro Josic, Professor Medicine (Research) Warren Alpert Medical School, Brown University, Providence, RI, USA & Sandra Kraljevic Pavelic, University of Rijeka, Department of Biotechnology, Rijeka, Croatia Food Quality, Traceability and Foodomics - Daniel Cozzolino, Centre for Nutrition and Food Sciences, The University of Queensland, Queensland, Australia Food Bioactivity, Health and Foodomics - Miguel Herrero, Department of Bioactivity and Food Analysis, Foodomics Lab, CIAL, CSIC, Madrid, Spain Brings all relevant foodomics information together in one place, offering readers a ‘one-stop,’ comprehensive resource for access to a wealth of information Includes articles written by academics and practitioners from various fields and regions Provides an ideal resource for students, researchers and professionals who need to find relevant information quickly and easily Includes content from high quality authors from across the globe