Development Of A Micropump For Microelectronic Cooling

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Development Of A Micropump For Microelectronic Cooling
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Author : C. Channy Wong
language : en
Publisher:
Release Date : 1997
Development Of A Micropump For Microelectronic Cooling written by C. Channy Wong and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Cooling categories.
Development Of A Micropump For Microelectronic Cooling
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Author :
language : en
Publisher:
Release Date : 1996
Development Of A Micropump For Microelectronic Cooling written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with categories.
To demonstrate a system integration process for Micro-Electro-Mechanical Systems (MEMS), we are building an active cooling MEMS unit for microelectronics applications. This integrated unit will incorporate a micropump, temperature sensors, microchannels, and heat exchange devices into a single unit. The first phase of this research project is to develop and test a micropump capable of moving the working fluid within the integrated device. This paper will discuss the design, development, testing, and evaluation of a micropump concept. The micropump which was developed is an electrohydrodynamic (EHD) injection pump. Fabrication of the pump was accomplished using laser micromachining technology, and two initial designs were examined for full fabrication. The first design has two silicon parts stacked vertically on top of each other. Gold is deposited on one side of each stacked plate to serve as electrodes for the electrohydrodynamic pump. A Nd:YAG laser is used to drill an array of circular holes in the {open_quotes}well{close_quotes} region of both silicon parts, leaving an open pathway for fluid movement. Next the silicon parts are aligned and bonded together, thus becoming a EHD pump. Fluid flow has been observed when an electric voltage is applied across the electrodes. The second design has the silicon parts which contain the flow grid oriented {open_quotes}back-to-back{close_quotes} and bonded together. This {open_quotes}back-to-back{close_quotes} design has a shorter grid distance between the anode and cathode plates so that a smaller voltage is required for pumping. Preliminary results from laboratory experiments have demonstrated that this EHD micropump design can achieve a pressure head of about 287 Pa with an applied voltage of 120 V.
Microelectromechanical Systems
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Author :
language : en
Publisher:
Release Date : 2005
Microelectromechanical Systems written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Electromechanical devices categories.
Microelectromechanical Systems And Devices
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Author : Nazmul Islam
language : en
Publisher: BoD – Books on Demand
Release Date : 2012-03-28
Microelectromechanical Systems And Devices written by Nazmul Islam and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-03-28 with Science categories.
The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.
Applied Engineering Decisions In The Context Of Sustainable Development
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Author : Anil K. Bhatnagar
language : en
Publisher: Trans Tech Publications Ltd
Release Date : 2014-10-27
Applied Engineering Decisions In The Context Of Sustainable Development written by Anil K. Bhatnagar and has been published by Trans Tech Publications Ltd this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-10-27 with Technology & Engineering categories.
Selected, peer reviewed papers from the 2014 International Conference on Green Materials and Environmental Engineering (GMEE 2014), September 21-22, 2014, Hong Kong
Proceedings Of The 2003 Asme Summer Heat Transfer Conference
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Author :
language : en
Publisher:
Release Date : 2003
Proceedings Of The 2003 Asme Summer Heat Transfer Conference written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with Science categories.
Applied Mechanics Reviews
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Author :
language : en
Publisher:
Release Date : 2004
Applied Mechanics Reviews written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Mechanical engineering categories.
Advanced Materials
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Author : Ivan A. Parinov
language : en
Publisher: Springer
Release Date : 2018-05-12
Advanced Materials written by Ivan A. Parinov and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-05-12 with Technology & Engineering categories.
This book presents selected peer-reviewed contributions from the 2017 International Conference on “Physics and Mechanics of New Materials and Their Applications”, PHENMA 2017 (Jabalpur, India, 14–16 October, 2017), which is devoted to processing techniques, physics, mechanics, and applications of advanced materials. The book focuses on a wide spectrum of nanostructures, ferroelectric crystals, materials and composites as well as promising materials with special properties. It presents nanotechnology approaches, modern environmentally friendly piezoelectric and ferromagnetic techniques and physical and mechanical studies of the structural and physical–mechanical properties of materials. Various original mathematical and numerical methods are applied to the solution of different technological, mechanical and physical problems that are interesting from theoretical, modeling and experimental points of view. Further, the book highlights novel devices with high accuracy, longevity and extended capabilities to operate under wide temperature and pressure ranges and aggressive media, which show improved characteristics, thanks to the developed materials and composites, opening new possibilities for different physico-mechanical processes and phenomena.
Annual Ieee Semiconductor Thermal Measurement And Management Symposium
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Author :
language : en
Publisher:
Release Date : 2005
Annual Ieee Semiconductor Thermal Measurement And Management Symposium written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Amorphous semiconductors categories.
Progress In Smart Materials And Structures
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Author : Peter L. Reece
language : en
Publisher: Nova Publishers
Release Date : 2007
Progress In Smart Materials And Structures written by Peter L. Reece and has been published by Nova Publishers this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007 with Science categories.
"Smart" materials respond to environmental stimuli with particular changes in some variables. For that reason they are often also called responsive materials. Depending on changes in some external conditions, "smart" materials change either their properties (mechanical, electrical, appearance), their structure or composition, or their functions. Mostly, "smart" materials are embedded in systems whose inherent properties can be favourably changed to meet performance needs. Smart materials and structures have widespread applications in: 1. Materials science: composites, ceramics, processing science, interface science, sensor/actuator materials, chiral materials, conducting and chiral polymers, electrochromic materials, liquid crystals, molecular-level smart materials, biomaterials. 2. Sensing and actuation: electromagnetic, acoustic, chemical and mechanical sensing and actuation, single-measurand sensors, multiplexed multimeasurand distributed sensors and actuators, sensor/actuator signal processing, compatibility of sensors and actuators with conventional and advanced materials, smart sensors for materials and composites processing. 3. Optics and electromagnetics: optical fibre technology, active and adaptive optical systems and components, tuneable high-dielectric phase shifters, tuneable surface control. 4. Structures: smart skins for drag and turbulence control, other applications in aerospace/hydrospace structures, civil infrastructures, transportation vehicles, manufacturing equipment, repairability and maintainability. 5. Control: structural acoustic control, distributed control, analogue and digital feedback control, real-time implementation, adaptive structure stability, damage implications for structural control. 6. Information processing: neural networks, data processing, data visualisation and reliability. This book presents leading research from around the globe in this field.