Device And Process Technologies For Mems And Microelectronics
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Device And Process Technologies For Mems Microelectronics And Photonics Iii
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Author : Jung-Chih Chiao
language : en
Publisher: SPIE-International Society for Optical Engineering
Release Date : 2004
Device And Process Technologies For Mems Microelectronics And Photonics Iii written by Jung-Chih Chiao and has been published by SPIE-International Society for Optical Engineering this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Art categories.
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Device And Process Technologies For Mems And Microelectronics
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Author :
language : en
Publisher:
Release Date : 1999
Device And Process Technologies For Mems And Microelectronics written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with categories.
Mems And Moems Technology And Applications
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Author : P. Rai-Choudhury
language : en
Publisher: SPIE Press
Release Date : 2000
Mems And Moems Technology And Applications written by P. Rai-Choudhury and has been published by SPIE Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Technology & Engineering categories.
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
Microelectronics Technology And Devices Sbmicro 2002
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Author : Electrochemical Society. Electronics Division
language : en
Publisher: The Electrochemical Society
Release Date : 2002
Microelectronics Technology And Devices Sbmicro 2002 written by Electrochemical Society. Electronics Division and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002 with Technology & Engineering categories.
Mems And Microstructures In Aerospace Applications
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Author : Robert Osiander
language : en
Publisher: CRC Press
Release Date : 2018-10-03
Mems And Microstructures In Aerospace Applications written by Robert Osiander and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-10-03 with Technology & Engineering categories.
The promise of MEMS for aerospace applications has been germinating for years, and current advances bring the field to the very cusp of fruition. Reliability is chief among the challenges limiting the deployment of MEMS technologies in space, as the requirement of zero failure during the mission is quite stringent for this burgeoning field. MEMS and Microstructures in Aerospace Applications provides all the necessary tools to overcome these obstacles and take MEMS from the lab bench to beyond the exosphere. The book begins with an overview of MEMS development and provides several demonstrations of past and current examples of MEMS in space. From this platform, the discussion builds to fabrication technologies; the effect of space environmental factors on MEMS devices; and micro technologies for space systems, instrumentation, communications, thermal control, guidance navigation and control, and propulsion. Subsequent chapters explore factors common to all of the described systems, such as MEMS packaging, handling and contamination control, material selection for specific applications, reliability practices for design and application, and assurance practices. Edited and contributed by an outstanding team of leading experts from industry, academia, and national laboratories, MEMS and Microstructures in Aerospace Applications illuminates the path toward qualifying and integrating MEMS devices and instruments into future space missions and developing innovative satellite systems.
Smart Material Systems And Mems
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Author : Vijay K. Varadan
language : en
Publisher: John Wiley & Sons
Release Date : 2006-11-02
Smart Material Systems And Mems written by Vijay K. Varadan and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-11-02 with Technology & Engineering categories.
Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.
Microfabrication And Nanomanufacturing
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Author : Mark J. Jackson
language : en
Publisher: CRC Press
Release Date : 2005-11-10
Microfabrication And Nanomanufacturing written by Mark J. Jackson and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-11-10 with Technology & Engineering categories.
Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
Microelectronics Technology And Devices Sbmicro 2003
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Author : J. A. Martino
language : en
Publisher: The Electrochemical Society
Release Date : 2003
Microelectronics Technology And Devices Sbmicro 2003 written by J. A. Martino and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with Technology & Engineering categories.
Portable Spectroscopy And Spectrometry Technologies And Instrumentation
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Author : Richard A. Crocombe
language : en
Publisher: John Wiley & Sons
Release Date : 2021-04-19
Portable Spectroscopy And Spectrometry Technologies And Instrumentation written by Richard A. Crocombe and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-04-19 with Science categories.
Provides complete and up-to-date coverage of the foundational principles, enabling technologies, and specific instruments of portable spectrometry Portable Spectroscopy and Spectrometry: Volume One is both a timely overview of the miniature technologies used in spectrometry, and an authoritative guide to the specific instruments employed in a wide range of disciplines. This much-needed resource is the first comprehensive work to describe the enabling technologies of portable spectrometry, explain how various handheld and portable instruments work, discuss their potential limitations, and provide clear guidance on optimizing their utility and accuracy in the field. In-depth chapters—written by a team of international authors from a wide range of disciplinary backgrounds—have been carefully reviewed both by the editors and by third-party experts to ensure their quality and completeness. Volume One begins with general discussion of portable spectrometer engineering before moving through the electromagnetic spectrum to cover x-ray fluorescence (XRF), UV-visible, near-infrared, mid-infrared, and Raman spectroscopies. Subsequent chapters examine microplasmas, laser induced breakdown spectroscopy (LIBS), nuclear magnetic resonance (NMR) spectroscopy, and a variety of portable mass spectrometry instrument types. Featuring detailed chapters on DNA instrumentation and biological analyzers—topics of intense interest in light of the global coronavirus pandemic—this timely volume: Provides comprehensive coverage of the principles and instruments central to portable spectroscopy Includes contributions by experienced professionals working in instrument companies, universities, research institutes, the military, and hazardous material teams Discusses special topics such as smartphone spectroscopy, optical filter technology, stand-off detection, and MEMS/MOEMS technology Covers elemental spectroscopy, optical molecular spectroscopy, mass spectrometry, and molecular and imaging technologies Portable Spectroscopy and Spectrometry: Volume One is an indispensable resource for developers of portable instruments, civilian and government purchasers and operators, and teachers and students of portable spectroscopy. When combined with Volume Two, which focuses on the multitude of applications of portable instrumentation, Portable Spectroscopy and Spectrometry provides the most thorough coverage of the field currently available.
Process Variations In Microsystems Manufacturing
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Author : Michael Huff
language : en
Publisher: Springer Nature
Release Date : 2020-04-09
Process Variations In Microsystems Manufacturing written by Michael Huff and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-04-09 with Technology & Engineering categories.
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.