Efficient Extreme Ultraviolet Mirror Design
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Efficient Extreme Ultraviolet Mirror Design
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Author : Yen-Min Lee
language : en
Publisher:
Release Date : 2021
Efficient Extreme Ultraviolet Mirror Design written by Yen-Min Lee and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021 with Extreme ultraviolet lithography categories.
Extreme ultraviolet (EUV) lithography is a next generation platform with the potential to extend Moore's Law. The EUV mirror is a fundamental component of this system. Efficient Extreme Ultraviolet Mirror Design describes an approach to designing EUV mirrors with reduced computational time and memory requirements, providing a comprehensive grounding in the fundamentals of the EUV mirror and knowledge of the finite-difference time-domain (FDTD) method. The discussion is made timely by the opening of commercial avenues for the application of EUV as it begins to be implemented in the development of 5G, AI, edge computing, VR and the Internet of Things. This book explores the theory, function and fabrication of EUV mirrors, as well as the correlation between design by Fresnel's equations and design by photonic bands, and develops a rigorous and efficient FDTD method by applying these considerations to three simulation cases. Intended primarily for EUV industry professionals, Efficient Extreme Ultraviolet Mirror Design will be of particular use to researchers investigating large scale problems or near-field scattering problems in EUV lithography. It will serve as an excellent reference text for anyone working in or studying optical engineering, as well as a high-level introduction for researchers from other fields interested in photolithography and the FDTD method.
Extreme Ultraviolet Astronomy
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Author : Martin A. Barstow
language : en
Publisher: Cambridge University Press
Release Date : 2003-03-13
Extreme Ultraviolet Astronomy written by Martin A. Barstow and has been published by Cambridge University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003-03-13 with Science categories.
This book describes the development of astronomy in the Extreme Ultraviolet wavelength range, from the first rocket-based experiments to later satellite missions. It will be of great value to graduate students and researchers.
Plasma Processing Of Nanomaterials
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Author : R. Mohan Sankaran
language : en
Publisher: CRC Press
Release Date : 2017-12-19
Plasma Processing Of Nanomaterials written by R. Mohan Sankaran and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-19 with Science categories.
We are at a critical evolutionary juncture in the research and development of low-temperature plasmas, which have become essential to synthesizing and processing vital nanoscale materials. More and more industries are increasingly dependent on plasma technology to develop integrated small-scale devices, but physical limits to growth, and other challenges, threaten progress. Plasma Processing of Nanomaterials is an in-depth guide to the art and science of plasma-based chemical processes used to synthesize, process, and modify various classes of nanoscale materials such as nanoparticles, carbon nanotubes, and semiconductor nanowires. Plasma technology enables a wide range of academic and industrial applications in fields including electronics, textiles, automotives, aerospace, and biomedical. A prime example is the semiconductor industry, in which engineers revolutionized microelectronics by using plasmas to deposit and etch thin films and fabricate integrated circuits. An overview of progress and future potential in plasma processing, this reference illustrates key experimental and theoretical aspects by presenting practical examples of: Nanoscale etching/deposition of thin films Catalytic growth of carbon nanotubes and semiconductor nanowires Silicon nanoparticle synthesis Functionalization of carbon nanotubes Self-organized nanostructures Significant advances are expected in nanoelectronics, photovoltaics, and other emerging fields as plasma technology is further optimized to improve the implementation of nanomaterials with well-defined size, shape, and composition. Moving away from the usual focus on wet techniques embraced in chemistry and physics, the author sheds light on pivotal breakthroughs being made by the smaller plasma community. Written for a diverse audience working in fields ranging from nanoelectronics and energy sensors to catalysis and nanomedicine, this resource will help readers improve development and application of nanomaterials in their own work. About the Author: R. Mohan Sankaran received the American Vacuum Society’s 2011 Peter Mark Memorial Award for his outstanding contributions to tandem plasma synthesis.
Astronomy And Astrophysics Abstracts
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Author : S. Böhme
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-12-14
Astronomy And Astrophysics Abstracts written by S. Böhme and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-12-14 with Science categories.
From the reviews: Astronomy and Astrophysics Abstracts has appeared in semi-annual volumes since 1969 and it has already become one of the fundamental publications in the fields of astronomy, astrophysics and neighbouring sciences. It is the most important English-language abstracting journal in the mentioned branches. ... The abstracts are classified under more than hundred subject categories, thus permitting a quick survey of the whole extended material. The AAA is a valuable and important publication for all students and scientists working in the fields of astronomy and related sciences. As such it represents a necessary ingredient of any astronomical library all over the world." Space Science Reviews #1 "Dividing the whole field plus related subjects into 108 categories, each work is numbered and most are accompanied by brief abstracts. Fairly comprehensive cross-referencing links relevant papers to more than one category, and exhaustive author and subject indices are to be found at the back, making the catalogues easy to use. The series appears to be so complete in its coverage and always less than a year out of date that I shall certainly have to make a little more space on those shelves for future volumes." The Observatory Magazine #1
Optical Technologies For Extreme Ultraviolet And Soft X Ray Coherent Sources
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Author : Federico Canova
language : en
Publisher: Springer
Release Date : 2015-08-17
Optical Technologies For Extreme Ultraviolet And Soft X Ray Coherent Sources written by Federico Canova and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-08-17 with Science categories.
The book reviews the most recent achievements in optical technologies for XUV and X-ray coherent sources. Particular attention is given to free-electron-laser facilities, but also to other sources available at present, such as synchrotrons, high-order laser harmonics and X-ray lasers. The optical technologies relevant to each type of source are discussed. In addition, the main technologies used for photon handling and conditioning, namely multilayer mirrors, adaptive optics, crystals and gratings are explained. Experiments using coherent light received during the last decades a lot of attention for the X-ray regime. Strong efforts were taken for the realization of almost fully coherent sources, e.g. the free-electron lasers, both as independent sources in the femtosecond and attosecond regimes and as seeding sources for free-electron-lasers and X-ray gas lasers. In parallel to the development of sources, optical technologies for photon handling and conditioning of such coherent and intense X-ray beams advanced. New problems were faced for the realization of optical components of beamlines demanding to manage coherent X-ray photons, e.g. the preservation of coherence and time structure of ultra short pulses.
Extreme Ultraviolet Lithography
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Author : Ajay Kumar
language : en
Publisher: McGraw-Hill Education
Release Date : 2009-04-24
Extreme Ultraviolet Lithography written by Ajay Kumar and has been published by McGraw-Hill Education this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-04-24 with Technology & Engineering categories.
Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product. Master Extreme Ultraviolet Lithography Techniques Produce high-density, ultrafast microchips using the latest EUVL methods. Written by industry experts, Extreme Ultraviolet Lithography details the equipment, materials, and procedures required to radically extend fabrication capabilities to wavelengths of 32 nanometers and below. Work with masks and resists, configure high-reflectivity mirrors, overcome power and thermal challenges, enhance resolution, and minimize wasted energy. You will also learn how to use Mo/Si deposition technology, fine-tune performance, and optimize cost of ownership. Design EUVL-ready photomasks, resist layers, and source-collector modules Assemble optical components, mirrors, microsteppers, and scanners Harness laser-produced and discharge pulse plasma sources Enhance resolution using proximity correction and phase-shift Generate modified illumination using holographic elements Measure critical dimensions using metrology and scatterometry Deploy stable Mo/Si coatings and high-sensitivity multilayers Handle mask defects, layer imperfections, and thermal instabilities
Applications Of Thin Film Multilayered Structures To Figured X Ray Optics
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Author : Gerald F. Marshall
language : en
Publisher:
Release Date : 1985
Applications Of Thin Film Multilayered Structures To Figured X Ray Optics written by Gerald F. Marshall and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1985 with Optical coatings categories.
Scientific And Technical Aerospace Reports
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Author :
language : en
Publisher:
Release Date : 1995
Scientific And Technical Aerospace Reports written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Aeronautics categories.
Enhancement Cavities For The Generation Of Extreme Ultraviolet And Hard X Ray Radiation
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Author : Henning Carstens
language : en
Publisher: Springer
Release Date : 2018-06-22
Enhancement Cavities For The Generation Of Extreme Ultraviolet And Hard X Ray Radiation written by Henning Carstens and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-06-22 with Science categories.
This thesis discusses the power scaling of ultrashort pulses in enhancement cavities, utilized in particular for frequency conversion processes, such as Thomson scattering and high-harmonic generation. Using custom optics for ultrashort-pulse enhancement cavities, it demonstrates for the first time that at the envisaged power levels, the mitigation of thermal effects becomes indispensable even in cavities comprising solely reflective optics. It also studies cavities with large beams, albeit with low misalignment sensitivity, as a way to circumvent intensity-induced mirror damage. Average powers of several hundred kilowatts are demonstrated, which benefit hard x-ray sources based on Thomson scattering. Furthermore, pulses as short as 30 fs were obtained at more than 10 kW of average power and employed for high-harmonic generation with photon energies exceeding 100 eV at 250 MHz repetition rate, paving the way for frequency comb spectroscopy in this spectral region.
Extreme Ultraviolet Lithography
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Author : Harry J. Levinson
language : en
Publisher:
Release Date : 2020
Extreme Ultraviolet Lithography written by Harry J. Levinson and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020 with categories.