Etching In Microsystem Technology
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Etching In Microsystem Technology
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Author : Michael Köhler
language : en
Publisher: John Wiley & Sons
Release Date : 2008-07-11
Etching In Microsystem Technology written by Michael Köhler and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-07-11 with Science categories.
Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering. The book is divided into two sections: the wet and dry etching processes are presented in the first, general, section, which provides the scientific fundamentals, while a catalog of etching bath composition, etching instructions, and parameters can be found in the second section. This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice.
Bonding In Microsystem Technology
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Author : Jan A. Dziuban
language : en
Publisher: Springer Science & Business Media
Release Date : 2007-01-30
Bonding In Microsystem Technology written by Jan A. Dziuban and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-01-30 with Science categories.
This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students.
Introduction To Microsystem Technology
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Author : Gerald Gerlach
language : en
Publisher: John Wiley & Sons
Release Date : 2008-04-30
Introduction To Microsystem Technology written by Gerald Gerlach and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-04-30 with Technology & Engineering categories.
Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads. This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following: microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro; fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques; sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described); the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe? The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.
Micro System Technologies 90
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Author : Herbert Reichl
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Micro System Technologies 90 written by Herbert Reichl and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Technology & Engineering categories.
On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro System Technologies is attempting to take the opposite direction: During the last two decades the development of microelectronics was characterized by a tremendous increase of complexity of integrated circuits. At the same time the fields of microoptics and micromechanics have been developed to an advanced state of the art by the application of thin film and semiconductor technologies. The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules. Microsystems will lead to extensions of the field of microelectronic applications with important technical alterations and can open new considerable markets. For the realization of economical solutions for microsystems a lot of interdisciplinary cooperation and know-how has to be developed. New materials for sensitive layers, substrates, conducting, semiconducting, or isolating thin films are the basis for the development of new technologies. The increasing complexity leads to increasing interaction among electrical and non-electrical quantities.
Microsystem Technology
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Author : Wolfgang Menz
language : en
Publisher: John Wiley & Sons
Release Date : 2008-07-11
Microsystem Technology written by Wolfgang Menz and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-07-11 with Technology & Engineering categories.
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
Microsystem Technology
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Author : Hans-Peter Saluz
language : en
Publisher: Birkhäuser
Release Date : 2012-12-06
Microsystem Technology written by Hans-Peter Saluz and has been published by Birkhäuser this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.
Biomolecular studies are the trial of Man to understand how Nature manages information at the molecular level. The understanding of molecular informa tion handling in nature is essential for the molecular optimization in chem istry, molecular biology, molecular pharmacology and therefore - as an ex ample - for the development of specifically acting drugs. The famous recent method of technical information management is digital electronics. Over the past few years, evidence has arisen that computerized and molecular information managements have many similar and overlapping aspects. For example, both technology and nature use digitized information and both use small structures for the efficient handling of information. Furthermore, they optimize their processes in order to gain a maximum of information with a minimum of invested energy. During the last two decades, novel experimental techniques in biomolec ular sciences have paved the way for artificial biomolecular optimization. In the same time interval, the progress of micro system technology has been extended from the field of digital electronics and sensing to micro liquid hand ling, and the field of chip-supported substance handling began. It appears that the "marriage" of physical micro technology and molecular processing will be consummated soon. The contact of both fields has been realized in for ex ample DNA chips. Such connections will also become relevant in additional fields in the near future. Biomolecular investigations are the first to profit from these fast growing scientific and technical connections between micro systems and molecular sciences.
Microreaction Technology
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Author : Wolfgang Ehrfeld
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Microreaction Technology written by Wolfgang Ehrfeld and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.
Microreaction technology is the logically consistent application of microsystem techniques in chemical reaction and process engineering. Miniaturization in this field is the strategy of success and requires the development of small, inexpensive, independent and versatile chemical reaction units. Microreaction technology is at present regarded as one of the fastest evolving and most promising disciplines in chemical engineering, combinatorial synthesis and analysis, pharmaceutical drug development and molecular biotechnology. A broad range of microstructurable materials is a prerequisite for microreaction technology and the development of microreactors goes hand in hand with the availability of a number of modem, versatile microfabrication technologies. Today, it is possible to manufacture tbree dimensional microstructures, almost without any restrictions with regard to design and choice of suitable materials, for various chemical applications -just in time to support the development of functional units for microreactors, e. g. micromixers, micro heat exchangers, micro extractors, units for phase transfer, reaction cham bers, intelligent fluidic control elements and microanalysis systems. The advantages of microreactors, e. g. the use of novel process routes, the re duction of reaction byproducts, the improvement of 'time to market', the high flexibility for all applications requiring modular solutions, have had a strong im pact on concepts of sustainable development. Many of the leading companies and research institutes in the world have recognized the tremendous possibilities of microreactor concepts and of their economic potential, and have thus initiated worldwide research and development activities.
Silicon Sensors And Actuators
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Author : Benedetto Vigna
language : en
Publisher: Springer Nature
Release Date : 2022-04-12
Silicon Sensors And Actuators written by Benedetto Vigna and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-04-12 with Technology & Engineering categories.
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
1 Dimensional Metal Oxide Nanostructures
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Author : Zainovia Lockman
language : en
Publisher: CRC Press
Release Date : 2018-12-07
1 Dimensional Metal Oxide Nanostructures written by Zainovia Lockman and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-12-07 with Science categories.
1-D metal oxide nanostructures, especially those with semiconducting properties, have attracted much attention in recent years due to their potential and emerging applications, specifically in environment purification and energy devices. For these applications, there have been many efforts to grow 1-D nanostructures in the form of nanotubes, nanorods, and nanowires using processes that conserve energy, are cost effective, and can be scaled up for large-scale production. 1-Dimensional Metal Oxide Nanostructures gathers under one title the most recent development of oxide nanomaterials, especially those fabricated via oxidation process in the nanoscale field. Thermal and anodic oxidation processes are reviewed with an aim to offer an in-depth understanding of mechanisms of 1-D nanostructure formation, their characteristics, and limitations. Other more common methods are also discussed, including sol-gel, hydrothermal, and other templated methods. Important applications of 1-D nanostructures are then presented, focusing on oxides like zinc oxide, titanium oxide, zirconium oxide, copper oxide, and iron oxide. A chapter on carbon nanotubes hybrid with these oxides is also included as well as one on silicon oxide nanowires formation by local anodic oxidation process. Aimed at researchers, academics, and engineers working across the fields of nanotechnology, materials science, chemistry, physics, semiconductors, and environmental and biomedical engineering, this essential reference enables readers to grasp the main concepts of nanomaterials in 1-D: formation technique, characteristics, and uses. It also encourages practical innovations in nanotechnology, especially in curbing pressing global issues related to energy, environment, and security.
Optical Sensors And Microsystems
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Author : S. Martellucci
language : en
Publisher: Springer Science & Business Media
Release Date : 2007-05-08
Optical Sensors And Microsystems written by S. Martellucci and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-05-08 with Science categories.
Proceedings of the 22nd Course of the International School of Quantum Electronics, held 27 November-2 December 1997, in Erice, Italy. In recent years, fiber optical sensors and optical microsystems have assumed a significant role in sensing and measurement of many kinds. These optical techniques are utilised in a wide range of fields, including biomedicine, environmental sensing, mechanical and industrial measurement, and art preservation. This volume, an up-to-date survey of optical sensors and optical microsystems, aims at combining a tutorial foundation with analysis of current research in this area, and an extensive coverage of both technology and applications.