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Extreme Ultraviolet Imaging And Resist Characterization Using Spatial Filtering Techniques

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Extreme Ultraviolet Imaging And Resist Characterization Using Spatial Filtering Techniques

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Author : Michael David Shumway
language : en
Publisher:
Release Date : 2004

Extreme Ultraviolet Imaging And Resist Characterization Using Spatial Filtering Techniques written by Michael David Shumway and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with categories.

Nanofabrication

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Author : Ampere A. Tseng
language : en
Publisher: World Scientific
Release Date : 2008

Nanofabrication written by Ampere A. Tseng and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008 with Science categories.

Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students.Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices.

Dissertation Abstracts International

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Author :
language : en
Publisher:
Release Date : 2005

Dissertation Abstracts International written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Dissertations, Academic categories.

Euv Lithography

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Author : Vivek Bakshi
language : en
Publisher: Wiley-Blackwell
Release Date : 2009

Euv Lithography written by Vivek Bakshi and has been published by Wiley-Blackwell this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009 with Art categories.

Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar material in a very clear manner. This book is also valuable as a teaching tool. It has become an instant classic and far surpasses others in the EUVL field.

Nasa Thesaurus

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Author :
language : en
Publisher:
Release Date : 2001-07

Nasa Thesaurus written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001-07 with Aeronautics categories.

Contains the authorized subject terms by which the documents in the NASA STI Database are indexed and retrieved.

Applied Optics

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Author :
language : en
Publisher:
Release Date : 1998

Applied Optics written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Optics categories.

Scientific And Technical Aerospace Reports

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Author :
language : en
Publisher:
Release Date : 1995

Scientific And Technical Aerospace Reports written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Aeronautics categories.

Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.