Fabrication Of 3d Silicon Sensors
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Fabrication Of 3d Silicon Sensors
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Author :
language : en
Publisher:
Release Date : 2012
Fabrication Of 3d Silicon Sensors written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012 with categories.
Silicon sensors with a three-dimensional (3-D) architecture, in which the n and p electrodes penetrate through the entire substrate, have many advantages over planar silicon sensors including radiation hardness, fast time response, active edge and dual readout capabilities. The fabrication of 3D sensors is however rather complex. In recent years, there have been worldwide activities on 3D fabrication. SINTEF in collaboration with Stanford Nanofabrication Facility have successfully fabricated the original (single sided double column type) 3D detectors in two prototype runs and the third run is now on-going. This paper reports the status of this fabrication work and the resulted yield. The work of other groups such as the development of double sided 3D detectors is also briefly reported.
Radiation Sensors With 3d Electrodes
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Author : Cinzia Da Vià
language : en
Publisher: CRC Press
Release Date : 2019-01-17
Radiation Sensors With 3d Electrodes written by Cinzia Da Vià and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-01-17 with Science categories.
Written by the leading names in this field, this book introduces the technical properties, design and fabrication details, measurement results, and applications of three-dimensional silicon radiation sensors. Such devices are currently used in the ATLAS experiment at the European Centre for Particle Physics (CERN) for particle tracking in high energy physics. These sensors are the radiation hardest devices ever fabricated and have applications in ground-breaking research in neutron detection, medical dosimetry and space technologies and more. Chapters explore the essential features of silicon particle detectors, interactions of radiation with matter, radiation damage effects, and micro-fabrication, in addition to a providing historical overview of the field. This book will be a key reference for students and researchers working with sensor technologies. Features: The first book dedicated to this unique and growing subject area, which is also widely applicable in high-energy physics, medical physics, space science and beyond Authored by Sherwood Parker, the inventor of the concept of 3D detectors; Cinzia Da Vià, who has brought 3DSi technology to application; and Gian-Franco Dalla Betta, a leading figure in the design and fabrication technology of these devices Explains to non-experts the essential features of silicon particle detectors, interactions of radiation with matter, radiation damage effects, and micro-fabrication
Advanced Detector Research Fabrication And Testing Of 3d Active Edge Silicon Sensors
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Author :
language : en
Publisher:
Release Date : 2008
Advanced Detector Research Fabrication And Testing Of 3d Active Edge Silicon Sensors written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008 with categories.
Development of 3D silicon radiation sensors employing electrodes fabricated perpendicular to the sensor surfaces to improve fabrication yields and increasing pulse speeds.
Advanced Mems Nems Fabrication And Sensors
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Author : Zhuoqing Yang
language : en
Publisher: Springer Nature
Release Date : 2021-10-12
Advanced Mems Nems Fabrication And Sensors written by Zhuoqing Yang and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-10-12 with Technology & Engineering categories.
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
3d And Circuit Integration Of Mems
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Author : Masayoshi Esashi
language : en
Publisher: John Wiley & Sons
Release Date : 2021-03-16
3d And Circuit Integration Of Mems written by Masayoshi Esashi and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-03-16 with Technology & Engineering categories.
Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Handbook Of Silicon Based Mems Materials And Technologies
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Author : Markku Tilli
language : en
Publisher: Elsevier
Release Date : 2020-04-17
Handbook Of Silicon Based Mems Materials And Technologies written by Markku Tilli and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-04-17 with Technology & Engineering categories.
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Radiation Sensors With 3d Electrodes
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Author : Cinzia Da Vià
language : en
Publisher: CRC Press
Release Date : 2019-01-17
Radiation Sensors With 3d Electrodes written by Cinzia Da Vià and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-01-17 with Science categories.
Written by the leading names in this field, this book introduces the technical properties, design and fabrication details, measurement results, and applications of three-dimensional silicon radiation sensors. Such devices are currently used in the ATLAS experiment at the European Centre for Particle Physics (CERN) for particle tracking in high energy physics. These sensors are the radiation hardest devices ever fabricated and have applications in ground-breaking research in neutron detection, medical dosimetry and space technologies and more. Chapters explore the essential features of silicon particle detectors, interactions of radiation with matter, radiation damage effects, and micro-fabrication, in addition to a providing historical overview of the field. This book will be a key reference for students and researchers working with sensor technologies. Features: The first book dedicated to this unique and growing subject area, which is also widely applicable in high-energy physics, medical physics, space science and beyond Authored by Sherwood Parker, the inventor of the concept of 3D detectors; Cinzia Da Vià, who has brought 3DSi technology to application; and Gian-Franco Dalla Betta, a leading figure in the design and fabrication technology of these devices Explains to non-experts the essential features of silicon particle detectors, interactions of radiation with matter, radiation damage effects, and micro-fabrication
Printed Flexible Sensors
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Author : Anindya Nag
language : en
Publisher: Springer
Release Date : 2019-03-11
Printed Flexible Sensors written by Anindya Nag and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-03-11 with Technology & Engineering categories.
This book presents recent advances in the design, fabrication and implementation of flexible printed sensors. It explores a range of materials for developing the electrode and substrate parts of the sensors, on the basis of their electrical and mechanical characteristics. The sensors were processed using laser cutting and 3D printing techniques, and the sensors developed were employed in a number of healthcare, environmental and industrial applications, including: monitoring of physiological movements, respiration, salinity and nitrate measurement, and tactile sensing. The type of sensor selected for each application depended on its dimensions, robustness and sensitivity. The sensors fabricated were also embedded in an IoT-based system, allowing them to be integrated into real-time applications.
Design Fabrication And Testing Of A Flexible Silicon Tactile Sensor
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Author : David James Beebe
language : en
Publisher:
Release Date : 1994
Design Fabrication And Testing Of A Flexible Silicon Tactile Sensor written by David James Beebe and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with categories.
Silicon Sensors And Circuits
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Author : R.F. Wolffenbuttel
language : en
Publisher: Springer Science & Business Media
Release Date :
Silicon Sensors And Circuits written by R.F. Wolffenbuttel and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on with categories.