Focused Ion Beam Systems
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Focused Ion Beam Systems
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Author : Nan Yao
language : en
Publisher: Cambridge University Press
Release Date : 2007-09-13
Focused Ion Beam Systems written by Nan Yao and has been published by Cambridge University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-09-13 with Technology & Engineering categories.
The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.
Focused Ion Beam Systems
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Author : Nan Yao
language : en
Publisher:
Release Date : 2007
Focused Ion Beam Systems written by Nan Yao and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007 with Focused ion beams categories.
The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.
High Resolution Focused Ion Beams Fib And Its Applications
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Author : Jon Orloff
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
High Resolution Focused Ion Beams Fib And Its Applications written by Jon Orloff and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Technology & Engineering categories.
In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.
Focused Ion Beams From Liquid Metal Ion Sources
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Author : P. D. Prewett
language : en
Publisher: John Wiley & Sons
Release Date : 1991-10-02
Focused Ion Beams From Liquid Metal Ion Sources written by P. D. Prewett and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 1991-10-02 with Science categories.
Provides an up-to-date review and analysis of liquid metal ion sources and their applications. The contents range from a discussion of the fundamental physics underlying operation of the liquid metal ion sources, through the technical details of their construction and manufacture to their performance characteristics. Their use in focused ion beam systems is covered in detail, including a discussion of the fundamentals of ion optical focusing column design and the various microengineering applications.
Introduction To Focused Ion Beams
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Author : Lucille A. Giannuzzi
language : en
Publisher: Springer Science & Business Media
Release Date : 2006-05-18
Introduction To Focused Ion Beams written by Lucille A. Giannuzzi and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-05-18 with Science categories.
Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
Introduction To Focused Ion Beams
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Author : Lucille A. Giannuzzi
language : en
Publisher: Springer Science & Business Media
Release Date : 2004-11-19
Introduction To Focused Ion Beams written by Lucille A. Giannuzzi and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004-11-19 with Science categories.
Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
Coulomb Interactions In Focused Ion Beam Systems
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Author : Lucas Joseph Vijgen
language : en
Publisher: Delft University Press
Release Date : 1994-12-01
Coulomb Interactions In Focused Ion Beam Systems written by Lucas Joseph Vijgen and has been published by Delft University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994-12-01 with Coulomb excitation categories.
Introduction To Focused Ion Beam Nanometrology
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Author : David C. Cox
language : en
Publisher: Morgan & Claypool Publishers
Release Date : 2015-10-01
Introduction To Focused Ion Beam Nanometrology written by David C. Cox and has been published by Morgan & Claypool Publishers this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-10-01 with Technology & Engineering categories.
This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.
Modern Electron Microscopy In Physical And Life Sciences
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Author : Milos Janecek
language : en
Publisher: BoD – Books on Demand
Release Date : 2016-02-18
Modern Electron Microscopy In Physical And Life Sciences written by Milos Janecek and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-02-18 with Science categories.
This book brings a broad review of recent global developments in theory, instrumentation, and practical applications of electron microscopy. It was created by 13 contributions from experts in different fields of electron microscopy and technology from over 20 research institutes worldwide.
Nanofabrication Using Focused Ion And Electron Beams
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Author : Ivo Utke
language : en
Publisher: Oxford University Press
Release Date : 2012-03-05
Nanofabrication Using Focused Ion And Electron Beams written by Ivo Utke and has been published by Oxford University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-03-05 with Technology & Engineering categories.
Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabrication and nanocharacterization. Limitations of the FIB/FEB techniques, especially important when nanoscale resolution is considered, as well as possible ways to overcome the experimental difficulties in creating new nanodevices and improving resolution of processing, are outlined. Chapters include tutorials describing fundamental aspects of the interaction of beams (FIB/FEB) with surfaces, nanostructures and adsorbed molecules; electron and ion beam chemistries; basic theory, design and configuration of equipment; simulations of processes; basic solutions for nanoprototyping. Emerging technologies as processing by cluster beams are also discussed. In addition, the book considers numerous applications of these techniques (milling, etching, deposition) for nanolithography, nanofabrication and characterization, involving different nanostructured materials and devices. Its main focus is on practical details of using focused ion and electron beams with gas assistance (deposition and etching) and without gas assistance (milling/cutting) for fabrication of devices from the fields of nanoelectronics, nanophotonics, nanomagnetics, functionalized scanning probe tips, nanosensors and other types of NEMS (nanoelectromechanical systems). Special attention is given to strategies designed to overcome limitations of the techniques (e.g., due to damaging produced by energetic ions interacting with matter), particularly those involving multi-step processes and multi-layer materials. Through its thorough demonstration of fundamental concepts and its presentation of a wide range of technologies developed for specific applications, this volume is ideal for researches from many different disciplines, as well as engineers and professors in nanotechnology and nanoscience.