Foundry Microfabrication Of Deformable Mirrors For Adaptive Optics

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Foundry Microfabrication Of Deformable Mirrors For Adaptive Optics
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Author : William D. Cowan
language : en
Publisher:
Release Date : 1998-04-01
Foundry Microfabrication Of Deformable Mirrors For Adaptive Optics written by William D. Cowan and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998-04-01 with Founding categories.
Microelectromechanical Systems (MEMS) is a rapidly emerging field of research in which batch fabrication processes are used to construct miniature devices. MEMS devices are particularly well suited to optical applications. Foundry microfabrication offers a substantial cost advantage for prototype system development. In this research, foundry MEMS processes are used to fabricate low-cost deformable mirror systems (MEM-DMs) for adaptive optics. The challenges and design trades associated with fabrication of continuous and segmented deformable mirrors in foundry processes are examined in detail. Micromirror surface figure is shown to be critically important. Beam steering and optical aberration correction experiments conclusively demonstrate the potential of low-cost MEM-DMs. The prototype MEM-DM systems are approximately 1/ 500th the cost of conventionally manufactured deformable mirrors. An innovative direct digital control scheme further reduces adaptive optic system cost by eliminating the digital to analog converter typically required for each controlled element. In addition to the MEM-DMs, other MEMS devices are shown. The thermally actuated piston micromirrors offer greater deflections for operation at longer optical wavelengths. Other MEMS devices examined include a series of tilting mirrors, pressure gauges, test structures, electrostatic scratch drive actuated rotors, and a new type of electrostatic cantilever motor with lateral motion output.
Photonic Devices And Algorithms For Computing
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Author :
language : en
Publisher:
Release Date : 1999
Photonic Devices And Algorithms For Computing written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Computer algorithms categories.
Optical Engineering
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Author :
language : en
Publisher:
Release Date : 2000
Optical Engineering written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Electronic journals categories.
Publishes papers reporting on research and development in optical science and engineering and the practical applications of known optical science, engineering, and technology.
Adaptive Optical System Technologies
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Author :
language : en
Publisher:
Release Date : 1998
Adaptive Optical System Technologies written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Astronomical instruments categories.
Adaptive Optical System Technologies
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Author : Domenico Bonaccini
language : en
Publisher: SPIE-International Society for Optical Engineering
Release Date : 1998
Adaptive Optical System Technologies written by Domenico Bonaccini and has been published by SPIE-International Society for Optical Engineering this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Science categories.
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Moems And Miniaturized Systems
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Author :
language : en
Publisher:
Release Date : 2000
Moems And Miniaturized Systems written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Microelectromechanical systems categories.
Scientific And Technical Aerospace Reports
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Author :
language : en
Publisher:
Release Date : 1994
Scientific And Technical Aerospace Reports written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Aeronautics categories.
Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Integrated Mems Technologies For Adaptive Optics
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Author : Blake Ching-Yu Lin
language : en
Publisher:
Release Date : 2008
Integrated Mems Technologies For Adaptive Optics written by Blake Ching-Yu Lin and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008 with categories.
International Aerospace Abstracts
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Author :
language : en
Publisher:
Release Date : 1996
International Aerospace Abstracts written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with Aeronautics categories.
Design Fabrication And Characterization Of Mems Deformable Mirrors For Ocular Adaptive Optics
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Author : Hyunkyu Park
language : en
Publisher:
Release Date : 2009
Design Fabrication And Characterization Of Mems Deformable Mirrors For Ocular Adaptive Optics written by Hyunkyu Park and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009 with categories.