Fundamental Electron Interactions With Plasma Processing Gases

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Fundamental Electron Interactions With Plasma Processing Gases

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Author : Loucas G. Christophorou
language : en
Publisher: Springer Science & Business Media
Release Date : 2004

Fundamental Electron Interactions With Plasma Processing Gases written by Loucas G. Christophorou and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Science categories.

This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.

Fundamental Electron Interactions With Plasma Processing Gases

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Author : Loucas G. Christophorou
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06

Fundamental Electron Interactions With Plasma Processing Gases written by Loucas G. Christophorou and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.

This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last eight years through a critical review and comprehensive assessment of "all" available data on low-energy electron collisions with plasma processing gases which we conducted at the National Institute of Standards and Technology (NIST). Data from this work were originally published in the Journal of Physical and Chemical Reference Data, and have been updated and expanded here. The fundamental electron-molecule interaction processes are discussed in Chapter 1. The cross sections and rate coefficients most often used to describe these interactions are defined in Chapter 2, where some recent advances in the methods employed for their measurement or calculation are outlined. The methodology we adopted for the critical evaluation, synthesis, and assessment of the existing data is described in Chapter 3. The critically assessed data and recommended or suggested cross sections and rate and transport coefficients for ten plasma etching gases are presented and discussed in Chapters 4, 5, and 6.

Gaseous Electronics

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Author : Gorur Govinda Raju
language : en
Publisher: CRC Press
Release Date : 2018-09-03

Gaseous Electronics written by Gorur Govinda Raju and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-09-03 with Science categories.

With the constant emergence of new research and application possibilities, gaseous electronics is more important than ever in disciplines including engineering (electrical, power, mechanical, electronics, and environmental), physics, and electronics. The first resource of its kind, Gaseous Electronics: Tables, Atoms, and Molecules fulfills the author’s vision of a stand-alone reference to condense 100 years of research on electron-neutral collision data into one easily searchable volume. It presents most—if not all—of the properly classified experimental results that scientists, researchers, and students require for a theoretical and practical understanding of collision properties and their impact. An unprecedented collection and analysis of electron neutral collision properties This book follows a new user-friendly format that enables readers to easily retrieve, analyze, and apply specific atomic/molecular information as needed. In his previous work, Gaseous Electronics: Theory and Practice, the author first explored electron–neutron interactions. To clarify the complex fundamental processes involved, he cited as much experimental data on atoms and molecules as limited space would allow. Completing that task, this handy reference more fully compiles essential revised data on more than 420 atoms and molecules, arranging it into easily digestible chapters, sections, and appendices. Analysis parameters include total scattering, ionization, excitation, attachment cross sections, ionization and attachment coefficients, attachment rates, and ion drift velocity. Some recent research areas in gaseous electronics include: Environmentally efficient and protective lighting devices Plasma research for power generation and space applications Medical applications (some involving skin treatment and healing) Written entirely in SI units, the book includes hundreds of tables, figures, and specially drawn charts, with data expressed in both tabular and graphical form. Each chapter stands independently and contains references for further research.

Gaseous Dielectrics X

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Author : Loucas C. Christophorou
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06

Gaseous Dielectrics X written by Loucas C. Christophorou and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.

The book contains a broad and in depth review by leading world experts of the progress and the problems of current interest in gaseous dielectrics and their use, especially as insulators in high-voltage equipment and substations. Recent advances in superconductivity for power transmission and in plasma technology are also included. The fundamental, applied and industrial research described in the book allows the electric power industry to transmit and distribute electrical energy in more efficient, safe and environmentally acceptable ways.

Emerging Dynamics Science Energy Society And Values

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Author : Loucas G. Christophorou
language : en
Publisher: Springer
Release Date : 2018-06-08

Emerging Dynamics Science Energy Society And Values written by Loucas G. Christophorou and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-06-08 with Science categories.

Emerging Dynamics: Science, Energy, Society and Values focuses on the impact of science, science-based technology and scientific values on present-day humanity and its future. The book advocates for a science willing to accommodate both human values and scientific facts. The four main subjects focused on throughout the text are: The overwhelming impact of modern science and science-based technology on virtually every aspect of human life Human values and their significance for science and society The need for mutual accommodation between scientific values and the traditional values of society The fundamental role of energy for civilization and society. The book cuts across scientific disciplines and looks at modern civilization through the knowledge provided by the physical, chemical, biomedical and other branches of natural science. The book is unique in its holistic approach, combining knowledge acquired by deduction, reduction-induction, and experimental scientific methods with knowledge acquired through history, philosophy, the arts, faith and cultural traditions. Modern civilization’s most distinct characteristics are due to science, science-based technology and energy. The role of energy in the sustainability of civilization and the impact of biomedical science on man are especially emphasized throughout this timely book, making a case for a hopeful future based on both science and values. A science guided in its applications by human values and a value system cognizant of the facts of science and willing to accommodate them

Electron Scattering

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Author : Colm T. Whelan
language : en
Publisher: Springer Science & Business Media
Release Date : 2006-01-17

Electron Scattering written by Colm T. Whelan and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-01-17 with Science categories.

There is a unity to physics; it is a discipline which provides the most fundamental understanding of the dynamics of matter and energy. To understand anything about a physical system you have to interact with it and one of the best ways to learn something is to use electrons as probes. This book is the result of a meeting, which took place in Magdalene College Cambridge in December 2001. Atomic, nuclear, cluster, soHd state, chemical and even bio- physicists got together to consider scattering electrons to explore matter in all its forms. Theory and experiment were represented in about equal measure. It was meeting marked by the most lively of discussions and the free exchange of ideas. We all learnt a lot. The Editors are grateful to EPSRC through its Collaborative Computational Project program (CCP2), lOPP, the Division of Atomic, Molecular, Optical and Plasma Physics (DAMOPP) and the Atomic Molecular Interactions group (AMIG) of the Institute of Physics for financial support. The smooth running of the meeting was enormously facilitated by the efficiency and helpfulness of the staff of Magdalene College, for which we are extremely grateful. This meeting marked the end for one of us (CTW) of a ten-year period as a fellow of the College and he would like to take this opportunity to thank the fellows and staff for the privilege of working with them.

Advances In Atomic Molecular And Optical Physics

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Author :
language : en
Publisher: Academic Press
Release Date : 2012-10-18

Advances In Atomic Molecular And Optical Physics written by and has been published by Academic Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-10-18 with Science categories.

Advances in Atomic, Molecular, and Optical Physics publishes reviews of recent developments in a field which is in a state of rapid growth, as new experimental and theoretical techniques are used on many old and new problems. Topics covered include related applied areas, such as atmospheric science, astrophysics, surface physics and laser physics. Articles are written by distinguished experts, and contain both relevant review material and detailed descriptions of important recent developments. - International experts - Comprehensive articles - New developments

Nanofabrication Using Focused Ion And Electron Beams

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Author : Ivo Utke
language : en
Publisher: OUP USA
Release Date : 2012-05

Nanofabrication Using Focused Ion And Electron Beams written by Ivo Utke and has been published by OUP USA this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-05 with Science categories.

This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.

New Trends In Atomic And Molecular Physics

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Author : Man Mohan
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-07-11

New Trends In Atomic And Molecular Physics written by Man Mohan and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-07-11 with Science categories.

The field of Atomic and Molecular Physics (AMP) has reached significant advances in high–precision experimental measurement techniques. The area covers a wide spectrum ranging from conventional to new emerging multi-disciplinary areas like physics of highly charged ions (HCI), molecular physics, optical science, ultrafast laser technology etc. This book includes the important topics of atomic structure, physics of atomic collision, photoexcitation, photoionization processes, Laser cooling and trapping, Bose Einstein condensation and advanced technology applications of AMP in the fields of astronomy, astrophysics, fusion, biology and nanotechnology. This book is useful for researchers, professors, graduate, postgraduate and PhD students dealing with atomic and molecular physics. The book has a wide scope with applications in neighboring fields like plasma physics, astrophysics, cold collisions, nanotechnology and future fusion energy sources like ITER (international Thermonuclear Experimental Reactor) Tokomak plasma machine, which need accurate AMP data.

Nonthermal Plasmas For Materials Processing

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Author : Jörg Florian Friedrich
language : en
Publisher: John Wiley & Sons
Release Date : 2022-07-15

Nonthermal Plasmas For Materials Processing written by Jörg Florian Friedrich and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-07-15 with Science categories.

NONTHERMAL PLASMAS FOR MATERIALS PROCESSING This unique book covers the physical and chemical aspects of plasma chemistry with polymers and gives new insights into the interaction of physics and chemistry of nonthermal plasmas and their applications in materials science for physicists and chemists. The properties and characteristics of plasmas, elementary (collision) processes in the gas phase, plasma surface interactions, gas discharge plasmas and technical plasma sources, atmospheric plasmas, plasma diagnostics, polymers and plasmas, plasma polymerization, post-plasma processes, plasma, and wet-chemical processing, plasma-induced generation of functional groups, and the chemical reactions on these groups along with a few exemplary applications are discussed in this comprehensive but condensed state-of-the-art book on plasma chemistry and its dependence on plasma physics. While plasma physics, plasma chemistry, and polymer science are often handled separately, the aim of the authors is to harmoniously join the physics and chemistry of low-pressure and atmospheric-pressure plasmas with polymer surface chemistry and polymerization and to compare such chemistry with classic chemistry. Readers will find in these chapters Interaction of plasma physics and chemistry in plasmas and at the surface of polymers; Explanation and interpretation of physical and chemical mechanisms on plasma polymerization and polymer surface modification; Introduction of modern techniques in plasma diagnostics, surface analysis of solids, and special behavior of polymers on exposure to plasmas; Discussion of the conflict of energy-rich plasma species with permanent energy supply and the much lower binding energies in polymers and alternatives to avoid random polymer decomposition Technical applications such as adhesion, cleaning, wettability, textile modification, coatings, films, etc. New perspectives are explained about how to use selective and mild processes to allow post-plasma chemistry on non-degraded polymer surfaces. Audience Physicists, polymer chemists, materials scientists, industrial engineers in biomedicine, coatings, printing, etc.