Ion Implantation Equipment And Techniques
DOWNLOAD
Download Ion Implantation Equipment And Techniques PDF/ePub or read online books in Mobi eBooks. Click Download or Read Online button to get Ion Implantation Equipment And Techniques book now. This website allows unlimited access to, at the time of writing, more than 1.5 million titles, including hundreds of thousands of titles in various foreign languages. If the content not found or just blank you must refresh this page
Ion Implantation Equipment And Techniques
DOWNLOAD
Author : H. Ryssel
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Ion Implantation Equipment And Techniques written by H. Ryssel and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.
The Fourth International Conference on Ion Implantation: Equipment and Tech niques was held at the Convention Center in Berchtesgaden, Bavaria, Germany, from September 13 to 17, 1982. It was attended by more than 200 participants from over 20 different countries. Severa1 series of conferences have dealt with the app1ication of ion implantation to semiconductors and other materials (Thousand Oaks, 1970; Garmisch-Partenkirchen, 1971; Osaka, 1974; Warwick, 1975; Bou1der, 1975; Budapest, 1978; and Albany, 1980). Another series of conferences has been devoted to implantation equipment and techniques (S- ford, 1977; Trento, 1978; and Kingston, 1980). This conference was the fourth in the 1atter series. Twe1ve invited papers and 55 contributed papers covered the areas of ion implantation equipment, measuring techniques, and app1ica tions of implantation to metals and semiconductors. A schoo1 on ion implantation was held in connection with the conference, and the 1ectures presented at this schoo1 were pub1ished as Vo1. 10 of the Springer Series in E1ectrophysics under the tit1e Ion Implantation Techniques (edited by H. Rysse1 and H. G1awischnig). During the conference, space was also provided for presentations and demonstrations by manufacturers of ion implantation equipment. Once again, this conference provided a forum for free discussion among implantation specia1ists in industry as we11 as research institutions. Espe cially effective in stimulating a free exchange of information was the daily get-together over free beer at the "Bier Adam". Many people contributed to the success of this conference.
Ion Implantation Techniques
DOWNLOAD
Author : H. Ryssel
language : en
Publisher: Springer
Release Date : 1982-09
Ion Implantation Techniques written by H. Ryssel and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 1982-09 with Science categories.
In recent years, ion implantation has developed into the major doping technique for integrated circuits. Several series of conferences have dealt with the application of ion implantation to semiconductors and other materials (Thousand Oaks 1970, Garmisch-Partenkirchen 1971, Osaka 1974, Warwick 1975, Boulder 1976, Budapest 1978, and Albany 1980). Another series of conferences was devoted more to implantation equipment and tech niques (Salford 1977, Trento 1978, and Kingston 1980). In connection with the Third International Conference on Ion Implantation: Equipment and Tech niques, held at Queen's University,' Kingston, Ontario, Canada, July 8-11, 1980, a two-day instructional program was organized parallel to an implan tation conference for the first time. This implantation school concentra ted on aspects of implantation-equipment design. This book contains all lectures presented at the International Ion Implantation School organized in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, held at the Convention Center, Berchtesgaden, Germany, September 13-17, 1982. In con trast to the first .school, the main emphasis in thiS school was placed on practical aspects of implanter operation and application. In three chap ters, various machine aspects of ion implantation (general concepts, ion sources, safety, calibration, dOSimetry), range distributions (stopping power, range profiles), and measuring techniques (electrical and nonelec tri ca 1 measu ri ng techni ques, annea 1 i ng) are di scussed. In the appendi x, a review of the state of the art in modern implantation equipment is given.
Ion Implantation Equipment And Techniques Proceedings Of The International Conference On Ion Implantation Equipment And Techniques
DOWNLOAD
Author :
language : en
Publisher:
Release Date : 1981
Ion Implantation Equipment And Techniques Proceedings Of The International Conference On Ion Implantation Equipment And Techniques written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1981 with categories.
Ion Implantation Equipment And Techniques Proceedings Of The International Conference 2
DOWNLOAD
Author :
language : en
Publisher:
Release Date : 1979
Ion Implantation Equipment And Techniques Proceedings Of The International Conference 2 written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1979 with categories.
Ion Implantation Equipment And Techniques Proceedings Of The International Conference 3
DOWNLOAD
Author :
language : en
Publisher:
Release Date : 1981
Ion Implantation Equipment And Techniques Proceedings Of The International Conference 3 written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1981 with categories.
Ion Implantation Equipment And Techniques Proceedings Of The International Conference 5
DOWNLOAD
Author :
language : en
Publisher:
Release Date : 1985
Ion Implantation Equipment And Techniques Proceedings Of The International Conference 5 written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1985 with categories.
Ion Implantation Equipment And Techniques
DOWNLOAD
Author :
language : en
Publisher:
Release Date :
Ion Implantation Equipment And Techniques written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on with categories.
Ion Implantation Equipment And Techniques
DOWNLOAD
Author : J.F. Ziegler
language : en
Publisher:
Release Date :
Ion Implantation Equipment And Techniques written by J.F. Ziegler and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on with categories.
Ion Implantation Science And Technology
DOWNLOAD
Author : J.F. Ziegler
language : en
Publisher: Elsevier
Release Date : 2012-12-02
Ion Implantation Science And Technology written by J.F. Ziegler and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-02 with Science categories.
Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. The book is divided into two parts. Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of energetic ions into solids; damage annealing in silicon; and ion implantation metallurgy. Part 2 covers areas such as ion implementation system concepts; ion sources; underlying principles related to ion optics; and safety and radiation considerations in ion implantation. The text is recommended for engineers who would like to be acquainted with the principles and processes behind ion implantation or make studies on the field.
Ion Implantation Equipment And Techniques
DOWNLOAD
Author : Charles M. McKenna
language : en
Publisher:
Release Date : 1981
Ion Implantation Equipment And Techniques written by Charles M. McKenna and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1981 with Ion implantation categories.