Low Temperature Polycrystalline Silicon Thin Films And Thin Film Transistors
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Low Temperature Polycrystalline Silicon Thin Films And Thin Film Transistors
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Author : Junfeng Li
language : en
Publisher:
Release Date : 2006
Low Temperature Polycrystalline Silicon Thin Films And Thin Film Transistors written by Junfeng Li and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with Polycrystals categories.
Thin Film Transistors Polycrystalline Silicon Thin Film Transistors
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Author : Yue Kuo
language : en
Publisher: Springer Science & Business Media
Release Date : 2004
Thin Film Transistors Polycrystalline Silicon Thin Film Transistors written by Yue Kuo and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Thin film transistors categories.
This is the first reference on amorphous silicon and polycrystalline silicon thin film transistors that gives a systematic global review of all major topics in the field. These volumes include sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes (structures, a-Si: H, dielectric, metallization, catalytic CVD), and existing and new applications. The chapters are written by leading researchers who have extensive experience with reputed track records. Thin Film Transistors provides practical information on preparing individual functional a-Si: H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si: H TFT operations and unique material characteristics. Readers are also exposed to a wide range of existing and new applications in industries.
Study Of Low Temperature Spc Laser Polycrystalline Silicon Films And Its Application Of Thin Film Transistors
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Author : 蔡明良 (電子工程)
language : en
Publisher:
Release Date : 2001
Study Of Low Temperature Spc Laser Polycrystalline Silicon Films And Its Application Of Thin Film Transistors written by 蔡明良 (電子工程) and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with categories.
Poly Silicon Thin Film Transistor Technology And Applications In Display And Other Novel Technology Areas
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Author : Apostolos T. Voutsas
language : en
Publisher: SPIE-International Society for Optical Engineering
Release Date : 2003
Poly Silicon Thin Film Transistor Technology And Applications In Display And Other Novel Technology Areas written by Apostolos T. Voutsas and has been published by SPIE-International Society for Optical Engineering this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with Science categories.
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Densification Effects In Diethylsilane Based Low Temperature Silicon Oxide Films And A Novel Hydrogenation Process For Polycrystalline Silicon Thin Film Transistors
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Author : Danny Li-Ping Chen
language : en
Publisher:
Release Date : 2000
Densification Effects In Diethylsilane Based Low Temperature Silicon Oxide Films And A Novel Hydrogenation Process For Polycrystalline Silicon Thin Film Transistors written by Danny Li-Ping Chen and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with categories.
Thin Film Transistor Technologies V
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Author : Yue Kuo
language : en
Publisher: The Electrochemical Society
Release Date : 2001
Thin Film Transistor Technologies V written by Yue Kuo and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Technology & Engineering categories.
Proceedings Of The Second Symposium On Thin Film Transistor Technologies
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Author : Yue Kuo
language : en
Publisher: The Electrochemical Society
Release Date : 1995
Proceedings Of The Second Symposium On Thin Film Transistor Technologies written by Yue Kuo and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Technology & Engineering categories.
Thin Film Transistors 10 Tft 10
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Author : Y. Kuo
language : en
Publisher: The Electrochemical Society
Release Date : 2010-10
Thin Film Transistors 10 Tft 10 written by Y. Kuo and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-10 with Science categories.
This special issue of ECS Transactions is for the 20th anniversary of the Thin Film Transistor (TFT) symposium series. Renowned TFT experts in related materials, processes, devices, and applications from the world serve as invited speakers to review the technology and science progress in the past two decades. Selected contributed papers are also included in this issue.
Investigation On Solid Phase Crystallization Techniques For Low Temperature Polysilicon Thin Film Transistors
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Author : Qinglong Li
language : en
Publisher:
Release Date : 2013
Investigation On Solid Phase Crystallization Techniques For Low Temperature Polysilicon Thin Film Transistors written by Qinglong Li and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013 with Annealing of crystals categories.
"Low-temperature polysilicon (LTPS) has emerged as a dominant technology for high performance thin-film transistors (TFTs) used in mobile liquid crystal display (LCD) and organic light emitting diode (OLED) display products. As users demand higher quality in flat panel displays with a larger viewing area and finer resolution, the improvement in carrier mobility of LTPS compared to that of hydrogenated amorphous silicon (a-Si:H) makes it an excellent candidate as a channel material for TFT. Advantages include improvements in switching speed and the ability to incorporate peripheral scan and data driver circuitry onto a low cost display substrate. Solid-phase crystallization (SPC) is a useful technique to realize polysilicon films due to its simplicity and low cost compared to excimer-laser annealing (ELA),which has many challenges in back-plane manufacturing on large glass panels.Metal induced crystallization (MIC) results in polycrystalline silicon films with grain size as large as tens of microns. Flash-lamp annealing (FLA) is a new and novel method to crystallize a-Si films at high temperature without distortion of the glass substrate by performing an annealing within millisecond range.This work investigates SPC, MIC and FLA techniques to realize LTPS films. In addition, TFTs were designed and fabricated to characterize the device quality of the semiconductor layer, and to compare the performance of different structural arrangements."--Abstract.
Polycrystalline Silicon For Integrated Circuits And Displays
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Author : Ted Kamins
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Polycrystalline Silicon For Integrated Circuits And Displays written by Ted Kamins and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Technology & Engineering categories.
Polycrystalline Silicon for Integrated Circuits and Displays, Second Edition presents much of the available knowledge about polysilicon. It represents an effort to interrelate the deposition, properties, and applications of polysilicon. By properly understanding the properties of polycrystalline silicon and their relation to the deposition conditions, polysilicon can be designed to ensure optimum device and integrated-circuit performance. Polycrystalline silicon has played an important role in integrated-circuit technology for two decades. It was first used in self-aligned, silicon-gate, MOS ICs to reduce capacitance and improve circuit speed. In addition to this dominant use, polysilicon is now also included in virtually all modern bipolar ICs, where it improves the basic physics of device operation. The compatibility of polycrystalline silicon with subsequent high-temperature processing allows its efficient integration into advanced IC processes. This compatibility also permits polysilicon to be used early in the fabrication process for trench isolation and dynamic random-access-memory (DRAM) storage capacitors. In addition to its integrated-circuit applications, polysilicon is becoming vital as the active layer in the channel of thin-film transistors in place of amorphous silicon. When polysilicon thin-film transistors are used in advanced active-matrix displays, the peripheral circuitry can be integrated into the same substrate as the pixel transistors. Recently, polysilicon has been used in the emerging field of microelectromechanical systems (MEMS), especially for microsensors and microactuators. In these devices, the mechanical properties, especially the stress in the polysilicon film, are critical to successful device fabrication. Polycrystalline Silicon for Integrated Circuits and Displays, Second Edition is an invaluable reference for professionals and technicians working with polycrystalline silicon in the integrated circuit and display industries.