Mechanical Microsensors
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Mechanical Microsensors
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Author : M. Elwenspoek
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Mechanical Microsensors written by M. Elwenspoek and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Technology & Engineering categories.
This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).
Mechanical Microsensors
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Author : Miko Elwenspoek
language : en
Publisher: Springer Science & Business Media
Release Date : 2001-01-12
Mechanical Microsensors written by Miko Elwenspoek and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001-01-12 with Science categories.
This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors requires interdisciplinary teamwork, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. The reader is guided through the micromachining fabrication process. A chapter on microsensor packaging completes the discussion of technological problems. The description of the basic physics required for sensor design includes the mechanics of deformation and the piezoresistive transduction to electrical signals. There is also a comprehensive discussion of resonant sensors, the hydrodynamics and heat transfer relevant for flow sensors, and, finally, electronic interfacing and readout circuitry. Numerous up-to-date case studies are presented, together with the working, fabrication and design of the sensors.
Mems Mechanical Sensors
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Author : Stephen Beeby
language : en
Publisher: Artech House
Release Date : 2004
Mems Mechanical Sensors written by Stephen Beeby and has been published by Artech House this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Technology & Engineering categories.
Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.
Sensors And Measurement Systems
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Author : Walter Lang
language : en
Publisher: CRC Press
Release Date : 2022-09-01
Sensors And Measurement Systems written by Walter Lang and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-09-01 with Science categories.
Sensors and measurement systems is an introduction to microsensors for engineering students in the final undergraduate or early graduate level, technicians who wants to know more about the systems they are using, and anybody curious enough to know what microsystems and microsensors can do. The book discusses five families of sensors: - Thermal sensors - Force and pressure sensors- Inertial sensors - Magnetic field sensors- Flow sensorsFor each sensor, theoretical, technology and application aspects are examined. The sensor function is modelled to understand sensitivity, resolution and noise. We ask ourselves: What do we want to measure? What are possible applications? How are the sensor chips made in the cleanroom? How are they mounted and integrated in a system?After reading this book, you should be able to:- Understand important thermal, mechanical, inertial and magnetic sensors- Work with characterization parameters for sensors- Choose sensors for a given application and apply them- Understand micromachining technologies for sensors
Sensors Mechanical Sensors
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Author : Wolfgang Göpel
language : en
Publisher: John Wiley & Sons
Release Date : 2008-11-20
Sensors Mechanical Sensors written by Wolfgang Göpel and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-11-20 with Technology & Engineering categories.
'Sensors' is the first self-contained series to deal with the wholearea of sensors. It describes general aspects, technical andphysical fundamentals, construction, function, applications anddevelopments of the various types of sensors. This volume contains the physical and technical fundamentals ofmechanical sensors, and contains and assesses the various types ofsensors for particular applications. Of interest to engineers,physicists, chemists and others involved in sensor technology.
Microactuators Microsensors And Micromechanisms
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Author : Lena Zentner
language : en
Publisher: Springer Nature
Release Date : 2020-10-13
Microactuators Microsensors And Micromechanisms written by Lena Zentner and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-10-13 with Technology & Engineering categories.
This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).
Micro Mechanical Transducers
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Author : Min-hang Bao
language : en
Publisher: Elsevier
Release Date : 2000-10-16
Micro Mechanical Transducers written by Min-hang Bao and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000-10-16 with Science categories.
Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.
Mems A Practical Guide Of Design Analysis And Applications
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Author : Jan Korvink
language : en
Publisher: Springer Science & Business Media
Release Date : 2010-05-28
Mems A Practical Guide Of Design Analysis And Applications written by Jan Korvink and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-05-28 with Technology & Engineering categories.
MEMS are rapidly moving from the research laboratory to the mar ketplace. Many market studies indicate not only a tremendous market potential of MEMS devices; year by year we see the actual market grow as the technology matures. In fact, these days, many large silicon foundries have a MEMS group exploring this promising technology, including such giants as INTEL and Motorola. Yet MEMS are fundamentally different from microelectronics. This means that companies with an established track record in these branches need to adapt their skills, whereas companies that want to enter the "miniaturization" market need to establish an entirely new set of capabil ities. The same can be said of engineers with classical training, who will also need to be educated toward their future professional activity in the MEMS field. Here are some questions that a company or technologist may ask: I have an existing product with miniaturization market poten tial. Which technology should I adopt? What are the manufacturing options available for miniaturiza tion? What are the qualitative differences? How do we maintainamarketleadforproductsbased onMEMS? Is there CAD support?Can we outsource manufacturing? Which skills in our current capability need only adaptation? What skills need to be added? Professors Jan Korvink and Oliver Paul have set out to answer these questions in a form that addresses the needs of companies, commercial practitioners, and technologists.
Introduction To Instrumentation And Measurements
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Author : Robert B. Northrop
language : en
Publisher: CRC Press
Release Date : 2018-09-03
Introduction To Instrumentation And Measurements written by Robert B. Northrop and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-09-03 with Technology & Engineering categories.
Weighing in on the growth of innovative technologies, the adoption of new standards, and the lack of educational development as it relates to current and emerging applications, the third edition of Introduction to Instrumentation and Measurements uses the authors’ 40 years of teaching experience to expound on the theory, science, and art of modern instrumentation and measurements (I&M). What’s New in This Edition: This edition includes material on modern integrated circuit (IC) and photonic sensors, micro-electro-mechanical (MEM) and nano-electro-mechanical (NEM) sensors, chemical and radiation sensors, signal conditioning, noise, data interfaces, and basic digital signal processing (DSP), and upgrades every chapter with the latest advancements. It contains new material on the designs of micro-electro-mechanical (MEMS) sensors, adds two new chapters on wireless instrumentation and microsensors, and incorporates extensive biomedical examples and problems. Containing 13 chapters, this third edition: Describes sensor dynamics, signal conditioning, and data display and storage Focuses on means of conditioning the analog outputs of various sensors Considers noise and coherent interference in measurements in depth Covers the traditional topics of DC null methods of measurement and AC null measurements Examines Wheatstone and Kelvin bridges and potentiometers Explores the major AC bridges used to measure inductance, Q, capacitance, and D Presents a survey of sensor mechanisms Includes a description and analysis of sensors based on the giant magnetoresistive effect (GMR) and the anisotropic magnetoresistive (AMR) effect Provides a detailed analysis of mechanical gyroscopes, clinometers, and accelerometers Contains the classic means of measuring electrical quantities Examines digital interfaces in measurement systems Defines digital signal conditioning in instrumentation Addresses solid-state chemical microsensors and wireless instrumentation Introduces mechanical microsensors (MEMS and NEMS) Details examples of the design of measurement systems Introduction to Instrumentation and Measurements is written with practicing engineers and scientists in mind, and is intended to be used in a classroom course or as a reference. It is assumed that the reader has taken core EE curriculum courses or their equivalents.
Microsystems And Nanotechnology
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Author : Zhaoying Zhou
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-08-30
Microsystems And Nanotechnology written by Zhaoying Zhou and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-08-30 with Technology & Engineering categories.
“Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.