Mems
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Mems Packaging
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Author : Tai-Ran Hsu
language : en
Publisher: IET
Release Date : 2004
Mems Packaging written by Tai-Ran Hsu and has been published by IET this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Technology & Engineering categories.
This book covers the entire spectrum of assembly, packaging and testing of MEMs (microelectro-mechanical systems) and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering.
Mems And Nanotechnology Based Sensors And Devices For Communications Medical And Aerospace Applications
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Author : A. R. Jha
language : en
Publisher: CRC Press
Release Date : 2008-04-08
Mems And Nanotechnology Based Sensors And Devices For Communications Medical And Aerospace Applications written by A. R. Jha and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-04-08 with Technology & Engineering categories.
The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applications. MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications presents the latest performance parameters and experimental data of state-of-the-art sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. Some of the cutting-edge materials covered include quantum dots, nanoparticles, photonic crystals, and carbon nanotubes (CNTs). This comprehensive work encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.
Mems Reliability
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Author : Allyson L. Hartzell
language : en
Publisher: Springer Science & Business Media
Release Date : 2010-11-02
Mems Reliability written by Allyson L. Hartzell and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-11-02 with Technology & Engineering categories.
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
Handbook Of Silicon Based Mems Materials And Technologies
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Author : Markku Tilli
language : en
Publisher: Elsevier
Release Date : 2009-12-08
Handbook Of Silicon Based Mems Materials And Technologies written by Markku Tilli and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-12-08 with Technology & Engineering categories.
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Rf Mems Circuit Design For Wireless Communications
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Author : Héctor J. de los Santos
language : en
Publisher: Artech House
Release Date : 2002
Rf Mems Circuit Design For Wireless Communications written by Héctor J. de los Santos and has been published by Artech House this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002 with Computers categories.
This is the first comprehensive book to address the design of RF MEMS-based circuits for use in high performance wireless systems. A groundbreaking research and reference tool, the book enables you to understand the realm of applications of RF MEMS technology; become knowledgeable of the wide variety and performance levels of RF MEMS devices; and partition the architecture of wireless systems to achieve greater levels of performance. This innovative resource also guides you through the design process of RF MEMS-based circuits, and establishes a practical knowledge base for the design of high-yield RF MEMS-based circuits. The book features exercises and detailed case studies on working RF MEMS circuits that help you decide what approaches best fit your design constraints. This unified treatment of RF MEMS-based circuit technology opens up a new world of solutions for meeting the unique challenges of low power/portable wireless products.
Rf Mems
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Author : Gabriel M. Rebeiz
language : en
Publisher: John Wiley & Sons
Release Date : 2004-02-06
Rf Mems written by Gabriel M. Rebeiz and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004-02-06 with Technology & Engineering categories.
Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.
Mems Materials And Processes Handbook
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Author : Reza Ghodssi
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-03-18
Mems Materials And Processes Handbook written by Reza Ghodssi and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-03-18 with Technology & Engineering categories.
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Mems Vibratory Gyroscopes
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Author : Cenk Acar
language : en
Publisher: Springer Science & Business Media
Release Date : 2008-12-16
Mems Vibratory Gyroscopes written by Cenk Acar and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-12-16 with Technology & Engineering categories.
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
Mems And Moems Technology And Applications
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Author : P. Rai-Choudhury
language : en
Publisher: SPIE Press
Release Date : 2000
Mems And Moems Technology And Applications written by P. Rai-Choudhury and has been published by SPIE Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Technology & Engineering categories.
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
Electrochemical Processes In Ulsi And Mems
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Author : Hariklia Deligianni
language : en
Publisher: The Electrochemical Society
Release Date : 2005
Electrochemical Processes In Ulsi And Mems written by Hariklia Deligianni and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Computers categories.