Mems Vibratory Gyroscopes
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Mems Vibratory Gyroscopes
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Author : Cenk Acar
language : en
Publisher: Springer Science & Business Media
Release Date : 2008-12-16
Mems Vibratory Gyroscopes written by Cenk Acar and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-12-16 with Technology & Engineering categories.
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
Mems Vibratory Gyroscopes
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Author : Cenk Acar
language : en
Publisher:
Release Date : 2008
Mems Vibratory Gyroscopes written by Cenk Acar and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008 with Gyroscopes categories.
Cylindrical Vibratory Gyroscope
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Author : Xuezhong Wu
language : en
Publisher: Springer Nature
Release Date : 2021-06-19
Cylindrical Vibratory Gyroscope written by Xuezhong Wu and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-06-19 with Technology & Engineering categories.
This book introduces readers to the shell structure, operating principle, manufacturing process, and control theory for cylindrical vibratory gyroscopes. The cylindrical vibratory gyroscope is an important type of Coriolis vibratory gyroscope that holds considerable potential for development and application. The main aspects addressed include: operating principle and structure, theoretical analysis and modeling, dynamic analysis and modeling, manufacturing process, parameter testing methods, closed-loop control, and the error compensation mechanism in cylindrical vibratory gyroscopes.
Advanced Control Design Of Mems Vibratory Gyroscopes
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Author : Juntao Fei
language : en
Publisher:
Release Date : 2011-10
Advanced Control Design Of Mems Vibratory Gyroscopes written by Juntao Fei and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-10 with Accelerometers categories.
MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophisticated devices. Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control stabilisation. Fabrication imperfections and thermal, mechanical noise may hinder the measurement of angular velocity of MEMS gyroscope. This book presents a comprehensive treatment of the analysis and advanced control design of MEMS gyroscope for the problem of angular velocity measurement and minimisation of the cross coupling between two axes.
Mems Nems
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Author : Cornelius T. Leondes
language : en
Publisher: Springer Science & Business Media
Release Date : 2007-10-08
Mems Nems written by Cornelius T. Leondes and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-10-08 with Technology & Engineering categories.
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Vibratory Gyroscopes Based On Micro Electro Mechanical And Non Micro Electro Mechanical Systems
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Author : Valeri V. Chikovani
language : en
Publisher: Cambridge Scholars Publishing
Release Date : 2023-12-15
Vibratory Gyroscopes Based On Micro Electro Mechanical And Non Micro Electro Mechanical Systems written by Valeri V. Chikovani and has been published by Cambridge Scholars Publishing this book supported file pdf, txt, epub, kindle and other format this book has been release on 2023-12-15 with Technology & Engineering categories.
This book provides a unified approach for the two versions of Coriolis vibratory gyroscopes: Micro-Electro-Mechanical System (MEMS) and non-MEMS. It describes a new, differential mode of operation, analyzing the new triple mode gyro—rate, rate-integrating, and differential. The latter provides the gyro with an increased versatility by providing the maximum possible accuracy under changeable motion parameters and environmental conditions. The book also presents computer simulation, experiments, and test results on the rejection of external disturbances, and considers the fabrication processes of MEMS, metallic and quartz resonators. It will interest researchers, scientists, engineers, and students specializing in the field of inertial sensors, as well as engineers of digital control systems, and inertial sensors test-engineers. It can also be used as a reference book when designing vibratory gyros.
Adaptive Sliding Mode Control With Application To A Mems Vibratory Gyroscope
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Author : Juntao Fei
language : en
Publisher:
Release Date : 2007
Adaptive Sliding Mode Control With Application To A Mems Vibratory Gyroscope written by Juntao Fei and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007 with Gyroscopes categories.
"Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control stabilization. Vibratory gyroscopes are the devices that transfer energy from one axis to the other through Coriolis forces. Fabrication imperfections result in some cross stiffness and cross damping effects that may hinder the measurement of angular velocity of MEMS gyroscope. Other noise sources such as thermal, mechanical noise also affect the performance. The angular velocity measurement and minimization of the cross coupling between two axes are challenging problems in the control of vibrating gyroscopes. This dissertation develops adaptive sliding mode control strategies for a MEMS z-axis gyroscope. The proposed adaptive sliding mode controllers for MEMS z-axis gyroscope make real-time estimates of the angular velocity as well as all unknown gyroscope parameters including coupling stiffness and damping parameters. Therefore, fabrication imperfection and time varying noise and disturbance can be compensated for. These estimates are updated using the tracking error between the reference model trajectory and mass' real trajectory. The reference model trajectory is designed to satisfy the persistence of excitation condition to enable parameter estimates to converge to their true values. The indirect adaptive sliding mode controller and direct adaptive sliding mode controller with proportional and integral sliding surface are proposed for MEMS gyroscope. In the presence of unmeasured velocity states, an adaptive sliding mode controller with a sliding mode observer that can reconstruct the unmeasured states is developed to estimate the angular velocity and the linear damping and stiffness coefficients of the gyroscope in real time despite parameter variations and external disturbance. Moreover, the adaptive sliding mode control for two axes angular sensor is extended to triaxial angular sensor and a novel concept for an adaptively controlled triaxial angular velocity sensor device that is able to detect rotation in the three orthogonal axes, using a single vibrating mass is proposed. The numerical simulations of MEMS gyroscope show the effectiveness of all the proposed adaptive sliding mode control schemes. It is shown that the proposed adaptive sliding mode control schemes offer several advantages such as consistent estimates of gyroscope parameters including angular velocity and large robustness to parameter variations and disturbance."--Abstract.
Coriolis Vibratory Gyroscopes
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Author : Vladislav Apostolyuk
language : en
Publisher: Springer
Release Date : 2015-08-12
Coriolis Vibratory Gyroscopes written by Vladislav Apostolyuk and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-08-12 with Technology & Engineering categories.
This book provides the latest theoretical analysis and design methodologies of different types of Coriolis vibratory gyroscopes (CVG). Together, the chapters analyze different types of sensitive element designs and their kinematics, derivation of motion equations, analysis of sensitive elements dynamics in modulated and demodulated signals, calculation and optimization of main performance characteristics, and signal processing and control. Essential aspects of numerical simulation of CVG using Simulink® are also covered. This is an ideal book for graduate students, researchers, and engineers working in fields that require gyroscope application, including but not limited to: inertial sensors and systems, automotive and consumer electronics, small unmanned aircraft control systems, personal mobile navigation systems and related software development, and augmented and virtual reality systems.
Modelling Of Mems Vibratory Gyroscopes Utilizing Phase Detection
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Author : Antonie Christoffel Dreyer
language : en
Publisher:
Release Date : 2008
Modelling Of Mems Vibratory Gyroscopes Utilizing Phase Detection written by Antonie Christoffel Dreyer and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008 with Gyroscopes categories.
Dual Mass Linear Vibration Silicon Based Mems Gyroscope
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Author : Huiliang Cao
language : en
Publisher: Springer Nature
Release Date : 2023-04-17
Dual Mass Linear Vibration Silicon Based Mems Gyroscope written by Huiliang Cao and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2023-04-17 with Technology & Engineering categories.
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.