Advanced Control Design Of Mems Vibratory Gyroscopes
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Advanced Control Design Of Mems Vibratory Gyroscopes
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Author : Juntao Fei
language : en
Publisher:
Release Date : 2011-10
Advanced Control Design Of Mems Vibratory Gyroscopes written by Juntao Fei and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-10 with Accelerometers categories.
MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophisticated devices. Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control stabilisation. Fabrication imperfections and thermal, mechanical noise may hinder the measurement of angular velocity of MEMS gyroscope. This book presents a comprehensive treatment of the analysis and advanced control design of MEMS gyroscope for the problem of angular velocity measurement and minimisation of the cross coupling between two axes.
Dual Mass Linear Vibration Silicon Based Mems Gyroscope
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Author : Huiliang Cao
language : en
Publisher: Springer Nature
Release Date : 2023-04-17
Dual Mass Linear Vibration Silicon Based Mems Gyroscope written by Huiliang Cao and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2023-04-17 with Technology & Engineering categories.
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Iutam Symposium On Nonlinear Dynamics For Advanced Technologies And Engineering Design
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Author : Marian Wiercigroch
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-01-11
Iutam Symposium On Nonlinear Dynamics For Advanced Technologies And Engineering Design written by Marian Wiercigroch and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-01-11 with Technology & Engineering categories.
Nonlinear dynamics has been enjoying a vast development for nearly four decades resulting in a range of well established theory, with the potential to significantly enhance performance, effectiveness, reliability and safety of physical systems as well as offering novel technologies and designs. By critically appraising the state of the art, it is now time to develop design criteria and technology for new generation products/processes operating on principles of nonlinear interaction and in the nonlinear regime, leading to more effective, sensitive, accurate, and durable methods than what is currently available. This new approach is expected to radically influence the design, control and exploitation paradigms, in a magnitude of contexts. With a strong emphasis on experimentally calibrated and validated models, contributions by top-level international experts will foster future directions for the development of engineering technologies and design using robust nonlinear dynamics modelling and analysis.
Mems Vibratory Gyroscopes
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Author : Cenk Acar
language : en
Publisher: Springer Science & Business Media
Release Date : 2008-12-16
Mems Vibratory Gyroscopes written by Cenk Acar and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-12-16 with Technology & Engineering categories.
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
Mems Sensors
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Author : Siva Yellampalli
language : en
Publisher: BoD – Books on Demand
Release Date : 2018-07-18
Mems Sensors written by Siva Yellampalli and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-07-18 with Technology & Engineering categories.
MEMS by becoming a part of various applications ranging from smartphones to automobiles has become an integral part of our everyday life. MEMS is building synergy between previously unrelated fields such as biology, microelectronics and communications, to improve the quality of human life. The sensors in MEMS gather information from the surrounding, which is then processed by the electronics for decision-making to control the environment. MEMS offers opportunities to miniaturize devices, integrate them with electronics and realize cost savings through batch fabrication. MEMS technology has enhanced many important applications in domains such as consumer electronics, biotechnology and communication and it holds great promise for continued contributions in the future. This book focuses on understanding the design, development and various applications of MEMS sensors.
Coriolis Vibratory Gyroscopes
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Author : Vladislav Apostolyuk
language : en
Publisher: Springer
Release Date : 2015-08-12
Coriolis Vibratory Gyroscopes written by Vladislav Apostolyuk and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-08-12 with Technology & Engineering categories.
This book provides the latest theoretical analysis and design methodologies of different types of Coriolis vibratory gyroscopes (CVG). Together, the chapters analyze different types of sensitive element designs and their kinematics, derivation of motion equations, analysis of sensitive elements dynamics in modulated and demodulated signals, calculation and optimization of main performance characteristics, and signal processing and control. Essential aspects of numerical simulation of CVG using Simulink® are also covered. This is an ideal book for graduate students, researchers, and engineers working in fields that require gyroscope application, including but not limited to: inertial sensors and systems, automotive and consumer electronics, small unmanned aircraft control systems, personal mobile navigation systems and related software development, and augmented and virtual reality systems.
Advanced Materials And Technologies For Micro Nano Devices Sensors And Actuators
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Author : Evgeni Gusev
language : en
Publisher: Springer
Release Date : 2010-03-03
Advanced Materials And Technologies For Micro Nano Devices Sensors And Actuators written by Evgeni Gusev and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-03-03 with Technology & Engineering categories.
A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
Cylindrical Vibratory Gyroscope
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Author : Xuezhong Wu
language : en
Publisher: Springer Nature
Release Date : 2021-06-19
Cylindrical Vibratory Gyroscope written by Xuezhong Wu and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-06-19 with Technology & Engineering categories.
This book introduces readers to the shell structure, operating principle, manufacturing process, and control theory for cylindrical vibratory gyroscopes. The cylindrical vibratory gyroscope is an important type of Coriolis vibratory gyroscope that holds considerable potential for development and application. The main aspects addressed include: operating principle and structure, theoretical analysis and modeling, dynamic analysis and modeling, manufacturing process, parameter testing methods, closed-loop control, and the error compensation mechanism in cylindrical vibratory gyroscopes.
Micromanufacturing And Nanotechnology
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Author : Nitaigour P. Mahalik
language : en
Publisher: Springer Science & Business Media
Release Date : 2006
Micromanufacturing And Nanotechnology written by Nitaigour P. Mahalik and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with Science categories.
Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.
System Level Modeling Of Mems
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Author : Oliver Brand
language : en
Publisher: John Wiley & Sons
Release Date : 2012-12-20
System Level Modeling Of Mems written by Oliver Brand and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-20 with Technology & Engineering categories.
System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.