Dual Mass Linear Vibration Silicon Based Mems Gyroscope
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Dual Mass Linear Vibration Silicon Based Mems Gyroscope
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Author : Huiliang Cao
language : en
Publisher: Springer Nature
Release Date : 2023-04-17
Dual Mass Linear Vibration Silicon Based Mems Gyroscope written by Huiliang Cao and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2023-04-17 with Technology & Engineering categories.
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Microactuators Microsensors And Micromechanisms
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Author : Duc-Nam Nguyen
language : en
Publisher: Springer Nature
Release Date : 2025-03-07
Microactuators Microsensors And Micromechanisms written by Duc-Nam Nguyen and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2025-03-07 with Technology & Engineering categories.
This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The book gathers the contributions presented at the 7th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ho Chi Minh City, Vietnam, in November 2024. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of International Federation for the Promotion of Mechanism and Machine Science (IFToMM).
Microsensors
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Author : Oleg Minin
language : en
Publisher: BoD – Books on Demand
Release Date : 2011-06-09
Microsensors written by Oleg Minin and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-06-09 with Technology & Engineering categories.
This book is planned to publish with an objective to provide a state-of-art reference book in the area of microsensors for engineers, scientists, applied physicists and post-graduate students. Also the aim of the book is the continuous and timely dissemination of new and innovative research and developments in microsensors. This reference book is a collection of 13 chapters characterized in 4 parts: magnetic sensors, chemical, optical microsensors and applications. This book provides an overview of resonant magnetic field microsensors based on MEMS, optical microsensors, the main design and fabrication problems of miniature sensors of physical, chemical and biochemical microsensors, chemical microsensors with ordered nanostructures, surface-enhanced Raman scattering microsensors based on hybrid nanoparticles, etc. Several interesting applications area are also discusses in the book like MEMS gyroscopes for consumer and industrial applications, microsensors for non invasive imaging in experimental biology, a heat flux microsensor for direct measurements in plasma surface interactions and so on.
Mems Vibratory Gyroscopes
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Author : Cenk Acar
language : en
Publisher: Springer Science & Business Media
Release Date : 2008-12-16
Mems Vibratory Gyroscopes written by Cenk Acar and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-12-16 with Technology & Engineering categories.
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
Mems Accelerometers
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Author : Mahmoud Rasras
language : en
Publisher: MDPI
Release Date : 2019-05-27
Mems Accelerometers written by Mahmoud Rasras and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-05-27 with Technology & Engineering categories.
Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.
Frattura Ed Integrit Strutturale Annals 2014
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Author : Luca Susmel
language : en
Publisher: Gruppo Italiano Frattura
Release Date : 2014-09-12
Frattura Ed Integrit Strutturale Annals 2014 written by Luca Susmel and has been published by Gruppo Italiano Frattura this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-09-12 with Technology & Engineering categories.
Mems Sensors
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Author : Siva Yellampalli
language : en
Publisher: BoD – Books on Demand
Release Date : 2018-07-18
Mems Sensors written by Siva Yellampalli and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-07-18 with Technology & Engineering categories.
MEMS by becoming a part of various applications ranging from smartphones to automobiles has become an integral part of our everyday life. MEMS is building synergy between previously unrelated fields such as biology, microelectronics and communications, to improve the quality of human life. The sensors in MEMS gather information from the surrounding, which is then processed by the electronics for decision-making to control the environment. MEMS offers opportunities to miniaturize devices, integrate them with electronics and realize cost savings through batch fabrication. MEMS technology has enhanced many important applications in domains such as consumer electronics, biotechnology and communication and it holds great promise for continued contributions in the future. This book focuses on understanding the design, development and various applications of MEMS sensors.
Handbook Of Modern Sensors
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Author : Jacob Fraden
language : en
Publisher: Springer Science & Business Media
Release Date : 2006-04-29
Handbook Of Modern Sensors written by Jacob Fraden and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-04-29 with Technology & Engineering categories.
Seven years have passed since the publication of the previous edition of this book. During that time, sensor technologies have made a remarkable leap forward. The sensitivity of the sensors became higher, the dimensions became smaller, the sel- tivity became better, and the prices became lower. What have not changed are the fundamental principles of the sensor design. They are still governed by the laws of Nature. Arguably one of the greatest geniuses who ever lived, Leonardo Da Vinci, had his own peculiar way of praying. He was saying, “Oh Lord, thanks for Thou do not violate your own laws. ” It is comforting indeed that the laws of Nature do not change as time goes by; it is just our appreciation of them that is being re?ned. Thus, this new edition examines the same good old laws of Nature that are employed in the designs of various sensors. This has not changed much since the previous edition. Yet, the sections that describe the practical designs are revised substantially. Recent ideas and developments have been added, and less important and nonessential designs were dropped. Probably the most dramatic recent progress in the sensor technologies relates to wide use of MEMS and MEOMS (micro-electro-mechanical systems and micro-electro-opto-mechanical systems). These are examined in this new edition with greater detail. This book is about devices commonly called sensors. The invention of a - croprocessor has brought highly sophisticated instruments into our everyday lives.
Mems
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Author : Mohamed Gad-el-Hak
language : en
Publisher: CRC Press
Release Date : 2005-11-29
Mems written by Mohamed Gad-el-Hak and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-11-29 with Technology & Engineering categories.
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection
Global Positioning Systems Inertial Navigation And Integration
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Author : Mohinder S. Grewal
language : en
Publisher: John Wiley & Sons
Release Date : 2007-03-05
Global Positioning Systems Inertial Navigation And Integration written by Mohinder S. Grewal and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-03-05 with Science categories.
An updated guide to GNSS and INS, and solutions to real-world GPS/INS problems with Kalman filtering Written by recognized authorities in the field, this second edition of a landmark work provides engineers, computer scientists, and others with a working familiarity with the theory and contemporary applications of Global Navigation Satellite Systems (GNSS), Inertial Navigational Systems (INS), and Kalman filters. Throughout, the focus is on solving real-world problems, with an emphasis on the effective use of state-of-the-art integration techniques for those systems, especially the application of Kalman filtering. To that end, the authors explore the various subtleties, common failures, and inherent limitations of the theory as it applies to real-world situations, and provide numerous detailed application examples and practice problems, including GNSS-aided INS, modeling of gyros and accelerometers, and SBAS and GBAS. Drawing upon their many years of experience with GNSS, INS, and the Kalman filter, the authors present numerous design and implementation techniques not found in other professional references. This Second Edition has been updated to include: GNSS signal integrity with SBAS Mitigation of multipath, including results Ionospheric delay estimation with Kalman filters New MATLAB programs for satellite position determination using almanac and ephemeris data and ionospheric delay calculations from single and dual frequency data New algorithms for GEO with L1 /L5 frequencies and clock steering Implementation of mechanization equations in numerically stable algorithms To enhance comprehension of the subjects covered, the authors have included software in MATLAB, demonstrating the working of the GNSS, INS, and filter algorithms. In addition to showing the Kalman filter in action, the software also demonstrates various practical aspects of finite word length arithmetic and the need for alternative algorithms to preserve result accuracy.