Mems And Nanotechnology For Gas Sensors
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Mems And Nanotechnology For Gas Sensors
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Author : Sunipa Roy
language : en
Publisher: CRC Press
Release Date : 2017-12-19
Mems And Nanotechnology For Gas Sensors written by Sunipa Roy and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-19 with Technology & Engineering categories.
How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor technology, MEMS and Nanotechnology for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/nanotechnology platform for gas sensor applications. This book outlines the microfabrication technology needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nanocrystalline ZnO-based microfabricated sensors, and nanostructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and nanotechnology in different areas relevant to the sensor domain. In addition, the book includes: An introduction to MEMS for MEMS materials, and a historical background of MEMS A concept for cleanroom technology The substrate materials used for MEMS Two types of deposition techniques, including chemical vapour deposition (CVD) The properties and types of photoresists, and the photolithographic processes Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining The design issues of a microheater for MEMS-based sensors The synthesis technique of a nanocrystalline metal oxide layer A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor Low-cost, low-temperature synthesis techniques An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Nanotechnology for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS technology can be applied in the automotive, consumer, industrial, and biotechnology domains.
Microsystems And Nanotechnology
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Author : Zhaoying Zhou
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-08-30
Microsystems And Nanotechnology written by Zhaoying Zhou and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-08-30 with Technology & Engineering categories.
“Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.
Metal Oxide Nanostructures As Gas Sensing Devices
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Author : G. Eranna
language : en
Publisher: CRC Press
Release Date : 2011-12-19
Metal Oxide Nanostructures As Gas Sensing Devices written by G. Eranna and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-12-19 with Science categories.
Metal Oxide Nanostructures as Gas Sensing Devices explores the development of an integrated micro gas sensor that is based on advanced metal oxide nanostructures and is compatible with modern semiconductor fabrication technology. This sensor can then be used to create a compact, low-power, handheld device for analyzing air ambience. The book first covers current gas sensing tools and discusses the necessity for miniaturized sensors. It then focuses on the materials, devices, and techniques used for gas sensing applications, such as resistance and capacitance variations. The author addresses the issues of sensitivity, concentration, and temperature dependency as well as the response and recovery times crucial for sensors. He also presents techniques for synthesizing different metal oxides, particularly those with nanodimensional structures. The text goes on to highlight the gas sensing properties of many nanostructured metal oxides, from aluminum and cerium to iron and titanium to zinc and zirconium. The final chapters deal with existing and future devices that are based on nanostructures. Miniaturized systems that analyze air ambience need sensors capable of identifying different gaseous species. Exploring state-of-the-art gas sensing devices, this book shows how nanostructured metal oxides are ideally suited for use as gas sensing elements.
Mems And Nanotechnology Based Sensors And Devices For Communications Medical And Aerospace Applications
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Author : A. R. Jha
language : en
Publisher: CRC Press
Release Date : 2008-04-08
Mems And Nanotechnology Based Sensors And Devices For Communications Medical And Aerospace Applications written by A. R. Jha and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-04-08 with Technology & Engineering categories.
The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applications. MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications presents the latest performance parameters and experimental data of state-of-the-art sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. Some of the cutting-edge materials covered include quantum dots, nanoparticles, photonic crystals, and carbon nanotubes (CNTs). This comprehensive work encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.
Advanced Mems Nems Fabrication And Sensors
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Author : Zhuoqing Yang
language : en
Publisher: Springer Nature
Release Date : 2021-10-12
Advanced Mems Nems Fabrication And Sensors written by Zhuoqing Yang and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-10-12 with Technology & Engineering categories.
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
Nanotechnology In Environmental Science
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Author : Chaudhery Mustansar Hussain
language : de
Publisher: John Wiley & Sons
Release Date : 2018-02-05
Nanotechnology In Environmental Science written by Chaudhery Mustansar Hussain and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-02-05 with Technology & Engineering categories.
Ein Überblick über den aktuellen Stand von Geräten, die auf Nanotechnologie basieren und in den Umweltwissenschaften zum Einsatz kommen. Der Fokus liegt dabei auf Nanomaterialien und Polymer-Nanokompositen. Das Handbuch beschäftigt sich insbesondere mit den auf Nanotechnologie basierenden Ansätzen, die einfachere, schnellere und kostengünstigere Prozesse bei der Umweltüberwachung und Umweltsanierung versprechen. Darüber hinaus bietet es aktuelle und detaillierte Informationen zu Ökonomie, Toxizität und Vorschriften in Verbindung mit der Nanotechnologie. Das Buch schließt mit einem Blick auf die Rolle der Nanotechnologie für eine grüne und nachhaltige Zukunft. Für Forscher und Entwickler im akademischen Bereich und aus der Industrie ist dieses Handbuch, das vorhandene und demnächst verfügbare Geräte beschreibt, unabdingbar.
Functional Nanomaterials
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Author : Sabu Thomas
language : en
Publisher: Springer Nature
Release Date : 2020-06-12
Functional Nanomaterials written by Sabu Thomas and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-06-12 with Technology & Engineering categories.
This book provides a comprehensive overview of the current state-of-art in oxide nanostructures, carbon nanostructures and 2D materials fabrication. It covers mimicking of sensing mechanisms and applications in gas sensors. It focuses on gas sensors based on functional nanostructured materials, especially related to issues of sensitivity, selectivity, and temperature dependency for sensors. It covers synthesis, properties, and current gas sensing tools and discusses the necessity for miniaturized sensors. This book will be of use to senior undergraduate and graduate students, professionals, and researchers in the field of solid-state physics, materials science, surface science and chemical engineering.
Semiconductor Gas Sensors
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Author : Raivo Jaaniso
language : en
Publisher: Woodhead Publishing
Release Date : 2019-09-24
Semiconductor Gas Sensors written by Raivo Jaaniso and has been published by Woodhead Publishing this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-09-24 with Technology & Engineering categories.
Semiconductor Gas Sensors, Second Edition, summarizes recent research on basic principles, new materials and emerging technologies in this essential field. Chapters cover the foundation of the underlying principles and sensing mechanisms of gas sensors, include expanded content on gas sensing characteristics, such as response, sensitivity and cross-sensitivity, present an overview of the nanomaterials utilized for gas sensing, and review the latest applications for semiconductor gas sensors, including environmental monitoring, indoor monitoring, medical applications, CMOS integration and chemical warfare agents. This second edition has been completely updated, thus ensuring it reflects current literature and the latest materials systems and applications. - Includes an overview of key applications, with new chapters on indoor monitoring and medical applications - Reviews developments in gas sensors and sensing methods, including an expanded section on gas sensor theory - Discusses the use of nanomaterials in gas sensing, with new chapters on single-layer graphene sensors, graphene oxide sensors, printed sensors, and much more
Development Of Cmos Mems Nems Devices
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Author : Jaume Verd
language : en
Publisher: MDPI
Release Date : 2019-06-25
Development Of Cmos Mems Nems Devices written by Jaume Verd and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-06-25 with Technology & Engineering categories.
Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]
Technology Innovation In Mechanical Engineering
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Author : Prem Kumar Chaurasiya
language : en
Publisher: Springer Nature
Release Date : 2022-04-29
Technology Innovation In Mechanical Engineering written by Prem Kumar Chaurasiya and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-04-29 with Technology & Engineering categories.
This book comprises select papers presented at the conference on Technology Innovation in Mechanical Engineering (TIME-2021). The book discusses the latest innovation and advanced research in the diverse field of Mechanical Engineering such as materials, manufacturing processes, evaluation of materials properties for the application in automotive, aerospace, marine, locomotive and energy sectors. The topics covered include advanced metal forming, Energy Efficient systems, Material Characterization, Advanced metal forming, bending, welding & casting techniques, Composite and Polymer Manufacturing, Intermetallics, Future generation materials, Laser Based Manufacturing, High-Energy Beam Processing, Nano materials, Smart Material, Super Alloys, Powder Metallurgy and Ceramic Forming, Aerodynamics, Biological Heat & Mass Transfer, Combustion & Propulsion, Cryogenics, Fire Dynamics, Refrigeration & Air Conditioning, Sensors and Transducers, Turbulent Flows, Reactive Flows, Numerical Heat Transfer, Phase Change Materials, Micro- and Nano-scale Transport, Multi-phase Flows, Nuclear & Space Applications, Flexible Manufacturing Technology & System, Non-Traditional Machining processes, Structural Strength and Robustness, Vibration, Noise Analysis and Control, Tribology. In addition, it discusses industrial applications and cover theoretical and analytical methods, numerical simulations and experimental techniques in the area of Mechanical Engineering. The book will be helpful for academics, including graduate students and researchers, as well as professionals interested in interdisciplinary topics in the areas of materials, manufacturing, and energy sectors.