Mems Mirrors
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Mems Mirrors
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Author : Huikai Xie
language : en
Publisher: MDPI
Release Date : 2018-05-04
Mems Mirrors written by Huikai Xie and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-05-04 with Electronic books categories.
This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines
Mems Mirrors
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Author : Huikai Xie (Ed.)
language : en
Publisher:
Release Date : 2018
Mems Mirrors written by Huikai Xie (Ed.) and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018 with categories.
MEMS mirrors can steer, modulate and switch light, as well as control the wavefront for focusing or phase modulation. MEMS mirrors have found enormous commercial success in projectors, displays and fiberoptic communications. Micro-spectrometers based on MEMS mirrors are starting to appear in the consumer market. There are also many breakthroughs in applying MEMS mirrors for endoscopic imaging. Equally excitingly, a new wave of opportunities for MEMS mirrors is coming up, for example, micro-LiDAR for autonomous driving and robotics, optical cross connect (OXC) for cloud data centers, and optical scanners for virtual reality/augumented reality, just to name a few. Of course, there are a number of big challenges that researchers and engineers must overcome to fully utiltize MEMS mirrors' potential: modeling and control are inherently complex due to the multiphysics, multi-DOF and nonlinear nature of the microactuators for MEMS mirrors; reliability is always a huge hurdle for commercilization; and the tradeoffs among the speed, aperture, and scan range are often overwhelming. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of MEMS mirrors based on all kinds of actuation mechanisms; and (2) new developments of applying MEMS mirrors of any kind in consumer electronics, optical communications, industry, medicine, agriculture, space, or defense.
Micromachined Mirrors
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Author : Robert Conant
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-04-17
Micromachined Mirrors written by Robert Conant and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-04-17 with Technology & Engineering categories.
Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.
Large Hybrid High Precision Mems Mirrors
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Author : Dara Bayat
language : en
Publisher:
Release Date : 2011
Large Hybrid High Precision Mems Mirrors written by Dara Bayat and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011 with categories.
Static And Electrically Actuated Shaped Mems Mirrors
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Author : Bin Mi
language : en
Publisher:
Release Date : 2004
Static And Electrically Actuated Shaped Mems Mirrors written by Bin Mi and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with categories.
Large Stroke Deformable Mems Mirror For Focus Control
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Author : Seyyed Mohammad Javad Moghimi
language : en
Publisher:
Release Date : 2013
Large Stroke Deformable Mems Mirror For Focus Control written by Seyyed Mohammad Javad Moghimi and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013 with Imaging systems categories.
We developed a novel large-stroke deformable mirror for focus control and spherical aberration correction. The mirrors fabricated using MEMS technology provide full range (150-200 microns in tissue) of focus scanning at high numerical aperture (N.A.=0.5-0.7) for confocal microscopy and optical coherence tomography (OCT). In addition to large stroke, low power consumption and high speed operation are other key factors of the developed devices. The impact of this project is broad since the miniaturized deformable mirrors have a wide range of applications. In addition to focus scanning in microscopes they can also be used in small form factor systems such as cell phone cameras and robot vision. Furthermore, laser based microscopes equipped with the focus control mirror may be useful for skin cancer diagnosis and treatment. This thesis consists of seven chapters. The first chapter introduces optical focus control and focus control elements. The second chapter describes different schemes for optical focus control in imaging systems including transmissive variable lenses. The principle of operation, fabrication, and characterization of electrostatic deformable mirrors are reviewed in Chapter 3. High-speed focus control mirrors with controlled air damping are discussed in Chapter 4. In this chapter a model adopted from the analysis of MEMS microphone is used to design the backplate of a MEMS deformable mirror. Moreover, electrostatic-pneumatic MEMS deformable mirrors are introduced in Chapter 5. Analytical model is developed for electrostatic-pneumatic actuation in order to design a MEMS mirror with two membranes. Applications of MEMS deformable mirrors are demonstrated in optical systems in Chapter 6. Finally, a summary and future work are discussed in Chapter 7. The fabrication process details are given in Appendix A.
Mems Mirrors For Endoscopic Oct
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Author : Jessica Anne Ayers
language : en
Publisher:
Release Date : 2009
Mems Mirrors For Endoscopic Oct written by Jessica Anne Ayers and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009 with categories.
Currently, there are two main ways to obtain a 2D OCT image of tissue surrounding an endoscope. The most commonly used method is a complex gear and shaft assembly which requires precise optical coupling and a metallic reinforcement sleeve. This leads to potential alignment errors and a stiffer than necessary catheter. A 2D OCT image can also be obtained with the use of a commercially available micro-motor placed at the distal imaging end of an endoscope. The micro-motor is almost twice as large as the next largest part of the system. Reduction of the scanner size would lead to an overall reduction in the size of the endoscope which is desirable for minimizing the invasiveness of endoscopy procedures. In order to obtain a 3D OCT image, linear translation needs to be combined with the rotational scan. This is most commonly accomplished with an external motor and leads to increased complexity and potential calibration errors between the linear and rotational scans. The purpose of this work was to design two MEMS mirrors (one for obtaining 2D OCT images and the other for obtaining 3D OCT images) that would reduce the size, stiffness, and complexity of currently available endoscopic OCT systems. For 2D OCT images, the scratch drive array mirror was designed to perform a circumferential scan while fitting inside a 1mm diameter. The device, consisting of a rotary scratch drive array and a polysilicon mirror, was designed to be assembled on top of the motor after fabrication. For 3D OCT images, the paraffin actuated rotational micro-mirror was designed to fit inside a 1 mm diameter and require no external motor to couple linear translation with its rotation. The actuation is initiated by a resistive heater which causes the thermal expansion of paraffin up a channel in which an SU-8 post sits. A parylene membrane provides separation between the paraffin and the SU-8 post which is attached, in combination with two other posts, to an SU-8 mirror. Cycling of three heaters, each below one of the individual posts, causes the rotation. Computer simulations have been performed to provide proof of concept.
Design Modeling And Characterization Of Optically Flat Mems Mirrors For Adaptive Optics
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Author : Fawn R. Gass
language : en
Publisher:
Release Date : 2003
Design Modeling And Characterization Of Optically Flat Mems Mirrors For Adaptive Optics written by Fawn R. Gass and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with Microelectromechanical systems categories.
Vo2 Based Mems Mirror
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Author : David Torres-Reyes
language : en
Publisher:
Release Date : 2017
Vo2 Based Mems Mirror written by David Torres-Reyes and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017 with Electronic dissertations categories.
Design Fabrication And Characterization Of Mems Deformable Mirrors For Ocular Adaptive Optics
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Author : Hyunkyu Park
language : en
Publisher:
Release Date : 2009
Design Fabrication And Characterization Of Mems Deformable Mirrors For Ocular Adaptive Optics written by Hyunkyu Park and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009 with categories.