Mems Mirrors For Endoscopic Oct

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Mems Mirrors For Endoscopic Oct

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Author : Jessica Anne Ayers
language : en
Publisher:
Release Date : 2009

Mems Mirrors For Endoscopic Oct written by Jessica Anne Ayers and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009 with categories.

Currently, there are two main ways to obtain a 2D OCT image of tissue surrounding an endoscope. The most commonly used method is a complex gear and shaft assembly which requires precise optical coupling and a metallic reinforcement sleeve. This leads to potential alignment errors and a stiffer than necessary catheter. A 2D OCT image can also be obtained with the use of a commercially available micro-motor placed at the distal imaging end of an endoscope. The micro-motor is almost twice as large as the next largest part of the system. Reduction of the scanner size would lead to an overall reduction in the size of the endoscope which is desirable for minimizing the invasiveness of endoscopy procedures. In order to obtain a 3D OCT image, linear translation needs to be combined with the rotational scan. This is most commonly accomplished with an external motor and leads to increased complexity and potential calibration errors between the linear and rotational scans. The purpose of this work was to design two MEMS mirrors (one for obtaining 2D OCT images and the other for obtaining 3D OCT images) that would reduce the size, stiffness, and complexity of currently available endoscopic OCT systems. For 2D OCT images, the scratch drive array mirror was designed to perform a circumferential scan while fitting inside a 1mm diameter. The device, consisting of a rotary scratch drive array and a polysilicon mirror, was designed to be assembled on top of the motor after fabrication. For 3D OCT images, the paraffin actuated rotational micro-mirror was designed to fit inside a 1 mm diameter and require no external motor to couple linear translation with its rotation. The actuation is initiated by a resistive heater which causes the thermal expansion of paraffin up a channel in which an SU-8 post sits. A parylene membrane provides separation between the paraffin and the SU-8 post which is attached, in combination with two other posts, to an SU-8 mirror. Cycling of three heaters, each below one of the individual posts, causes the rotation. Computer simulations have been performed to provide proof of concept.

Mems Based Optical Coherence Tomography Imaging

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Author : Jingjing Sun
language : en
Publisher:
Release Date : 2012

Mems Based Optical Coherence Tomography Imaging written by Jingjing Sun and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012 with categories.

Optical coherence tomography (OCT) can provide subsurface cross-sectional information of tissue samples with high resolutions of 1-15 μm. Microelectromechanical system (MEMS) mirrors are small and can perform fast optical scans; they are suitable for realizing lateral optical scans in OCT systems. In this thesis, MEMS technology is applied to enable endoscopic OCT imaging. Two generations of MEMS mirrors have been used. The MEMS mirrors are 2 mm x 2 mm and 1.7 mm x 1.55 mm respectively in size. Four generations of MEMS-OCT endoscopic probes have been developed; the diameters of the probes are reduced from 5 mm in the first generation down to 2.5 mm in the fourth generation. The effects of the positions of the optical components and the protective tubing on OCT imaging performance have been studied through simulation and verified experimentally. In vivo imaging experiments were done on mouse tongue, mouse ear and injected tumor; layered structures of mouse tongue and ear, and accurate shape of tumor regions were clearly detected.

Dynamic Focus Tracking Mems Scanning Micromirror For An Endoscopic Optical Coherence Tomography Based Imaging System

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Author : Matthew Strathman
language : en
Publisher:
Release Date : 2014

Dynamic Focus Tracking Mems Scanning Micromirror For An Endoscopic Optical Coherence Tomography Based Imaging System written by Matthew Strathman and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014 with categories.

We demonstrate a 3-dimensional scanning micromirror device using micro-electromechanical systems (MEMS) technology to integrate 2-dimesional spatial scanning with dynamic focal control. The electrostatically actuated devices employ a biaxial gimbal structure, to allow 2-dimensional beam scanning, and a deformable mirror membrane, for focal tunability. The 800 micrometer diameter mirrors are designed to fit inside an imaging probe sufficiently compact for use in the working channel of a standard endoscope. Large optical scanning ranges of more than 20 degrees with low actuation voltages have been achieved with these micromirror devices. Additionally, tunable mirror curvature allows dynamic control of the focal length between infinite and 25 mm with less than 100 V. High mechanical resonant frequencies, of up to 500 Hz, allow faster repositioning of the optical beam and a higher frame rate for the imaging system. These MEMS micromirror devices are used in an optical coherence tomography (OCT) imaging system. 2-dimensional, cross-sectional and spatial, images have been obtained using spectral-domain and time-domain OCT systems.

Mems Mirrors

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Author : Huikai Xie
language : en
Publisher: MDPI
Release Date : 2018-05-04

Mems Mirrors written by Huikai Xie and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-05-04 with Electronic books categories.

This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines

Design Fabrication And Characterization Of A 2 D Soi Mems Micromirror With Sidewall Electrodes For Confocal Macroscope Imaging

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Author : Yanhui Bai
language : en
Publisher:
Release Date : 2010

Design Fabrication And Characterization Of A 2 D Soi Mems Micromirror With Sidewall Electrodes For Confocal Macroscope Imaging written by Yanhui Bai and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010 with categories.

Micro-Electro-Mechanical Systems (MEMS) micromirrors have been developed for more than two decades along with the development of MEMS technology. They have been used into many application fields: optical switches, digital light projector (DLP), adoptive optics (AO), high definition (HD) display, barcode reader, endoscopic optical coherence tomography (OCT) and confocal microscope, and so on. Especially, MEMS mirrors applied into endoscopic OCT and confocal microscope are the intensive research field. Various actuation mechanisms, such as electrostatic, electromagnetic, electro bimorph thermal, electrowetting, piezoelectric (PZT) and hybrid actuators, are adopted by different types of micromirrors. Among these actuators, the electrostatic is easily understood and simple to realize, therefore, it is broadly adopted by a large number of micromirrors. This thesis reports the design, fabrication, and characterization of a 2-D Silicon-on-insulation (SOI) MEMS micromirror with sidewall (SW) electrodes for endoscopic OCT or confocal microscope imaging. The biaxial MEMS mirror with SW electrodes is actuated by electrostatic actuators. The dimension of mirror plate is 1000micronx1000micron, with a thickness of a 35micron. The analytical modeling of SW electrodes, fabrication process, and performance characteristics are described. In comparison to traditional electrostatic actuators, parallel-plate and comb-drive, SW electrodes combined with bottom electrodes achieve a large tilt angle under a low drive voltage that the comb-drive does and possess fairly simple fabrication process same as that of the parallel-plate. A new fabrication process based on SOI wafer, hybrid bulk/surface micromachined technology, and a high-aspect-ratio shadow mask is presented. Moreover, the fabrication process is successfully extended to fabricate 2x2 and 4x4 micromirror arrays. Finally, a biaxial MEMS mirror with SW electrodes was used into Confocal MACROscope for imaging. Studied optical requirements in terms of two optical configurations and frequency optimization of the micromirror, the biaxial MEMS mirror replaces the galvo-scanner and improves the MACROscope. Meanwhile, a new Micromirror-based Laser Scanning Microscope system is presented and allows 2D images to be acquired and displayed.

Optical Mems Nanophotonics And Their Applications

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Author : Guangya Zhou
language : en
Publisher: CRC Press
Release Date : 2017-12-14

Optical Mems Nanophotonics And Their Applications written by Guangya Zhou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-14 with Science categories.

This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.

Mems Mirrors

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Author : Huikai Xie (Ed.)
language : en
Publisher:
Release Date : 2018

Mems Mirrors written by Huikai Xie (Ed.) and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018 with categories.

MEMS mirrors can steer, modulate and switch light, as well as control the wavefront for focusing or phase modulation. MEMS mirrors have found enormous commercial success in projectors, displays and fiberoptic communications. Micro-spectrometers based on MEMS mirrors are starting to appear in the consumer market. There are also many breakthroughs in applying MEMS mirrors for endoscopic imaging. Equally excitingly, a new wave of opportunities for MEMS mirrors is coming up, for example, micro-LiDAR for autonomous driving and robotics, optical cross connect (OXC) for cloud data centers, and optical scanners for virtual reality/augumented reality, just to name a few. Of course, there are a number of big challenges that researchers and engineers must overcome to fully utiltize MEMS mirrors' potential: modeling and control are inherently complex due to the multiphysics, multi-DOF and nonlinear nature of the microactuators for MEMS mirrors; reliability is always a huge hurdle for commercilization; and the tradeoffs among the speed, aperture, and scan range are often overwhelming. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of MEMS mirrors based on all kinds of actuation mechanisms; and (2) new developments of applying MEMS mirrors of any kind in consumer electronics, optical communications, industry, medicine, agriculture, space, or defense.

Time Domain Optical Coherence Tomography Oct For Mems Based Endoscopic Application

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Author : Yunbo Liu
language : en
Publisher:
Release Date : 2014

Time Domain Optical Coherence Tomography Oct For Mems Based Endoscopic Application written by Yunbo Liu and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014 with categories.

Design And Fabrication Of A Mems Scanner For Oct Imaging Endo Microscopic Probe

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Author : Quentin Tanguy
language : en
Publisher:
Release Date : 2018

Design And Fabrication Of A Mems Scanner For Oct Imaging Endo Microscopic Probe written by Quentin Tanguy and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018 with categories.

The work presented in this manuscript consists in the conception of an electro-thermo-mechanical optical micro-scanner. In a first time, a design and a model are proposed and the micro-device was fabricated, characterized and a draft of integration onto a Mirau micro-interferometer was carried out in order to build an endoscopic probe for the detection of early stage gastrointestinal cancers using an imaging technique called Optical Coherence Tomography (OCT). The very contribution of the thesis is the development and the fabrication of micro actuators driven electrothermally to control the angular position a micro mirror plate conceived in this purpose. Different architectures of micro-scanners are proposed to best comply with the specifications determined by both the optical expectations and the medical standards requirements of the final apparatus emph{in vivo}.This work, part of a project called textquote{DEMO4} was financed by the French LabEx Action funding source in cooperation between the departments AS2M and MN2S of the French research institute Femto-ST as well as the university of Florida in the USA to deliver a first demonstrator of endoscopic OCT probe.Several batches of fabrication were realized my means of techniques of ac{CMOS}-based microfabrication in exchange between Femto-ST and the university of Florida before being assembled (for lack of monolithic integration capability) onto a micro-interferometer using automated processes specifically developed in this purpose.Finally, an experimental setup is proposed to characterize in order to evaluate the performances achieved and initiate the first tests of optical imaging using the micro-system.

Optical Mems

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Author : Huikai Xie
language : en
Publisher: MDPI
Release Date : 2019-08-06

Optical Mems written by Huikai Xie and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-08-06 with Technology & Engineering categories.

This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines