Micro Mechanical Transducers
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Micro Mechanical Transducers
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Author : Min-hang Bao
language : en
Publisher: Elsevier
Release Date : 2000-10-16
Micro Mechanical Transducers written by Min-hang Bao and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000-10-16 with Science categories.
Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.
Micro Mechanical Systems
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Author : T. Fukuda
language : en
Publisher: Elsevier
Release Date : 1998-07-24
Micro Mechanical Systems written by T. Fukuda and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998-07-24 with Technology & Engineering categories.
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
Analysis And Design Principles Of Mems Devices
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Author : Minhang Bao
language : en
Publisher: Elsevier
Release Date : 2005-04-12
Analysis And Design Principles Of Mems Devices written by Minhang Bao and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-04-12 with Technology & Engineering categories.
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.
Handbook Of Force Transducers
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Author : Dan Mihai Stefanescu
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-03-16
Handbook Of Force Transducers written by Dan Mihai Stefanescu and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-03-16 with Science categories.
Part I introduces the basic "Principles and Methods of Force Measurement" according to a classification into a dozen of force transducers types: resistive, inductive, capacitive, piezoelectric, electromagnetic, electrodynamic, magnetoelastic, galvanomagnetic (Hall-effect), vibrating wires, (micro)resonators, acoustic and gyroscopic. Two special chapters refer to force balance techniques and to combined methods in force measurement. Part II discusses the "(Strain Gauge) Force Transducers Components", evolving from the classical force transducer to the digital / intelligent one, with the incorporation of three subsystems (sensors, electromechanics and informatics). The elastic element (EE) is the "heart" of the force transducer and basically determines its performance. A 12-type elastic element classification is proposed (stretched / compressed column or tube, bending beam, bending and/or torsion shaft, middle bent bar with fixed ends, shear beam, bending ring, yoke or frame, diaphragm, axial-stressed torus, axisymmetrical and voluminous EE), with emphasis on the optimum location of the strain gauges. The main properties of the associated Wheatstone bridge, best suited for the parametrical transducers, are examined, together with the appropriate electronic circuits for SGFTs. The handbook fills a gap in the field of Force Measurement, both experts and newcomers, no matter of their particular interest, finding a lot of useful and valuable subjects in the area of Force Transducers; in fact, it is the first specialized monograph in this inter- and multidisciplinary field.
Sensors For Mechatronics
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Author : P. P. L. Regtien
language : en
Publisher: Elsevier
Release Date : 2012-01-17
Sensors For Mechatronics written by P. P. L. Regtien and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-01-17 with Technology & Engineering categories.
This title offers an overview of various sensors and sensor systems as required and applied in mechatronics. Emphasis lies on the physical background of the operating principles, illustrated with examples of commercially available sensors and of recent and future developments.
Handbook Of Micro Nano Tribology
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Author : Bharat Bhushan
language : en
Publisher: CRC Press
Release Date : 2020-10-28
Handbook Of Micro Nano Tribology written by Bharat Bhushan and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-10-28 with Technology & Engineering categories.
This second edition of Handbook of Micro/Nanotribology addresses the rapid evolution within this field, serving as a reference for the novice and the expert alike. Two parts divide this handbook: Part I covers basic studies, and Part II addresses design, construction, and applications to magnetic storage devices and MEMS. Discussions include: surface physics and methods for physically and chemically characterizing solid surfaces roughness characterization and static contact models using fractal analysis sliding at the interface and friction on an atomic scale scratching and wear as a result of sliding nanofabrication/nanomachining as well as nano/picoindentation lubricants for minimizing friction and wear surface forces and microrheology of thin liquid films measurement of nanomechanical properties of surfaces and thin films atomic-scale simulations of interfacial phenomena micro/nanotribology and micro/nanomechanics of magnetic storage devices This comprehensive book contains 16 chapters contributed by more than 20 international researchers. In each chapter, the presentation starts with macroconcepts and then lead to microconcepts. With more than 500 illustrations and 50 tables, Handbook of Micro/Nanotribology covers the range of relevant topics, including characterization of solid surfaces, measurement techniques and applications, and theoretical modeling of interfaces. What's New in the Second Edition? New chapters on: AFM instrumentation Surface forces and adhesion Design and construction of magnetic storage devices Microdynamical devices and systems Mechanical properties of materials in microstructure Micro/nanotribology and micro/nanomechanics of MEMS devices
Sensors For Mechatronics
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Author : Paul P.L. Regtien
language : en
Publisher: Elsevier
Release Date : 2018-04-18
Sensors For Mechatronics written by Paul P.L. Regtien and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-04-18 with Technology & Engineering categories.
Sensors for Mechatronics, Second Edition, offers an overview of the sensors and sensor systems required and applied in mechatronics. Emphasis lies on the physical background of the operating principles that is illustrated with examples of commercially available sensors and recent developments. Chapters discuss the general aspects of sensors, with a special section on quantities, notations and relations. In addition, the book includes a section devoted to sensor errors and error minimization that apply to most of the sensors discussed. Each subsequent chapter deals with one class of sensors, pursuing a classification according to physical principles rather than measurands. Categories discussed include resistive, capacitive, inductive and magnetic, optical, piezoelectric and acoustic sensors. For each category of sensors, a number of applications is given. Where appropriate, a section is added on the interfacing of the sensor. - Presents a fully revised, updated edition that focuses on industrial applications - Provides comprehensive coverage of a wide variety of sensor concepts and basic measurement configurations - Written by a recognized expert in the field with extensive experience in industry and teaching - Suitable for practicing engineers and those wanting to learn more about sensors in mechatronics
Microfabrication For Industrial Applications
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Author : Regina Luttge
language : en
Publisher: William Andrew
Release Date : 2011-08-31
Microfabrication For Industrial Applications written by Regina Luttge and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-08-31 with Technology & Engineering categories.
Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. - Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments - Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro - Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) - Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) - Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling
Optical Sensors And Microsystems
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Author : S. Martellucci
language : en
Publisher: Springer Science & Business Media
Release Date : 2007-05-08
Optical Sensors And Microsystems written by S. Martellucci and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-05-08 with Science categories.
Proceedings of the 22nd Course of the International School of Quantum Electronics, held 27 November-2 December 1997, in Erice, Italy. In recent years, fiber optical sensors and optical microsystems have assumed a significant role in sensing and measurement of many kinds. These optical techniques are utilised in a wide range of fields, including biomedicine, environmental sensing, mechanical and industrial measurement, and art preservation. This volume, an up-to-date survey of optical sensors and optical microsystems, aims at combining a tutorial foundation with analysis of current research in this area, and an extensive coverage of both technology and applications.
Smart Sensors And Mems
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Author : Sergey Y. Yurish
language : en
Publisher: Springer Science & Business Media
Release Date : 2007-11-12
Smart Sensors And Mems written by Sergey Y. Yurish and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-11-12 with Technology & Engineering categories.
The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book. It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS. The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.