Microelectronic Structures And Microelectromechanical Devices For Optical Processing And Multimedia Applications
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Microelectronic Structures And Microelectromechanical Devices For Optical Processing And Multimedia Applications
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Author : Wayne E. Bailey
language : en
Publisher:
Release Date : 1995
Microelectronic Structures And Microelectromechanical Devices For Optical Processing And Multimedia Applications written by Wayne E. Bailey and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Microelectromechanical systems categories.
Microelectronic Structures And Microelectromechanical Devices For Optical Processing And Multimedia Applications
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Author :
language : en
Publisher:
Release Date : 1995
Microelectronic Structures And Microelectromechanical Devices For Optical Processing And Multimedia Applications written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Microelectronics categories.
The Crc Handbook Of Mechanical Engineering
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Author : D. Yogi Goswami
language : en
Publisher: CRC Press
Release Date : 2004-09-29
The Crc Handbook Of Mechanical Engineering written by D. Yogi Goswami and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004-09-29 with Technology & Engineering categories.
The second edition of this standard-setting handbook provides and all-encompassing reference for the practicing engineer in industry, government, and academia, with relevant background and up-to-date information on the most important topics of modern mechanical engineering. These topics include modern manufacturing and design, robotics, computer engineering, environmental engineering, economics, patent law, and communication/information systems. The final chapter and appendix provide information regarding physical properties and mathematical and computational methods. New topics include nanotechnology, MEMS, electronic packaging, global climate change, electric and hybrid vehicles, and bioengineering.
Handbook Of Silicon Based Mems Materials And Technologies
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Author : Markku Tilli
language : en
Publisher: Elsevier
Release Date : 2009-12-08
Handbook Of Silicon Based Mems Materials And Technologies written by Markku Tilli and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-12-08 with Technology & Engineering categories.
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Mems And Moems Technology And Applications
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Author : P. Rai-Choudhury
language : en
Publisher: SPIE Press
Release Date : 2000
Mems And Moems Technology And Applications written by P. Rai-Choudhury and has been published by SPIE Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Technology & Engineering categories.
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
Microelectronic Structures And Mems For Optical Processing
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Author :
language : en
Publisher:
Release Date : 1998
Microelectronic Structures And Mems For Optical Processing written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Microelectronics categories.
Microsystem Technology
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Author : Wolfgang Menz
language : en
Publisher: John Wiley & Sons
Release Date : 2008-07-11
Microsystem Technology written by Wolfgang Menz and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-07-11 with Technology & Engineering categories.
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
Handbook Of Advanced Plasma Processing Techniques
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Author : R.J. Shul
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-06-28
Handbook Of Advanced Plasma Processing Techniques written by R.J. Shul and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-06-28 with Technology & Engineering categories.
Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
Microelectronic Structures And Microelectromechanical Devices For Optical Processing And Multimedia Applications
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Author : Wayne E. Bailey
language : en
Publisher: Society of Photo Optical
Release Date : 1995
Microelectronic Structures And Microelectromechanical Devices For Optical Processing And Multimedia Applications written by Wayne E. Bailey and has been published by Society of Photo Optical this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Technology & Engineering categories.
Handbook Of Optics Third Edition Volume I Geometrical And Physical Optics Polarized Light Components And Instruments Set
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Author : Michael Bass
language : en
Publisher: McGraw Hill Professional
Release Date : 2009-10-06
Handbook Of Optics Third Edition Volume I Geometrical And Physical Optics Polarized Light Components And Instruments Set written by Michael Bass and has been published by McGraw Hill Professional this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-10-06 with Technology & Engineering categories.
The most comprehensive and up-to-date optics resource available Prepared under the auspices of the Optical Society of America, the five carefully architected and cross-referenced volumes of the Handbook of Optics, Third Edition, contain everything a student, scientist, or engineer requires to actively work in the field. From the design of complex optical systems to world-class research and development methods, this definitive publication provides unparalleled access to the fundamentals of the discipline and its greatest minds. Individual chapters are written by the world's most renowned experts who explain, illustrate, and solve the entire field of optics. Each volume contains a complete chapter listing for the entire Handbook, extensive chapter glossaries, and a wealth of references. This pioneering work offers unprecedented coverage of optics data, techniques, and applications. Volume I covers geometrical and physical optics, polarized light, components, and instruments.