Micromachining Techniques For Fabrication Of Micro And Nano Structures
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Micromachining Techniques For Fabrication Of Micro And Nano Structures
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Author : Mojtaba Kahrizi
language : en
Publisher: BoD – Books on Demand
Release Date : 2012-02-03
Micromachining Techniques For Fabrication Of Micro And Nano Structures written by Mojtaba Kahrizi and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-02-03 with Science categories.
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.
Micromanufacturing And Nanotechnology
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Author : Nitaigour P. Mahalik
language : en
Publisher: Springer Science & Business Media
Release Date : 2006-01-16
Micromanufacturing And Nanotechnology written by Nitaigour P. Mahalik and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-01-16 with Technology & Engineering categories.
Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.
Manufacturing Techniques For Microfabrication And Nanotechnology
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Author : Marc J. Madou
language : en
Publisher: CRC Press
Release Date : 2011-06-13
Manufacturing Techniques For Microfabrication And Nanotechnology written by Marc J. Madou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-06-13 with Technology & Engineering categories.
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Microfabrication And Nanomanufacturing
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Author : Mark J. Jackson
language : en
Publisher: CRC Press
Release Date : 2005-11-10
Microfabrication And Nanomanufacturing written by Mark J. Jackson and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-11-10 with Technology & Engineering categories.
Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
Micro And Nanomanufacturing Volume Ii
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Author : Mark J. Jackson
language : en
Publisher: Springer
Release Date : 2017-10-28
Micro And Nanomanufacturing Volume Ii written by Mark J. Jackson and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-10-28 with Technology & Engineering categories.
This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials, atomic force microscopy for microbial cell surfaces, 3D printing of pharmaceuticals, microvascular coaptation methods, and more. The chapters also cover a wide variety of applications in areas such as surgery, auto components, living cell detection, dentistry, nanoparticles in medicine, and aerospace components. This is an ideal text for professionals working in the field, and for graduate students in micro and nanomanufacturing courses.
Advances In Micro Nano Electromechanical Systems And Fabrication Technologies
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Author : Kenichi Takahata
language : en
Publisher: BoD – Books on Demand
Release Date : 2013-05-29
Advances In Micro Nano Electromechanical Systems And Fabrication Technologies written by Kenichi Takahata and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-05-29 with Science categories.
MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.
Microfabrication And Nanofabrication
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Author : Kanak Kalita
language : en
Publisher: Walter de Gruyter GmbH & Co KG
Release Date : 2024-06-17
Microfabrication And Nanofabrication written by Kanak Kalita and has been published by Walter de Gruyter GmbH & Co KG this book supported file pdf, txt, epub, kindle and other format this book has been release on 2024-06-17 with Technology & Engineering categories.
This book unravels the intriguing interplay between macroscopic manufacturing processes and microscopic fabrication techniques. It dives into the sophisticated world of precision manufacturing, where high accuracy, controlled processes enable the production of complex components and products. It covers micro and nano fabrication, which revolutionizes conventional manufacturing by creating minuscule yet highly functional parts, some even smaller than the width of a human hair. This book explores various topics, from precise machining techniques to nanoimprint technology, reflecting the vast breadth and depth of this field. The aim is to provide readers with a comprehensive understanding of how these micro and macro scales intertwine, opening new frontiers in manufacturing. By showcasing the latest research findings and their practical applications, this book elucidates the enormous potential and implications of this burgeoning field. The contents are laid out in a user-friendly manner to communicate complex ideas in an accessible, engaging way, making it a valuable resource for anyone curious about the next big leap in manufacturing technology.
Fabrication Of Micro Nano Structures Via Precision Machining
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Author : Guoqing Zhang
language : en
Publisher: Springer
Release Date : 2024-05-05
Fabrication Of Micro Nano Structures Via Precision Machining written by Guoqing Zhang and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2024-05-05 with Technology & Engineering categories.
This book introduces the cutting-edge technology of micro/nano structure fabrication from precision machining, electrical discharge machining (EDM) and precision grinding and injection molding, the contents of the presented book includes but not limited to the machining process, cutting tool preparation, tool path generation, and surface evaluation. This book provides a variety of feasible fabrication methods and advanced manufacturing techniques for the precision fabrication of micro/nano-structures, especially for complex micro/nano-structures. Since the book focuses on the micro/nano-structure fabrication methods including hieratical micro/nano-structures, graduate students, engineering technicians, and researchers in related areas will benefit from this book; also, someone in related application fields such as biomedicine, communication, optics may be the potential readers of this book.
Cmos Mems
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Author : Henry Baltes
language : en
Publisher: John Wiley & Sons
Release Date : 2013-03-26
Cmos Mems written by Henry Baltes and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-26 with Technology & Engineering categories.
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
Micromachining With Nanostructured Cutting Tools
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Author : Mark J. Jackson
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-09-20
Micromachining With Nanostructured Cutting Tools written by Mark J. Jackson and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-09-20 with Technology & Engineering categories.
Stress-reducing defects and subsequent microcracks are a central focus during micromachining processes. After establishing the central process of micromachining Micromachining with Nanostructured Cutting Tools explains the underlying theories that describe chip formation and applies elementary cutting theory to machining at the microscale. Divided into three parts, the second half of Micromachining with Nanostructured Cutting Tools develops on this introduction; explaining how frictional interactions between uncoated and micro tools coated with nanostructered coatings can be characterized by using the elementary micromachining theories that were initially developed for machining at the macroscale. Shaw’s methods for calculating temperatures at the interaction zone and Merchant’s methods for calculating mechanical interactions are well described and justified for machining steel in both the dry and wet states. Finally, the further development and use of micro tools coated with thin-film nanostructured diamonds are shown. Micromachining with Nanostructured Cutting Tools is a resource for engineers and scientists working in this new field of micro and nanotechnology. The explanations of how to characterize, apply and adapt traditional approaches of understanding the mechanics of practical machining to the machining of microproducts using nanostructured tools provides a reliable reference for researchers and practitioners alike.