Nanolithography And Patterning Techniques In Microelectronics
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Nanolithography And Patterning Techniques In Microelectronics
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Author : D Bucknall
language : en
Publisher: Elsevier
Release Date : 2005-09-30
Nanolithography And Patterning Techniques In Microelectronics written by D Bucknall and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-09-30 with Science categories.
Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patterning of polymers has conventionally been undertaken by optical lithography. However, a new generation of nanolithographic and patterning techniques has made it possible to develop complex patterns at the nanoscale. Non-conventional lithography and patterning summarises this new range of techniques and their industrial applications. A number of chapters look at ways of forming and modifying surfaces for patterning. These are complemented by chapters on particular patterning techniques such as soft lithography, ion beam patterning, the use of nanostencils, photolithography and inkjet printing. The book also discusses prototyping and the manufacture of particular devices. With its distinguished international team of contributors, Non-conventional lithography and patterning is a standard reference for both those researching and using advanced polymers in such areas as microelectronics and biomedical devices. Looks at alternative approaches used to develop complex patterns at the nanoscale Concentrates on state of the art nanolithographic methods Written by a distinguished international team of contributors
Nano Lithography
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Author : Stefan Landis
language : en
Publisher: John Wiley & Sons
Release Date : 2013-03-04
Nano Lithography written by Stefan Landis and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-04 with Technology & Engineering categories.
Lithography is an extremely complex tool – based on the concept of “imprinting” an original template version onto mass output – originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams – in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope of fields including optics, physics, chemistry, mechanics and fluidics, and are now developing the nanoworld with new tools and technologies. Beyond the scientific challenges that are endemic in this miniaturization race, next generation lithography techniques are essential for creating new devices, new functionalities and exploring new application fields. Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures − meaning the creation of patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. It is used in the fabrication of leading-edge semiconductor integrated circuits (nanocircuitry) or nanoelectromechanical systems (NEMS). This book addresses physical principles as well as the scientific and technical challenges of nanolithography, covering X-ray and NanoImprint lithography, as well as techniques using scanning probe microscopy and the optical properties of metal nanostructures, patterning with block copolymers, and metrology for lithography. It is written for engineers or researchers new to the field, and will help readers to expand their knowledge of technologies that are constantly evolving.
Nanolithography
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Author : M Feldman
language : en
Publisher: Woodhead Publishing
Release Date : 2014-02-13
Nanolithography written by M Feldman and has been published by Woodhead Publishing this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-02-13 with Technology & Engineering categories.
Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, “What comes next? and “How do we get there? Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics
Nanofabrication
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Author : José María de Teresa
language : en
Publisher:
Release Date : 2020
Nanofabrication written by José María de Teresa and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020 with Nanolithography categories.
A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications. The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information about the main advantages and drawbacks of each technique in terms of resolution, throughput, number of steps needed, cost, etc. At the end of this section, the reader will be able to decide which technique to use for different applications. The second section explores more specific applications of the nanolithography techniques previously described; as well as new techniques and applications. In some cases, the processes described in these chapters involve a combination of several nanolithography techniques. This section is less general but provides the reader with real examples.
Handbook Of Microlithography Micromachining And Microfabrication Microlithography
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Author : P. Rai-Choudhury
language : en
Publisher: IET
Release Date : 1997
Handbook Of Microlithography Micromachining And Microfabrication Microlithography written by P. Rai-Choudhury and has been published by IET this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Technology & Engineering categories.
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Recent Advances In Nanofabrication Techniques And Applications
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Author : Bo Cui
language : en
Publisher: BoD – Books on Demand
Release Date : 2011-12-02
Recent Advances In Nanofabrication Techniques And Applications written by Bo Cui and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-12-02 with Science categories.
Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.
Nanotechnology And Regenerative Engineering
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Author : Cato T. Laurencin
language : en
Publisher: CRC Press
Release Date : 2014-10-28
Nanotechnology And Regenerative Engineering written by Cato T. Laurencin and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-10-28 with Medical categories.
Nanotechnology and regenerative engineering have emerged to the forefront as the most versatile and innovative technologies to foster novel therapeutic techniques and strategies of the twenty-first century. The first edition of Nanotechnology and Tissue Engineering: The Scaffold was the first comprehensive source to explain the developments in nanostructured biomaterials for tissue engineering, the relevance of nanostructured materials in tissue regeneration, and the current applications of nanostructured scaffolds for engineering various tissues. This fully revised second edition, renamed Nanotechnology and Regenerative Engineering: The Scaffold, provides a thorough update to the existing material, bringing together these two unique areas to give a perspective of the emerging therapeutic strategies for a wide audience. New coverage includes: Updated discussion of the importance of scaffolds in tissue engineering Exploration of cellular interactions at the nanoscale Complete range of fabrication processes capable of developing nanostructured scaffolds for regenerative engineering Applications of nanostructured scaffolds for neural, skin, cardiovascular, and musculoskeletal regenerative engineering FDA approval process of nanostructure scaffolds Products based on nanostructured scaffolds Due to the unique and tissue-mimic properties of the nanostructured scaffolds, the past five years have seen a tremendous growth in nanostructured materials for biological applications. The revised work presents the current state-of-the-art developments in nanostructured scaffolds for regenerative engineering.
Manufacturing Techniques For Microfabrication And Nanotechnology
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Author : Marc J. Madou
language : en
Publisher: CRC Press
Release Date : 2011-06-13
Manufacturing Techniques For Microfabrication And Nanotechnology written by Marc J. Madou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-06-13 with Technology & Engineering categories.
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Nanofabrication
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Author : Maria Stepanova
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-11-08
Nanofabrication written by Maria Stepanova and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-11-08 with Technology & Engineering categories.
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Microelectronics
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Author : Mason Snider
language : en
Publisher: Scientific e-Resources
Release Date : 2018-06-21
Microelectronics written by Mason Snider and has been published by Scientific e-Resources this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-06-21 with categories.
Microelectronics is the cornerstone of the information technologies that pervade virtually every aspect of contemporary life. It is difficult to imagine any field of science or technology that has had a more profound impact on the latter half of the 20 century than microelectronics. Microelectronics industry has been able to provide transistors, chips and products that are becoming smaller, faster, cheaper and better every year. As transistors become smaller, they become faster, more and more of such transistors can be packed on a chip, and thus chips are able to store and process more information. Digital circuits are made from analog components. The design must assure that the analog nature of the components doesn't dominate the desired digital behaviour. Digital systems must manage noise and timing margins, parasitic inductances and capacitances, and filter power connections. Bad designs have intermittent problems such as "e;glitches"e;, vanishingly-fast pulses that may trigger some logic but not others, "e;runt pulses"e; that do not reach valid "e;threshold"e; voltages, or unexpected ("e;undecoded"e;) combinations of logic states. A digital circuit is often constructed from small electronic circuits called logic gates that can be used to create combinational logic. Each logic gate represents a function of boolean logic. A logic gate is an arrangement of electrically controlled switches, better known as transistors. Each logic symbol is represented by a different shape. This book is designed for advanced undergraduates and graduate students with background knowledge in basic electronics including biasing, modeling, circuit, analysis, and frequency response.