Nanolithography And Surface Microscopy With Electron Beams
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Nanolithography And Surface Microscopy With Electron Beams
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Author :
language : en
Publisher: Elsevier
Release Date : 2024-10-25
Nanolithography And Surface Microscopy With Electron Beams written by and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2024-10-25 with Technology & Engineering categories.
Nanolithography and Surface Microscopy with Electron Beams, Volume 231 merges two long-running serials, Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. The series features articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science, digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains. Specific chapters cover Introduction to inverse problems in electron microscopy, Directional sinogram inpainting for limited angle tomography, Strain tomography of crystals, FISTA with adaptive discretization, Total variation discretization, and Reconstruction with a Gaussian Dictionary. - Provides the authority and expertise of leading contributors from an international board of authors - Presents the latest release in the Advances in Imaging and Electron Physics series
Handbook Of Microlithography Micromachining And Microfabrication Micromachining And Microfabrication
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Author : P. Rai-Choudhury
language : en
Publisher: SPIE Press
Release Date : 1997
Handbook Of Microlithography Micromachining And Microfabrication Micromachining And Microfabrication written by P. Rai-Choudhury and has been published by SPIE Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Technology & Engineering categories.
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Nanolithography
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Author : M. Gentili
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-03-09
Nanolithography written by M. Gentili and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-09 with Science categories.
Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).
Nano Lithography
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Author : Stefan Landis
language : en
Publisher: John Wiley & Sons
Release Date : 2013-03-04
Nano Lithography written by Stefan Landis and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-04 with Technology & Engineering categories.
Lithography is an extremely complex tool – based on the concept of “imprinting” an original template version onto mass output – originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams – in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope of fields including optics, physics, chemistry, mechanics and fluidics, and are now developing the nanoworld with new tools and technologies. Beyond the scientific challenges that are endemic in this miniaturization race, next generation lithography techniques are essential for creating new devices, new functionalities and exploring new application fields. Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures − meaning the creation of patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. It is used in the fabrication of leading-edge semiconductor integrated circuits (nanocircuitry) or nanoelectromechanical systems (NEMS). This book addresses physical principles as well as the scientific and technical challenges of nanolithography, covering X-ray and NanoImprint lithography, as well as techniques using scanning probe microscopy and the optical properties of metal nanostructures, patterning with block copolymers, and metrology for lithography. It is written for engineers or researchers new to the field, and will help readers to expand their knowledge of technologies that are constantly evolving.
Scanning Probe Lithography
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Author : Yu Kyoung Ryu
language : en
Publisher: CRC Press
Release Date : 2022-12-22
Scanning Probe Lithography written by Yu Kyoung Ryu and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-12-22 with Technology & Engineering categories.
The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials. • Introduces historical background of SPL, including evolution of the technique and tools • Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied • Shows the different types of devices and structures fabricated by SPL, together with the processing steps • Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups • Summarizes strengths, limitations, and potential of SPL This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.
Wear Of Materials
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Author : Peter J. Blau
language : en
Publisher: Elsevier
Release Date : 2003-10
Wear Of Materials written by Peter J. Blau and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003-10 with Reference categories.
The 14th International Conference on Wear of Materials took place in Washington, DC, USA, 30 March - 3 April 2003. These proceedings contain over two-hundred peer reviewed papers containing the best research, technical developments and engineering case studies from around the world. Biomaterials and nano-tribology receive special attention in this collection reflecting the general trends in the field. Further highlights include a focus on the new generation of instrumentation to probe wear at increasingly small scales. Approximately ninety communications and case studies, a popular format for the academic community have also been included, enabling the inclusion of the most up-to-date research. Over 200 peer-reviewed papers including hot topics such as biomaterials and nano-tribology Keeping you up-to-date with the latest research from leading experts Includes communications and case studies
Materials And Processes For Next Generation Lithography
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Author :
language : en
Publisher: Elsevier
Release Date : 2016-11-08
Materials And Processes For Next Generation Lithography written by and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-11-08 with Science categories.
As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. - Assembles up-to-date information from the world's premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation - Includes information on processing and metrology techniques - Brings together multiple approaches to litho pattern recording from academia and industry in one place
Dekker Encyclopedia Of Nanoscience And Nanotechnology
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Author : James A. Schwarz
language : en
Publisher: CRC Press
Release Date : 2004
Dekker Encyclopedia Of Nanoscience And Nanotechnology written by James A. Schwarz and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Science categories.
Fundamentals And Applications Of Nano Silicon In Plasmonics And Fullerines
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Author : Munir H. Nayfeh
language : en
Publisher: Elsevier
Release Date : 2018-06-29
Fundamentals And Applications Of Nano Silicon In Plasmonics And Fullerines written by Munir H. Nayfeh and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-06-29 with Science categories.
Fundamentals and Applications of Nano Silicon in Plasmonics and Fullerines: Current and Future Trends addresses current and future trends in the application and commercialization of nanosilicon. The book presents current, innovative and prospective applications and products based on nanosilicon and their binary system in the fields of energy harvesting and storage, lighting (solar cells and nano-capacitor and fuel cell devices and nanoLEDs), electronics (nanotransistors and nanomemory, quantum computing, photodetectors for space applications; biomedicine (substance detection, plasmonic treatment of disease, skin and hair care, implantable glucose sensor, capsules for drug delivery and underground water and oil exploration), and art (glass and pottery). Moreover, the book includes material on the use of advanced laser and proximal probes for imaging and manipulation of nanoparticles and atoms. In addition, coverage is given to carbon and how it contrasts and integrates with silicon with additional related applications. This is a valuable resource to all those seeking to learn more about the commercialization of nanosilicon, and to researchers wanting to learn more about emerging nanosilicon applications. - Features a variety of designs and operation of nano-devices, helping engineers to make the best use of nanosilicon - Contains underlying principles of how nanomaterials work and the variety of applications they provide, giving those new to nanosilicon a fundamental understanding - Assesses the viability of various nanoslicon devices for mass production and commercialization, thereby providing an important source of information for engineers
Handbook Of Functionalized Carbon Nanostructures
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Author : Ahmed Barhoum
language : en
Publisher: Springer Nature
Release Date : 2024-10-03
Handbook Of Functionalized Carbon Nanostructures written by Ahmed Barhoum and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2024-10-03 with Technology & Engineering categories.
This book highlights all newly reported carbon nanostructures including graphene and its derivatives, carbon nanotubes, metal organic frameworks, fullerenes, nanorods, nanospheres, nano onions, porous nanoparticles, nanohorns, nanofibers and nanoribbons, nanodiamonds, graphitic carbon nitrides, carbon aerogels and hydrogels, graphdiyne and graphenylene. It presents the historical development of carbon nanostructures technologies, different types and classifications, and different fabrication and functionalization techniques, including outer/inner surface functionalization and covalent and noncovalent functionalization. This Handbook discusses the unique properties of functionalized carbon nanostructures that can be obtained by modifying their structures, composition, and surface. It gives the reader an in-depth look at the current achievements of research and practice while pointing you ahead to new possibilities in functionalizing and using carbon nanomaterials. Finally, it covers the various applications of functionalized carbon nanostructures including adsorbents, additives, active materials in energy accumulating systems (batteries, hydrogen storage systems, and supercapacitors), filtering media, catalysts or supports for catalysts, sensors or substrates for sensors, additives for polymers, ceramic composites, metal and carbon alloys, glasses, digital textiles, and composite materials.