Piezoelectric Mems Resonators
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Piezoelectric Mems Resonators
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Author : Harmeet Bhugra
language : en
Publisher: Springer
Release Date : 2017-01-09
Piezoelectric Mems Resonators written by Harmeet Bhugra and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-01-09 with Technology & Engineering categories.
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
Electrical Characterization Of Piezoelectric Mems Resonators In Liquid Phase For Sensing Applications
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Author : Abid Ali
language : en
Publisher:
Release Date : 2018
Electrical Characterization Of Piezoelectric Mems Resonators In Liquid Phase For Sensing Applications written by Abid Ali and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018 with Detectors categories.
Piezoelectric Mems
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Author : Ulrich Schmid
language : en
Publisher: MDPI
Release Date : 2018-07-10
Piezoelectric Mems written by Ulrich Schmid and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-07-10 with Technology & Engineering categories.
This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines
Resonant Mems
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Author : Oliver Brand
language : en
Publisher: John Wiley & Sons
Release Date : 2015-04-22
Resonant Mems written by Oliver Brand and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-04-22 with Technology & Engineering categories.
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Mems Resonator Filters
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Author : Rajendra M. Patrikar
language : en
Publisher: Institution of Engineering and Technology
Release Date : 2020-04-20
Mems Resonator Filters written by Rajendra M. Patrikar and has been published by Institution of Engineering and Technology this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-04-20 with Technology & Engineering categories.
The use of MEMS resonators for signal processing is relatively new and has the potential to change the topology of newer generation circuits. New materials, design and fabrication processes, and integration with conventional circuitry will need to be considered.
Design Of Piezoelectric Mems Resonators And Oscillators
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Author : 嘉佳
language : en
Publisher:
Release Date : 2015
Design Of Piezoelectric Mems Resonators And Oscillators written by 嘉佳 and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015 with categories.
3d And Circuit Integration Of Mems
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Author : Masayoshi Esashi
language : en
Publisher: John Wiley & Sons
Release Date : 2021-03-16
3d And Circuit Integration Of Mems written by Masayoshi Esashi and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-03-16 with Technology & Engineering categories.
3D and Circuit Integration of MEMS Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Analysis Of Piezoelectric Devices
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Author : Jiashi Yang
language : en
Publisher: World Scientific
Release Date : 2006
Analysis Of Piezoelectric Devices written by Jiashi Yang and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with Technology & Engineering categories.
Focuses on the theoretical analysis of piezoelectric devices. Based on the linear, nonlinear, three-dimensional and lower-dimensional structural theories of electromechanical materials, this book presents theoretical results for devices such as piezoelectric resonators, acoustic wave sensors, and piezoelectric transducers.
Piezoelectric And Acoustic Materials For Transducer Applications
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Author : Ahmad Safari
language : en
Publisher: Springer Science & Business Media
Release Date : 2008-09-11
Piezoelectric And Acoustic Materials For Transducer Applications written by Ahmad Safari and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-09-11 with Technology & Engineering categories.
Piezoelectric and Acoustic Materials for Transducer Applications combines discussion of the physical properties of piezoelectric and acoustic materials, with the fundamentals, design principles and fabrication methods, and their application in transducers. This book serves as a comprehensive reference on all aspects of piezoelectric materials, such as thermodynamics, crystallography, crystal chemistry, and piezoelectric composite fabrication techniques as they pertain to piezoelectric transducer design and applications. The chapters in this book cover a wide range of topics, which are separated into four sections: Section I. Fundamentals of Piezoelectricity Section II. Piezoelectric and Acoustic Materials for Transducer Technology Section III. Transducer Design and Principles Section IV. Piezoelectric Transducer Fabrication Methods Piezoelectric and Acoustic Materials for Transducer Applications is written by a diverse group of renowned experts from around the world, and is appropriate for scientists and engineers in a variety of disciplines.
Piezoelectric Energy Harvesting
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Author : Alper Erturk
language : en
Publisher: John Wiley & Sons
Release Date : 2011-04-04
Piezoelectric Energy Harvesting written by Alper Erturk and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-04-04 with Technology & Engineering categories.
The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.