Plasma Electronics
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Plasma Electronics
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Author : Toshiaki Makabe
language : en
Publisher: CRC Press
Release Date : 2006-03-27
Plasma Electronics written by Toshiaki Makabe and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-03-27 with Science categories.
Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,
Quantum Electronics And Plasma Physics
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Author : Giancarlo C. Righini
language : en
Publisher:
Release Date : 1991
Quantum Electronics And Plasma Physics written by Giancarlo C. Righini and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1991 with Lasers categories.
Plasma Cathode Electron Sources
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Author : Efim Oks
language : en
Publisher: John Wiley & Sons
Release Date : 2006-10-27
Plasma Cathode Electron Sources written by Efim Oks and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-10-27 with Science categories.
This book fills the gap for a textbook describing this kind of electron beam source in a systematic and thorough manner: from physical processes of electron emission to examples of real plasma electron sources and their applications.
Plasma Electronics
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Author : Toshiaki Makabe
language : en
Publisher: CRC Press
Release Date : 2006-03-27
Plasma Electronics written by Toshiaki Makabe and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-03-27 with Science categories.
Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis. Plasma Electronics: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory. Beginning with an overview of the basic characteristics and applications of low-temperature plasma, preeminent experts Makabe and Petrovic explore the physics underlying the complex behavior of non-equilibrium (or low temperature) plasma. They discuss charged particle transport in general and in detail as well as macroscopic plasma characteristics and elementary processes in gas phase and on surfaces. After laying this groundwork, the book examines state-of-the-art computational methods for modeling plasma and reviews various important applications including inductively and capacitively coupled plasma, magnetically enhanced plasma, and various processing techniques, while numerous problems and worked examples reinforce the concepts. Uniquely combining physics, numerical methods, and practical applications, Plasma Electronics: Applications in Microelectronic Device Fabrication equips you with the knowledge necessary to scale up lab bench breakthroughs into industrial innovations.
Army Research Task Summary Electronics Mathematics Operations Research Planning Systems Research And Interdisciplinary Research
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Author : United States. Army Research Office
language : en
Publisher:
Release Date : 1961
Army Research Task Summary Electronics Mathematics Operations Research Planning Systems Research And Interdisciplinary Research written by United States. Army Research Office and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1961 with Research categories.
Tid
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Author :
language : en
Publisher:
Release Date : 1962
Tid written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1962 with Energy development categories.
Electronics
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Author :
language : en
Publisher:
Release Date : 1961
Electronics written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1961 with Electronics categories.
June issues, 1941-44 and Nov. issue, 1945, include a buyers' guide section.
Fusion Yields Important Benefits Today
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Author :
language : en
Publisher:
Release Date : 1996
Fusion Yields Important Benefits Today written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with Energy development categories.
Advanced Technologies Based On Wave And Beam Generated Plasmas
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Author : H. Schlüter
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-06-29
Advanced Technologies Based On Wave And Beam Generated Plasmas written by H. Schlüter and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-06-29 with Science categories.
This volume is based on the lectures at the NATO Advanced Study Institute, entitled "Advanced Technologies Based on Wave and Beam Generated Plasmas", held at Sozopol, Bulgaria, from May 22 till June 1, 1998. It attracted almost 100 participants from 16 different countries. The meeting combined different types of scientists from advanced experts to aspiring young researchers. It aimed at stimulating future development by providing-across borders- cross-fertilization and exchanges between previously unconnected groups. This is reflected in the contents of the volume which covers the lectures given. The book also contains in a second part 43 poster presentations mostly from younger participants with valuable complementations and specifica tions to the lectures. With its topics the Advanced Study Institute constitutes the first attempt to bring together in an organized manner three areas of work on plasma technologies: advanced efforts based on wave generated---high frequency-····plasmas, on plasma assisted ion implantation and on electron beam generated plasmas.
Nuclear Science Abstracts
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Author :
language : en
Publisher:
Release Date : 1975
Nuclear Science Abstracts written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1975 with Nuclear energy categories.