Plasma Surface Interactions And Processing Of Materials
DOWNLOAD
Download Plasma Surface Interactions And Processing Of Materials PDF/ePub or read online books in Mobi eBooks. Click Download or Read Online button to get Plasma Surface Interactions And Processing Of Materials book now. This website allows unlimited access to, at the time of writing, more than 1.5 million titles, including hundreds of thousands of titles in various foreign languages. If the content not found or just blank you must refresh this page
Plasma Surface Interactions And Processing Of Materials
DOWNLOAD
Author : O. Auciello
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Plasma Surface Interactions And Processing Of Materials written by O. Auciello and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.
An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.
Plasma Processing Of Materials
DOWNLOAD
Author : National Research Council
language : en
Publisher: National Academies Press
Release Date : 1991-02-01
Plasma Processing Of Materials written by National Research Council and has been published by National Academies Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1991-02-01 with Technology & Engineering categories.
Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Handbook Of Plasma Processing Technology
DOWNLOAD
Author : Stephen M. Rossnagel
language : en
Publisher: William Andrew
Release Date : 1990
Handbook Of Plasma Processing Technology written by Stephen M. Rossnagel and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 1990 with Reference categories.
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Nonthermal Plasmas For Materials Processing
DOWNLOAD
Author : Jörg Florian Friedrich
language : en
Publisher: John Wiley & Sons
Release Date : 2022-07-15
Nonthermal Plasmas For Materials Processing written by Jörg Florian Friedrich and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-07-15 with Science categories.
NONTHERMAL PLASMAS FOR MATERIALS PROCESSING This unique book covers the physical and chemical aspects of plasma chemistry with polymers and gives new insights into the interaction of physics and chemistry of nonthermal plasmas and their applications in materials science for physicists and chemists. The properties and characteristics of plasmas, elementary (collision) processes in the gas phase, plasma surface interactions, gas discharge plasmas and technical plasma sources, atmospheric plasmas, plasma diagnostics, polymers and plasmas, plasma polymerization, post-plasma processes, plasma, and wet-chemical processing, plasma-induced generation of functional groups, and the chemical reactions on these groups along with a few exemplary applications are discussed in this comprehensive but condensed state-of-the-art book on plasma chemistry and its dependence on plasma physics. While plasma physics, plasma chemistry, and polymer science are often handled separately, the aim of the authors is to harmoniously join the physics and chemistry of low-pressure and atmospheric-pressure plasmas with polymer surface chemistry and polymerization and to compare such chemistry with classic chemistry. Readers will find in these chapters Interaction of plasma physics and chemistry in plasmas and at the surface of polymers; Explanation and interpretation of physical and chemical mechanisms on plasma polymerization and polymer surface modification; Introduction of modern techniques in plasma diagnostics, surface analysis of solids, and special behavior of polymers on exposure to plasmas; Discussion of the conflict of energy-rich plasma species with permanent energy supply and the much lower binding energies in polymers and alternatives to avoid random polymer decomposition Technical applications such as adhesion, cleaning, wettability, textile modification, coatings, films, etc. New perspectives are explained about how to use selective and mild processes to allow post-plasma chemistry on non-degraded polymer surfaces. Audience Physicists, polymer chemists, materials scientists, industrial engineers in biomedicine, coatings, printing, etc.
Handbook Of Plasma Processing Technology
DOWNLOAD
Author : Arthur H Landrock
language : en
Publisher: William Andrew
Release Date : 1990
Handbook Of Plasma Processing Technology written by Arthur H Landrock and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 1990 with categories.
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Plasma Material Interaction In Controlled Fusion
DOWNLOAD
Author : Dirk Naujoks
language : en
Publisher: Springer Science & Business Media
Release Date : 2006-08-25
Plasma Material Interaction In Controlled Fusion written by Dirk Naujoks and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-08-25 with Technology & Engineering categories.
This book deals with the specific contact between the fourth state of matter, i.e. plasma, and the first state of matter, i.e. a solid wall, in controlled fusion experiments. A comprehensive analysis of the main processes of plasma-surface interaction is given together with an assessment of the most critical questions within the context of general criteria and operation limits. It also contains a survey on other important aspects in nuclear fusion.
Physical Processes Of The Interaction Of Fusion Plasmas With Solids
DOWNLOAD
Author : Wolfgang O. Hofer
language : en
Publisher:
Release Date : 1996
Physical Processes Of The Interaction Of Fusion Plasmas With Solids written by Wolfgang O. Hofer and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with Science categories.
The recent development of large fusion devices achieving near energy break-even scientifically proves the viability of fusion as an energy source. The challenge now facing fusion researchers is surmounting engineering obstacles to make fusion energy practical. Physical Processes of the Interaction of Fusion Plasmas with Solids discusses problems associated with plasma-surface interactions which represent a key issue in achieving engineering as opposed to scientific success. Unlike previous books on the subject, this text is directly related to the broad range of plasma-surface interactions problems encountered in fusion devices. Physical Processes of the Interaction of Fusion Plasmas with Solids provides the specialized international fusion community with a resource that covers the interesting new developments that have occurred with the advent of the larger fusion plasmadevices that have demonstrated near break-even energy. This book addresses problems that are useful for design and fabrication of such devices. The edge plasma Physical sputtering and radiation-enhanced sublimation Chemical erosion Electron emission from solids Control of plasma-surface interactions by thin films Thermal stability Radiation damage in metallic structural materials Radiation damage in carbon materials
Plasma Processing Of Semiconductors
DOWNLOAD
Author : P.F. Williams
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-11-11
Plasma Processing Of Semiconductors written by P.F. Williams and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-11-11 with Technology & Engineering categories.
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Plasma Material Interactions In A Controlled Fusion Reactor
DOWNLOAD
Author : Tetsuo Tanabe
language : en
Publisher: Springer
Release Date : 2022-03-09
Plasma Material Interactions In A Controlled Fusion Reactor written by Tetsuo Tanabe and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-03-09 with Science categories.
This book is a primer on the interplay between plasma and materials in a fusion reactor, so-called plasma–materials interactions (PMIs), highlighting materials and their influence on plasma through PMI. It aims to demonstrate that a plasma-facing surface (PFS) responds actively to fusion plasma and that the clarifying nature of PFS is indispensable to understanding the influence of PFS on plasma. It describes the modern insight into PMI, namely, relevant feedback to plasma performance from plasma-facing material (PFM) on changes in a material surface by plasma power load by radiation and particles, contrary to a conventional view that unilateral influence from plasma on PFM is dominant in PMI. There are many books and reviews on PMI in the context of plasma physics, that is, how plasma or plasma confinement works in PMI. By contrast, this book features a materials aspect in PMI focusing on changes caused by heat and particle load from plasma: how PFMs are changed by plasma exposure and then, accordingly, how the changed PFM interacts with plasma.
Handbook Of Advanced Plasma Processing Techniques
DOWNLOAD
Author : R.J. Shul
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-06-28
Handbook Of Advanced Plasma Processing Techniques written by R.J. Shul and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-06-28 with Technology & Engineering categories.
Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.