Proceedings Of The First International Symposium On Advanced Materials For Ulsi
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Proceedings Of The First International Symposium On Advanced Materials For Ulsi
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Author : Martin P. Scott
language : en
Publisher:
Release Date : 1988
Proceedings Of The First International Symposium On Advanced Materials For Ulsi written by Martin P. Scott and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1988 with Integrated circuits categories.
Advanced Materials For Ulsi
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Author : Electrochemical Society. Electronics, Dielectrics and Insulation, and High Temperature Materials Divisions
language : en
Publisher:
Release Date : 1988
Advanced Materials For Ulsi written by Electrochemical Society. Electronics, Dielectrics and Insulation, and High Temperature Materials Divisions and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1988 with categories.
Advanced Materials For Ulsi
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Author : Martin P. Scott
language : en
Publisher:
Release Date : 1988
Advanced Materials For Ulsi written by Martin P. Scott and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1988 with categories.
Ulsi Science And Technology 1989
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Author : C. M. Osburn
language : en
Publisher:
Release Date : 1989
Ulsi Science And Technology 1989 written by C. M. Osburn and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1989 with Integrated circuits categories.
Ulsi Process Integration
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Author : Cor L. Claeys
language : en
Publisher: The Electrochemical Society
Release Date : 1999
Ulsi Process Integration written by Cor L. Claeys and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Computers categories.
Reduced Thermal Processing For Ulsi
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Author : R.A. Levy
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Reduced Thermal Processing For Ulsi written by R.A. Levy and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.
As feature dimensions of integrated circuits shrink, the associated geometrical constraints on junction depth impose severe restrictions on the thermal budget for processing such devices. Furthermore, due to the relatively low melting point of the first aluminum metallization level, such restrictions extend to the fabrication of multilevel structures that are now essential in increasing packing density of interconnect lines. The fabrication of ultra large scale integrated (ULSI) devices under thermal budget restrictions requires the reassessment of existing and the development of new microelectronic materials and processes. This book addresses three broad but interrelated areas. The first area focuses on the subject of rapid thermal processing (RTP), a technology that allows minimization of processing time while relaxing the constraints on high temperature. Initially developed to limit dopant redistribution, current applications of RTP are shown here to encompass annealing, oxidation, nitridation, silicidation, glass reflow, and contact sintering. In a second but complementary area, advances in equipment design and performance of rapid thermal processing equipment are presented in conjunction with associated issues of temperature measurement and control. Defect mechanisms are assessed together with the resulting properties of rapidly deposited and processed films. The concept of RTP integration for a full CMOS device process is also examined together with its impact on device characteristics.
Advanced Materials
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Author :
language : en
Publisher:
Release Date : 2004
Advanced Materials written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Materials categories.
Advanced Materials
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Author :
language : en
Publisher:
Release Date : 2003
Advanced Materials written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with Materials categories.
Ulsi Process Integration Ii
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Author : Cor L. Claeys
language : en
Publisher: The Electrochemical Society
Release Date : 2001
Ulsi Process Integration Ii written by Cor L. Claeys and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Technology & Engineering categories.
Ulsi Science And Technology
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Author : Electrochemical Society, Inc
language : en
Publisher:
Release Date : 1987
Ulsi Science And Technology written by Electrochemical Society, Inc and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1987 with categories.