Proceedings Of The Tenth Symposium On Plasma Processing
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Proceedings Of The Symposium Om Process Control Diagnostics And Modeling In Semiconductor Manufacturing
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Author : M. Meyyappan
language : en
Publisher: The Electrochemical Society
Release Date : 1995
Proceedings Of The Symposium Om Process Control Diagnostics And Modeling In Semiconductor Manufacturing written by M. Meyyappan and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Technology & Engineering categories.
Handbook For Cleaning For Semiconductor Manufacturing
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Author : Karen A. Reinhardt
language : en
Publisher: John Wiley & Sons
Release Date : 2011-04-12
Handbook For Cleaning For Semiconductor Manufacturing written by Karen A. Reinhardt and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-04-12 with Technology & Engineering categories.
Provides an In-depth discussion of surface conditioning for semiconductor applications The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications provides an in-depth discussion of surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet processing is reviewed as well as surface and colloidal aspects of cleaning and etching. Topics covered in this new reference include: Front end line (FEOL) and back end of line (BEOL) cleaning applications such as high-k/metal gate post-etch cleaning and pore sealing, high-dose implant stripping and cleaning, and germanium, and silicon passivation Formulation development practices, methodology and a new directions are presented including chemicals used for preventing corrosion of copper lines, cleaning aluminium lines, reclaiming wafers, and water bonding, as well as the filtering and recirculating of chemicals including reuse and recycling Wetting, cleaning, and drying of features, such as high aspect ratio features and hydrophilic surface states, especially how to dry without watermarks, the abilities to wet hydrophobic surfaces and to remove liquid from deep features The chemical reactions and mechanisms of silicon dioxide etching with hydrofluoric acid, particle removal with ammonium hydroxide/hydrogen peroxide mixture, and metal removal with hydrochloric acid The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications is a valuable resource for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. Engineers working for semiconductor manufacturing, capital equipment, chemicals, or other industries that assures cleanliness of chemicals, material, and equipment in the manufacturing area will also find this handbook an indispensible reference.
Proceedings Of The Tenth Symposium On Plasma Processing
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Author : Electrochemical Society. Dielectric Science and Technology Division
language : en
Publisher: The Electrochemical Society
Release Date : 1994
Proceedings Of The Tenth Symposium On Plasma Processing written by Electrochemical Society. Dielectric Science and Technology Division and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Science categories.
Proceedings Of The Eleventh International Symposium On Plasma Processing
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Author : Electrochemical Society. Dielectric Science and Technology Division
language : en
Publisher: The Electrochemical Society
Release Date : 1996
Proceedings Of The Eleventh International Symposium On Plasma Processing written by Electrochemical Society. Dielectric Science and Technology Division and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with Science categories.
Fusion Energy Update
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Author :
language : en
Publisher:
Release Date : 1981
Fusion Energy Update written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1981 with Controlled fusion categories.
Emerging Technologies And Circuits
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Author : Amara Amara
language : en
Publisher: Springer Science & Business Media
Release Date : 2010-09-28
Emerging Technologies And Circuits written by Amara Amara and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-09-28 with Technology & Engineering categories.
Emerging Technologies and Circuits contains a set of outstanding papers, keynote and tutorials presented during 3 days at the International Conference On Integrated Circuit Design and Technology (ICICDT) held in June 2008 in Minatec, Grenoble.
Nuclear Science Abstracts
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Author :
language : en
Publisher:
Release Date : 1976
Nuclear Science Abstracts written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1976 with Nuclear energy categories.
Scientific And Technical Aerospace Reports
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Author :
language : en
Publisher:
Release Date : 1995
Scientific And Technical Aerospace Reports written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Aeronautics categories.
Product Process Fingerprint In Micro Manufacturing
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Author : Guido Tosello
language : en
Publisher: MDPI
Release Date : 2019-05-31
Product Process Fingerprint In Micro Manufacturing written by Guido Tosello and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-05-31 with Technology & Engineering categories.
The continuous miniaturization of products and the growing complexity of their embedded multifunctionalities necessitates continuous research and development efforts regarding micro components and related micro manufacturing technologies. Highly miniaturized systems, manufactured using a wide variety of materials, have found application in key technological fields, such as healthcare devices, micro implants, mobility, communications, optics, and micro electromechanical systems. Innovations required for the high-precision manufacturing of micro components can specifically be achieved through optimizations using post-process (i.e., offline) and in-process (i.e., online) metrology of both process input and output parameters, as well as geometrical features of the produced micro parts. However, it is of critical importance to reduce the metrology and optimization efforts, since process and product quality control can represent a significant portion of the total production time in micro manufacturing. To solve this fundamental challenge, research efforts have been undertaken in order to define, investigate, implement, and validate the so-called “product/process manufacturing fingerprint” concept. The “product manufacturing fingerprint” concept refers to those unique dimensional outcomes (e.g., surface topography, form error, critical dimensions, etc.) on the produced component that, if kept under control and within specifications, ensure that the entire micro component complies to its specifications. The “process manufacturing fingerprint” is a specific process parameter or feature to be monitored and controlled, in order to maintain the manufacture of products within the specified tolerances. By integrating both product and process manufacturing fingerprint concepts, the metrology and optimization efforts are highly reduced. Therefore, the quality of the micro products increases, with an obvious improvement in production yield. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments and applications in micro- and sub-micro-scale manufacturing, process monitoring and control, as well as micro and sub-micro product quality assurance. Focus will be on micro manufacturing process chains and their micro product/process fingerprint, towards full process optimization and zero-defect micro manufacturing.
Energy Research Abstracts
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Author :
language : en
Publisher:
Release Date : 1993
Energy Research Abstracts written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1993 with Power resources categories.
Semiannual, with semiannual and annual indexes. References to all scientific and technical literature coming from DOE, its laboratories, energy centers, and contractors. Includes all works deriving from DOE, other related government-sponsored information, and foreign nonnuclear information. Arranged under 39 categories, e.g., Biomedical sciences, basic studies; Biomedical sciences, applied studies; Health and safety; and Fusion energy. Entry gives bibliographical information and abstract. Corporate, author, subject, report number indexes.