Rapid Thermal Processing Rtp Of Semiconductors In Space

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Rapid Thermal Processing Rtp Of Semiconductors In Space
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Author : National Aeronautics and Space Administration (NASA)
language : en
Publisher: Createspace Independent Publishing Platform
Release Date : 2018-07-10
Rapid Thermal Processing Rtp Of Semiconductors In Space written by National Aeronautics and Space Administration (NASA) and has been published by Createspace Independent Publishing Platform this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-07-10 with categories.
The progress achieved on the project entitled 'Rapid Thermal Processing of Semiconductors in Space' for a 12 month period of activity ending March 31, 1993 is summarized. The activity of this group is being performed under the direct auspices of the ROMPS program. The main objective of this program is to develop and demonstrate the use of advanced robotics in space with rapid thermal process (RTP) of semiconductors providing the test technology. Rapid thermal processing is an ideal processing step for demonstration purposes since it encompasses many of the characteristics of other processes used in solid state device manufacturing. Furthermore, a low thermal budget is becoming more important in existing manufacturing practice, while a low thermal budget is critical to successful processing in space. A secondary objective of this project is to determine the influence of microgravity on the rapid thermal process for a variety of operating modes. In many instances, this involves one or more fluid phases. The advancement of microgravity processing science is an important ancillary objective. Anderson, T. J. and Jones, K. S. Unspecified Center NAG5-1809...
Scientific And Technical Aerospace Reports
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Author :
language : en
Publisher:
Release Date : 1995
Scientific And Technical Aerospace Reports written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Aeronautics categories.
Rapid Thermal Processing Of Semiconductors
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Author : Victor E. Borisenko
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-11-22
Rapid Thermal Processing Of Semiconductors written by Victor E. Borisenko and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-11-22 with Technology & Engineering categories.
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
High Speed And Lower Power Technologies
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Author : Jung Han Choi
language : en
Publisher: CRC Press
Release Date : 2018-09-03
High Speed And Lower Power Technologies written by Jung Han Choi and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-09-03 with Technology & Engineering categories.
This book explores up-to-date research trends and achievements on low-power and high-speed technologies in both electronics and optics. It offers unique insight into low-power and high-speed approaches ranging from devices, ICs, sub-systems and networks that can be exploited for future mobile devices, 5G networks, Internet of Things (IoT), and data centers. It collects heterogeneous topics in place to catch and predict future research directions of devices, circuits, subsystems, and networks for low-power and higher-speed technologies. Even it handles about artificial intelligence (AI) showing examples how AI technology can be combined with concurrent electronics. Written by top international experts in both industry and academia, the book discusses new devices, such as Si-on-chip laser, interconnections using graphenes, machine learning combined with CMOS technology, progresses of SiGe devices for higher-speed electronices for optic, co-design low-power and high-speed circuits for optical interconnect, low-power network-on-chip (NoC) router, X-ray quantum counting, and a design of low-power power amplifiers. Covers modern high-speed and low-power electronics and photonics. Discusses novel nano-devices, electronics & photonic sub-systems for high-speed and low-power systems, and many other emerging technologies like Si photonic technology, Si-on-chip laser, low-power driver for optic device, and network-on-chip router. Includes practical applications and recent results with respect to emerging low-power systems. Addresses the future perspective of silicon photonics as a low-power interconnections and communication applications.
Monthly Catalog Of United States Government Publications
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Author : United States. Superintendent of Documents
language : en
Publisher:
Release Date : 1994
Monthly Catalog Of United States Government Publications written by United States. Superintendent of Documents and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Government publications categories.
Monthly Catalogue United States Public Documents
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Author :
language : en
Publisher:
Release Date : 1994-11
Monthly Catalogue United States Public Documents written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994-11 with Government publications categories.
Government Reports Announcements Index
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Author :
language : en
Publisher:
Release Date : 1995
Government Reports Announcements Index written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Science categories.
Government Reports Annual Index
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Author :
language : en
Publisher:
Release Date : 1993
Government Reports Annual Index written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1993 with Government publications categories.
Advances In Heat Transfer
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Author : James P. Hartnett
language : en
Publisher: Elsevier
Release Date : 2003-10-09
Advances In Heat Transfer written by James P. Hartnett and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003-10-09 with Science categories.
Advances in Heat Transfer presents review articles on topics of current interest. Each contribution starts from widely understood principles and brings the reader up to the forefront of the topic being addressed. The favorable response by the international scientific and engineering community to the 37 volumes published to date is an indication of the success of our authors in fulfilling this purpose. This is recommended reading for all mechanical engineers and researchers. - Provides an overview of review articles on topics of current interest - Bridges the gap between academic researchers and practitioners in industry - A long-running and prestigious series
Opto Mechatronic Systems Handbook
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Author : Hyungsuck Cho
language : en
Publisher: CRC Press
Release Date : 2002-09-30
Opto Mechatronic Systems Handbook written by Hyungsuck Cho and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002-09-30 with Science categories.
Opto-mechatronics-the fusion of optical and mechatronic technologies-has been integral in the evolution of machines, systems, and products that are smaller and more precise, more intelligent, and more autonomous. For the technology to reach its full potential, however, engineers and researchers from many disciplines must learn to work together through every phase of system development. To date, little effort has been expended, either in practice or in the literature, to eliminate the boundaries that exist between the optics and mechatronics communities. The Opto-Mechatronics Systems Handbook is the first step in that direction. Richly illustrated and featuring contributions from an international panel of experts, it meets three essential objectives: Ö Present the definitions, fundamentals, and applications of the technology Ö Provide a multidisciplinary perspective that shows how optical systems and devices can be integrated with mechatronic systems at all stages, from conceptualization to design and manufacturing Ö Demonstrate the roles and synergistic effects of optical systems in overall system performance Along with his fresh approach and systems perspective, the editor has taken care to address real cutting-edge technologies, including precision opto-mechatronic systems, intelligent robots, and opto-microsensors. Ultimately, the Opto-Mechatronics Systems Handbook provides readers with the technological foundation for developing further innovative products and systems.